167 results about "Laser scattering" patented technology

The invention relates to the technical field of chip optical detection, and discloses a high-precision defect detection method and system for a semiconductor chip. Initial detection data are obtained through laser scattering and photo-thermal microscopic detection, key visual features are extracted and converted into a multi-dimensional visual feature matrix, and the multi-dimensional visual feature matrix is used for detecting the defects of the semiconductor chip; according to the method, a fuzzy sensing area is positioned and potential defects are identified by using a map clustering algorithm, adaptive analysis of a supplementary visual angle is carried out and supplementary detection data is generated, and finally defect identification is carried out through the supplementary data and popularity information to obtain a chip defect result. The method effectively improves the precision and reliability of defect detection, especially has obvious advantages in recognition of complex and fuzzy regions, and solves the problem of insufficient precision of single-path optical imaging detection in the prior art.

The invention relates to the technical field of laser deposition control, in particular to an unmanned aerial vehicle metal part ultrasonic field auxiliary laser deposition system which comprises the following modules: a data acquisition module for acquiring a molten pool thermal field signal, a sound field signal and a laser scattering signal, and performing sampling, filtering and synchronous processing to obtain molten pool original data; the micro-flow digital twinning module is used for establishing a molten pool micro-flow digital twinning model according to the molten pool original data and simulating molten pool micro-flow behavior to obtain micro-flow prediction data; and the microflow ultrasonic regulation and control module is used for generating an ultrasonic pulse sequence according to the microflow prediction data and applying the ultrasonic pulse sequence to the molten pool to regulate and control the flow field. According to the invention, through the molten pool microflow digital twinning module and the microflow ultrasonic regulation and control module, real-time modeling and regulation and control of the molten pool microflow structure in the complex geometric part deposition process are realized, the problem that local vortexes, shear layer differences and flow field anomalies cannot be identified in real time in the traditional technology is solved, and the molten pool microflow evolution can be actively reconstructed.

The invention provides a perovskite photovoltaic cell ruling machine and a control method thereof, and the method comprises the steps: collecting a cell surface map at the end of first ruling, converting the cell surface map into a cell brightness map, and determining the laser scattering amount of each pixel point in the cell surface map; extracting a laser interference component in the battery brightness diagram based on all laser scattering amounts in the battery surface diagram, determining an equal-brightness-domain sequence of the battery brightness diagram, correcting the laser interference component according to the equal-brightness-domain sequence to obtain a brightness equalization component, determining a brightness equalization diagram through the brightness equalization component, and obtaining a battery scribing auxiliary diagram; the scribing depth of each scribed line on the perovskite photovoltaic cell is determined through the cell scribing auxiliary graph and the brightness balance graph, and the focal length of the corresponding laser on the perovskite photovoltaic cell scribing machine next time is adjusted through the scribing depth of each scribed line on the perovskite photovoltaic cell, so that self-adaptive adjustment of the laser focal length can be realized. Therefore, slag is prevented from appearing in the scribing process of the perovskite photovoltaic cell.

The invention discloses a direct injection type total sulfur analyzer with a pretreatment structure, and relates to the technical field of total sulfur analyzer pretreatment, the direct injection type total sulfur analyzer comprises a sulfur detection box and a side-hung regulation box, a flow direction regulation pipeline is installed in the side-hung regulation box, and two sides of the bottom of the flow direction regulation pipeline symmetrically communicate with gas guide pipes; the air guide pipe penetrates through the side-hung regulation and control box and is fixedly communicated with a conducting pipe; through the design of the two-path parallel flow direction adjusting pipeline, the non-stop maintenance function is achieved, the laser scattering sensor and the intelligent regulation and control system are combined, the airflow path and the processing strategy can be automatically adjusted according to impurity data monitored in real time, the problems that in the prior art, maintenance is difficult, adaptability is poor, and the intelligent degree is low are solved, and the maintenance efficiency is improved. The detection efficiency and reliability of the total sulfur analyzer are remarkably improved, and the method is particularly suitable for long-term continuous monitoring tasks in a complex industrial environment.

The invention relates to the technical field of medical equipment, and discloses an intelligent monitoring system and method for temperature and humidity in the use process of a medical refrigerator, and the system comprises a temperature and humidity waveform parameter processing module, a temperature and humidity monitoring analysis module and a temperature and humidity monitoring execution module. When the temperature and humidity of the medical refrigerator are monitored in real time, the system analyzes the physical state of the contact surface of the sensor in real time by deploying a laser scattering compensation algorithm, and can dynamically recognize the problem of measurement distortion caused by shielding of condensate water and biological samples, so that the system automatically corrects the drift error of temperature and humidity sampling values when the contact surface is interfered; accuracy of supervision data is ensured, and temperature and humidity supervision errors are eliminated.

The invention discloses a high-precision dynamic linear displacement metering device based on laser scattering suppression, and relates to the related technical field of displacement monitoring, and the device comprises a host, rails, a stabilizing mechanism, supporting legs, a measuring mechanism, a data processing mechanism, a data processing mechanism, a data processing mechanism, a data processing mechanism, a data processing mechanism and a data processing mechanism, the host is slidably installed above the rails and is used for horizontally moving the host; the stabilizing mechanism is installed between the rails and is used for keeping the host in a horizontal state; the stabilizing mechanism is connected between the track and the main machine, the two adjusting mechanisms are installed between the stabilizing mechanism and the main machine and used for adjusting the horizontal angle and the inclination angle of the main machine, and the track, the stabilizing mechanism, the supporting feet and the adjusting mechanisms are arranged to cooperate with each other. The invention relates to a multi-dimensional angle adjusting device, in particular to a multi-dimensional angle adjusting device, which solves the problem that existing equipment cannot realize horizontal movement, autonomous leveling and multi-dimensional angle adjustment in industrial field application. The problems that an existing dynamic linear displacement metering device is insufficient in environmental adaptability and weak in anti-interference capacity, and the measurement stability is limited by external conditions are solved.

The invention provides a welding seam parameter anti-interference measurement method, which comprises the following steps of: acquiring spectrum characteristics of a high-reflectivity surface through a laser scattering technology and Fourier transform processing, matching a correction coefficient, realizing weighted adjustment and geometric parameter extraction of a scattering signal, accurately quantifying a groove size in combination with an edge enhancement algorithm and a three-dimensional contour modeling technology, and accurately measuring the welding seam parameters. Interference such as surface oil stain, corrosion and stripe fracture is effectively overcome by using image filtering, morphological reconstruction and an abnormal value elimination algorithm, and finally, high-precision and anti-interference measurement of the weld groove angle, the truncated edge thickness and the assembly alignment tolerance under high-reflection, corrosion and complex working conditions is realized through multi-source data fusion and self-adaptive calculation range adjustment. And the reliability and the automation level of welding quality detection are remarkably improved.

The invention discloses an integrated fire detection intelligent lamp for a railway tunnel. The integrated fire detection intelligent lamp comprises a multi-mode sensing module, an integrated thermal imaging array sensor, a multispectral flame sensor, a laser scattering type smoke sensor and an electrochemical CO sensor. An FPGA chip and a lightweight convolutional neural network model are arranged in the signal processing module, space-time fusion analysis is carried out on multi-modal sensing data in real time, and a fire judgment threshold is dynamically optimized through transfer learning; the dynamic ad hoc network communication module supports dual protocols of LoRaWAN and TSN; the adaptive power supply adopts an AC / DC power conversion module, integrates a piezoelectric vibration energy collection module and a thermoelectric power generation module, and combines a super capacitor and a lithium battery to realize quintuple redundant power supply; and the three-dimensional lighting array consists of a plurality of groups of independently controlled LED matrixes and is used for dynamically adjusting a lighting area and brightness distribution. The fire hazard detection sensitivity is improved through multi-dimensional data fusion, the illumination function is achieved, and the use requirement of the railway tunnel in the severe environment is met.

The invention relates to a simulation method and device for a hydraulic support column descending and support moving dust production migration rule, and belongs to the technical field of coal mine dust control. In order to solve the problems that the prediction error of an existing model exceeds 40%, the migration path deviation exceeds 50%, the side seam adjusting precision of the device is + / -20 mm, and the dust falling efficiency fluctuates by 35%, a multi-factor coupling modeling and intelligent dynamic regulation and control technology is provided. The method comprises the following steps: constructing a dust production prediction model of coal rock hardness, water content, roof pressure bearing and side seam spacing coupling, monitoring dust distribution in real time by adopting a laser scattering sensor and a particle size spectrometer array, designing a high-precision electric push rod to adjust the side seam spacing to + / -0.5 mm, and dynamically correcting an error in combination with Kalman filtering. The device comprises an adjustable support assembly, a triaxial pressure loading module and an intelligent verification system. The dust production prediction error is 9.8%, the migration deviation is 14.6%, the adjusting efficiency is improved by 3.2 times, the dust falling fluctuation is compressed to 7.9%, and the respiratory dust inhibition rate reaches 85.4%.

The invention discloses a macro-energy laser light path environment purification method, which specifically comprises the following steps that three stages of purifiers are arranged in a closed environment of a photoelectric same cabin, and the three stages of purifiers comprise a first-stage high-speed airflow purging module, a second-stage electrostatic adsorption module and a third-stage high-efficiency filtering module; a laser scattering type impurity sensor is arranged in a closed environment of the photoelectric same cabin for real-time monitoring; the method comprises the following steps: firstly, carrying out primary purification, and carrying out replacement purging on a closed environment of the photoelectric same bin by adopting high-purity inert gas; then a third-stage purifier is started for deep purification, and when the real-time impurity concentration monitored by the impurity sensor is lower than a set threshold value, the third-stage purifier is closed. According to the technical scheme, the light path can be efficiently, stably and dynamically regulated and controlled to be purified, deep removal of impurities in the light path is achieved, and stable transmission of high-energy laser is guaranteed.

The invention discloses a quartz sand proppant turbidity online detection method based on laser scattering, and relates to the technical field of industrial online detection. The high-precision laser sensor is used for collecting scattering signals, and a wavelet threshold denoising algorithm is combined, so that impurity noise and particle size heterogeneity interference are effectively removed, real-time online detection of the turbidity of the quartz sand suspension is realized, and the production efficiency and the timeliness of product quality control are remarkably improved; a particle swarm optimization algorithm is utilized to dynamically adjust detection parameters, an environmental influence model is established to quantify the influence of temperature and flow velocity changes on scattering signals, and a least square method is adopted to fit residual errors for correction, so that the detection precision and stability are further improved, and the reliability of a detection result under a complex working condition is ensured; the online turbidity value is monitored in real time, a feedback mechanism is triggered to automatically adjust production line parameters, and intelligent quality control is achieved.

The transmission-type wavelength conversion device comprises a laser scattering layer, a heat sink substrate layer, a wavelength conversion layer and a light homogenizing layer which are sequentially arranged in a stacked mode. Wherein the laser scattering layer is used for scattering laser from a form of Gaussian distribution of energy and strip-shaped light spots into a form of weak Gaussian distribution of energy and round or similar round light spots, the heat sink substrate layer is a light-transmitting substrate with the laser transmittance being 75% or above, and the wavelength conversion layer is used for converting at least part of the laser into fluorescent light. And the light homogenizing layer is used for scattering fluorescent light and residual laser. According to the device, on the premise that no extra lens is added and the size of the white laser light source is not enlarged, through the dual effects of the laser scattering layer and the light beam homogenizing layer, effective shaping of laser spots can be achieved, and the color uniformity and the illumination quality of the white laser light source can be remarkably improved; and a feasible solution is provided for application of a miniaturized and integrated white laser light source in a circular light spot scene.

The invention provides a liquid particle counting method and device based on an image sensing chip, and mainly solves the problems that in the existing oil product particle detection technology, a laser scattering automatic particle counting method is low in detection precision, and a microscope detection method is high in cost and poor in reliability. According to the scheme, a microscopic image of a liquid sample is shot by a chip end through a light source and an image sensing chip, the collected microscopic image of the liquid sample is encoded and preprocessed by a computer end, and particulate matter recognition and particle size analysis are realized through a computer vision target detection module based on deep learning. Experiments prove that the method can accurately identify particles and effectively remove interferents such as bubbles and water drops, the measurement precision is improved by about 25%, and the particle detection range is expanded to 0.4-1000 microns. According to the overall design, collaboration and unification of miniaturization, high precision, high efficiency and low cost are achieved, and a new technical path is provided for real-time monitoring and field application of oil product particles.

To provide a flaky silver powder having a tapped density of from 0.8 g / mL to 1.9 g / mL, and a cumulative 50th percentile particle diameter (D50) of from 2 μm to 7 μm, where the cumulative 50th percentile particle diameter (D50) is measured by laser diffraction or laser scattering particle size analysis.

The invention relates to the technical field of silver powder production detection control, and discloses a silver powder production detection method and system based on the Internet of Things and a storage medium. The method comprises the following steps: deploying a laser scattering and conductivity sensor to construct a silver powder detection Internet of Things to obtain real-time data; filtering the data to calculate feature points to obtain a parameter set; establishing a dual-threshold feedback control model based on the parameter set to realize purity monitoring and obtain an early warning signal; and generating a detection report according to the early warning signal to record silver powder characteristics to form a batch file. The technical problems of insufficient real-time monitoring capability, insufficient environmental factor interference compensation and insufficient quality data integrated management in traditional silver powder production detection are solved.

The invention provides a shock wave curvature measurement method and device. The method comprises the following steps: acquiring an original image obtained through a planar laser scattering technology; performing contrast enhancement and noise reduction on the original image to obtain a target image; a window area is selected from the shock wave starting point in the target image; carrying out adaptive image segmentation on the newest window area to obtain a local shock wave curve, and judging whether a shock wave end point exists or not; if not, moving the window area in the target image based on the geometric direction of the latest local shock wave curve, and returning to the step of performing adaptive image segmentation on the latest window area to obtain the local shock wave curve; if yes, the local shock wave curves are spliced, the curvature is calculated, and the shock wave curvature is obtained. According to the scheme, the strategy of combining the moving window and the local adaptive image segmentation is adopted, it is ensured that the optimal segmentation effect can be achieved in each local area, the accuracy of shock wave curve extraction is improved, and therefore the purpose of improving the accuracy of shock wave curvature measurement is achieved.

The invention discloses a Z-Wave-based air-breathing smoke sensing detection early warning system, and the system comprises a sampling detection unit which is used for extracting an air sample of a monitoring region through a plurality of air suction pipelines, and generating smoke particle concentration data through a laser scattering sensor; the dynamic analysis unit is used for receiving the smoke particle concentration data based on a Z-Wave protocol and generating early warning signals according to the concentration gradient change and preset threshold grading; and the linkage execution unit is used for mapping the early warning signal to Z-Wave network equipment and driving a ventilation system, a spraying device and an alarm to execute hierarchical response actions. By means of active inspiration sampling and Z-Wave wireless network deployment, large-range non-blind-area early smoke detection is achieved, concentration gradient intelligent analysis and equipment hierarchical linkage response are combined, and the timeliness and accuracy of fire early warning and the collaboration of emergency disposal are remarkably improved.

A hovering and / or accompanying laser decoy, an attracting and deviating system comprising the decoy, the hovering and / or accompanying laser decoy comprising a laser, a decoy head and a carrier, wherein the laser comprises a connecting part of the laser and the decoy head, the decoy head comprises a laser scattering body, a base and a connecting part with the laser, the connecting part of the laser and the decoy head is arranged to meet the combination of the laser and the decoy head being connected as a whole, and the laser emitted by the laser irradiates into the decoy head and is partially or totally scattered by the laser scattering body therein. The decoy and the attracting and deviating system comprising the decoy are particularly suitable for laser guidance attracting and deviating protection of movable targets.

The invention discloses a system and a process for reducing long film distortion caused by stress mutation in an EPI process, and relates to the technical field of wafer production, an edge defect detection module is used for scanning an annular region of a wafer edge, dividing the region into N circumferential sectors, identifying geometric parameters of microcracks in each sector j, and determining the micro-crack distortion in each sector j; and outputting a structured defect coordinate list organized according to each sector j. According to the method, the edge of a wafer is divided into N sectors, the angular position, the radial position and the depth of each micro-crack are obtained based on laser scattering imaging, structural features such as equivalent crack depth, average radial position and nearest neighbor distance are generated through polymerization, and a five-dimensional stress concentration factor (SCF) lookup table constructed offline is combined with material parameters, so that the depth of each micro-crack is obtained. The thermal stress risk of each sector is quickly predicted, and when the SCF exceeds a threshold value of 1.8, the system only implements bias voltage modulation on the high-risk sector, so that accurate intervention that the high-risk sector is reinforced when the high-risk sector is weak is realized.

The invention discloses a radiopharmaceutical dose automatic calibration method, which comprises the following steps of: performing charge state analysis on an iodine-131 radiopharmaceutical solution to determine the polarity and the intensity of an electrostatic charge required to be applied by a needle; before injection, static charges are applied to the needle head through the micro-current generating device, so that medicine can be effectively separated from the needle head after injection is completed, and residues are reduced; a high-precision micro-injection pump is combined with a pressure sensor to control the injection speed and dose output, and the fluid flowing state is monitored in real time to avoid abnormal conditions; after injection, a laser scattering detection module and an image recognition algorithm are used for capturing and evaluating the volume of residual liquid drops at the tail end of a needle head in real time, the dose needing to be additionally supplemented is calculated according to the volume, and it is ensured that a patient receives the accurate target dose; no needle residue is confirmed again after dose supplementation, so that the accuracy of the final administration dose is ensured; the whole system is flexible and high in adaptability, and can be adjusted according to the characteristics of different types of radiopharmaceuticals.

This invention provides a laser scattering prevention device that facilitates the installation and removal of protective coverings when removing rust, paint, and other materials using laser irradiation, and also enables the removal process to be carried out more efficiently. [Solution] A box-shaped structure 1 is constructed to enclose an object P and a worker Q who irradiates the object P with a laser. The box-shaped structure 1 has a rectangular top plate 1A. A pair of cover plates 1B are provided along both longitudinal edges of the top plate 1A in a bendable manner. A pair of reinforcing plates 1C are provided at both longitudinal ends of the top plate 1A in a bendable manner. A pair of opening / closing sheets 1D are provided on the lower side of the reinforcing plates 1C in an opening / closing manner. Connecting devices 2 are provided to connect each cover plate 1B and each reinforcing plate 1C. The box-shaped structure 1 is made self-supporting by the pair of cover plates 1B of the box-shaped structure 1 connected by the connecting devices 2. It is configured so that people can enter and exit the box-shaped structure 1 from the opening side covered by the opening / closing sheets 1D.

The present application relates to copper rod oxidation layer detection technical field, especially in kind of copper rod surface oxidation layer detection method and system, method includes: establishing calibration database, detecting the surface oxidation layer of the copper rod to be measured, collecting spectral image data and laser scattering data; Based on the spectral image data, get the composition parameter and thickness parameter, based on the laser scattering data analysis scattering light intensity, get scattering parameter; Refer to the calibration database, convert the composition parameter, the thickness parameter and the scattering parameter into composition index, thickness index and compactness index; Construct a judgment rule containing multiple judgment channels, judge the composition index, thickness index and compactness index through the judgment channel respectively, and each judgment channel outputs an initial detection signal; Integrate all the initial detection signals to generate a detection result. The present application effectively detects the multi-dimensional characteristics of copper rod oxidation layer, improves the detection accuracy, and obtains comprehensive and reliable detection results.

The present invention provides a method for simulating laser pulse echoes from jungle targets based on KD tree acceleration, comprising the following steps: Step S1: constructing a physical model of a tree, comprising a trunk and a crown; Step S2: constructing a laser scattering model of the tree; Step S3: constructing a KD tree structure encompassing the jungle and background environment; Step S4: sampling the laser beam emitted by a laser radar (LiDAR), generating a photon beam based on its spatial energy distribution, and performing wavefront segmentation; Step S5: calculating the interaction between each photon in the photon beam generated in Step S4 and the KD tree structure generated in Step S3 to determine whether the photon hits the trunk or crown of the tree in the KD tree structure constructed in Step S3. Step S6: calculating the scattering events of the photons along the path; and Step S7: calculating the laser radar pulse echo based on the interaction between the photon beam and the KD tree structure obtained in Step S5. The present invention has the advantages of wide applicability and ease of use.

The invention discloses a regeneration defect detection device and a regeneration defect detection method. The regeneration defect detection device comprises a laser emitting unit, an imaging detection unit and a processing unit, the laser emitting unit is positioned on one side of the first surface of the to-be-detected sample and is used for emitting detection laser to the first surface; the imaging detection unit is positioned on one side of the second surface of the to-be-detected sample and is used for receiving scattered laser scattered by the detection laser based on the regeneration defect of the to-be-detected sample and imaging; the second surface intersects with the first surface; and the processing unit is electrically connected with the imaging detection unit and is used for determining the regeneration defect of the to-be-detected sample according to the laser scattering image of the regeneration defect. By adopting the technical scheme, the regeneration defect of the to-be-detected sample is analyzed through laser scattering imaging, so that the shallow surface regeneration defect of the to-be-detected sample is detected, and the defect depth is determined.

The invention belongs to the technical field of environmental salt mist concentration measurement, and particularly relates to a salt mist concentration measurement system and method based on laser scattering and absorption spectrum, which can obtain the mass concentration of salt mist liquid drops and the concentration of chloride ions in the liquid drops, further obtain the quantitative result of the salt mist concentration and realize the rapid and accurate measurement of the salt mist concentration. Aiming at the problem of inaccurate online measurement of the salt mist concentration, the invention innovatively proposes simultaneous measurement of a laser scattering signal and a laser absorption spectrum, measurement of the mass density of salt mist liquid drops through the scattering signal and correction of a laser absorption signal. The concentration of chloride ions is obtained through the laser absorption spectrum, and then the salt mist concentration is calculated. According to the invention, on-line and accurate measurement of the environmental salt mist concentration can be realized.

The invention discloses intelligent kitchen appliance oil smoke emission granularity grading detection equipment which comprises an equipment body frame, a lower control carrier is fixedly mounted at the bottom of the equipment body frame, an upper processing carrier is fixedly mounted at the top of the equipment body frame, and a data processing port is formed in the outer side of the upper processing carrier. A laser scattering body is arranged on the outer side of the upper processing carrier, and a grading detection assembly is arranged in the equipment body frame. According to the intelligent kitchen electric cooking fume emission granularity grading detection equipment, through the arrangement of the grading detection assembly and the design of the annular detection body, a cooking fume sample can be captured from all directions, sample deviation caused by single-direction sampling is avoided, and when a micro motor drives a rotating disc to rotate, multiple sets of wired pipes and filter screen covers are driven to rotate; meanwhile, the stretching length of the telescopic sampling head can be dynamically adjusted according to the oil smoke concentration, deep sampling is carried out in a high-concentration area, contraction protection is carried out in a low-concentration area, and the uniformity of samples in different concentration scenes is ensured.

The utility model discloses a fire early warning system, including very early stage smoke detection device, multi sensor integrated device, infrared thermal imaging high definition camera and electric control device, very early stage smoke detection device includes air -suction type smoke detector and air sampling pipe network, air -suction type smoke detector built -in laser scattering detection unit, and through the air pump from air sampling pipe network continuous collection air sample, and air sampling pipe network is annular and is arranged on the top of energy storage container, multi sensor integrated device is installed in the battery pack inside, infrared thermal imaging high definition camera is used for identifying battery module surface temperature gradient anomaly, electric control device respectively with very early stage smoke detection device, multi sensor integrated device, infrared thermal imaging high definition camera electric connection, and with the backstage network connection, is used for according to multi sensor data fusion to establish the hierarchical early warning mechanism and sends to the backstage. The utility model technical scheme can promote the timeliness and accuracy of fire prevention and control.

The application discloses a switch cabinet multi-parameter integrated extremely early fire monitoring and early warning device, which comprises a pyrolysis particle sensor module, a gas sensing module and an intelligent control module, the intelligent control module is in communication connection with the pyrolysis particle sensor module and the gas sensing module, the pyrolysis particle sensor module comprises a laser scattering cavity, the laser scattering cavity is arranged at a downwind direction of an air duct, and the pyrolysis particle sensor module further comprises a gas driving component for blowing the gas in the air duct to the laser scattering cavity; a flow guide piece is arranged outside a preset distance of the downwind direction of the outlet of the laser scattering cavity, the flow guide piece is used for forming a rotational flow area for the blown air, and a gas sensor in the gas sensing module is located in the rotational flow area. The switch cabinet multi-parameter integrated extremely early fire monitoring and early warning device can consider the miniaturization of the overall volume and the timeliness and accuracy of early warning, is convenient to be installed in a smaller space in the switch cabinet, avoids the interference of particulate matters in the air, and improves the fire early warning accuracy through rapid analysis on multiple parameters.

The invention discloses a wafer cleaning solution formula dynamic adjustment method, which comprises the following steps: monitoring the conductivity, pH value, temperature and oxidation reduction potential of a cleaning solution in real time, generating an adjustment instruction through a central control unit, dynamically injecting acidic and alkaline regulators or oxidants, and accurately controlling the injection amount by using a micro pump. And after adjustment, the cleaning effect is verified through a laser scatterometer, and if the residue concentration exceeds the standard, the adjustment process is repeated. The sensor probe adopts a corrosion-resistant coating, and the circulating system is provided with a self-cleaning filtering device. The cleaning effect consistency and efficiency can be remarkably improved, the implementation cost and complexity are reduced, and the requirement of modern semiconductor manufacturing for an efficient intelligent cleaning process is met.