A kind of
coating method based on waveband adaptive wide spectrum film
layer thickness monitoring, to improve the
coating quality and efficiency of
optical thin film, by layer by layer design
optical thin film structure, and using film
system design software to calculate
transmittance spectrum, to evaluate the influence of thickness change on optical performance;In the
coating process, waveband
adaptive monitoring technology is used, according to the characteristics of each layer of film and the performance of coating
machine, to adaptively select high sensitivity monitoring
wavelength, to realize accurate monitoring of film
layer thickness in wide spectral range.The present application calculates the influence of current film thickness deviation on current film
transmittance for layer by layer design of
optical thin film, obtains the sensitivity of
transmittance spectrum to film thickness deviation layer by layer, sets the sensitivity threshold, selects high sensitivity
wavelength as monitoring
wavelength, to improve the
signal-to-
noise ratio of suppression monitoring, to improve the deposition accuracy of film
layer thickness.