This invention discloses an enhanced
high electron mobility
transistor (HEMT) power device and its fabrication method. The device comprises, from bottom to top, a substrate, a pre-lay layer, a
nucleation layer, a gradient layer, a high-resistivity layer, a channel layer, a
barrier layer, and a P-type layer. A source and drain are formed on the
barrier layer, and a gate is formed on the P-type layer.
Passivation layers are disposed on the barrier
layers between the source and the P-type layer, and between the drain and the P-type layer, respectively. The P-type layer comprises an InGaN
superlattice and an AlGaN
superlattice stacked on top of the InGaN
superlattice. This invention can simultaneously achieve multiple process objectives, including improving material
crystal quality, increasing hole injection efficiency, and enhancing device
saturation current,
threshold voltage, and reliability. It effectively improves the activation efficiency of
acceptor doping and increases the hole carrier concentration of the P-type layer material. Correspondingly, it can also reduce the
acceptor doping concentration and decrease the
impurity scattering mechanism affecting hole carriers.