The invention provides an III
nitride-based double-
heterojunction phototransistor, belongs to the technical field of
semiconductor devices and provides an III
nitride-based double-
heterojunction phototransistor and a preparation method thereof. The III
nitride-based double-
heterojunction phototransistor comprises a substrate and an epitaxial layer, wherein the epitaxial layer grows on the substrate; and the epitaxial layer sequentially comprises a buffer layer or a
transition layer, a donor heavily-doped
ohmic contact layer, an
alloy composition gradient layer, a donor doped layer of a relatively
broad band gap material, an unintentionally doped layer of the relatively
broad band gap material, an
acceptor doped layer, an unintentionally doped light
absorption layer, the
alloy composition gradient layer and a donor heavily-doped window layer of the relatively
broad band gap material from bottom to top. By an overhead collector region structure, with the III nitride multi-element
alloy material with a relatively broad
band gap light
absorption layer as the window layer of an incident light, the
quantum efficiency is improved; and the number of photo-generated holes is increased, so that the
photocurrent gain of the device is improved. A reverse heterojunction is adopted as an emitter junction in a lower emitter region; and the unintentionally doped layer of the relatively broad
band gap material is introduced as an
acceptor-doped
diffusion barrier layer and a base region-emitter region heterointerface energy band sag compensation layer, so that the
electron injection efficiency of the
transistor is improved. The III nitride-based double-heterojunction phototransistor has the characteristics of high
photocurrent gain, stable device performance and the like.