The invention relates to the technical field of
semiconductor materials, and particularly discloses an atomization cleaning method for an
indium phosphide wafer. The atomization cleaning method comprises the following steps that an
indium phosphide wafer rotating at a
constant speed is sequentially subjected to atomization cleaning through a first acid solution and deionized water and then subjected to
nitrogen purging
drying; carrying out atomization cleaning with an
alkaline peroxide solution and deionized water, and then carrying out
nitrogen purging
drying; and finally, carrying out atomization cleaning by using a second acid solution and deionized water, and carrying out
nitrogen purging
drying to obtain the clean
indium phosphide wafer. According to the method, based on an acid-alkali-acid three-step
synergistic mechanism, full-spectrum
pollutant removal of oxides, organic matters, particles and
metal ions is realized; the
indium phosphide wafer rotating at a high speed can immediately strip reaction products and waste liquid through
centrifugal force, and secondary adsorption is avoided; the technical defects that a traditional RCA
wet cleaning process is prone to corroding the wafer, the
surface roughness of the wafer is degraded, and secondary
pollution is caused are effectively overcome.