4 results about "Ruthenium tetroxide" patented technology

An exemplary etching method can include flowing an oxygen-containing precursor into a processing region of a semiconductor processing chamber. The method can include contacting a substrate contained in the processing region with the oxygen-containing precursor. The substrate can include an exposed ruthenium region, and the contacting can produce ruthenium tetroxide. The method can include vaporizing the ruthenium tetroxide from a surface of the exposed ruthenium region. An amount of oxidized ruthenium can be retained. The method can include contacting the oxidized ruthenium with a hydrogen-containing precursor. The method can include removing the oxidized ruthenium.

The application relates to the technical field of metal refining, in particular to a ruthenium refining device and method, which comprises a distillation system, an absorption system, a reduction filtering system and a vacuum system; the distillation system, the absorption system and the reduction filtering system are sequentially connected in communication; the vacuum system is connected in communication with the end of the absorption system and the reduction filtering system; a ruthenium-containing material is reacted with an oxidizing agent in the distillation system to generate ruthenium tetroxide gas; hydrochloric acid in the absorption system is used to absorb the ruthenium tetroxide gas to generate a chlororuthenate solution; and the reduction filtering system reduces chlororuthenate in the chlororuthenate solution into ruthenium metal. In the application, the distillation system, the absorption system, the reduction filtering system and the vacuum system are cooperatively matched, so that the operation process of refined ruthenium is simplified, and the recovery rate of the ruthenium metal is improved.

The invention relates to the technical field of metal refining, in particular to a ruthenium refining device and method.The ruthenium refining device comprises a distillation system, an absorption system, a reduction filtering system and a vacuum system, the distillation system, the absorption system and the reduction filtering system communicate in sequence, and the vacuum system communicates with the tail end of the absorption system and the reduction filtering system; the ruthenium-containing material reacts with an oxidizing agent in the distillation system to generate ruthenium tetroxide gas; hydrochloric acid in the absorption system is used for absorbing ruthenium tetroxide gas to generate a chlororuthenium acid solution; and the reduction filtering system is used for reducing the chlororuthenium acid in the chlororuthenium acid solution into a ruthenium metal simple substance. In the application, through the cooperation of the distillation system, the absorption system, the reduction filtration system and the vacuum system, the operation process of the concentrated ruthenium is simplified, and the recovery rate of ruthenium metal is improved.

The application discloses an extraction method for extracting platinum group metals, and relates to the technical field of precious metal recovery; the extraction method comprises the following steps: taking a platinum group metal concentrate for pretreatment, slurring the pretreated platinum group metal concentrate by using a sodium chlorate solution with a concentration of 0.8-1.2 mol / L, controlling the solid-liquid ratio of the slurring system to be 1:3-1:5 (g / mL), stirring the slurring system at a stirring speed of 150-200 r / min and a temperature of 25-35 DEG C for 20-30 min, and obtaining a uniform slurring liquid; the slurring liquid obtained in the step S1 is transferred into a distillation reactor, heated to 90-95 DEG C and kept, and dilute sulfuric acid with a concentration of 1-3 mol / L is slowly added at a rate of 10-20 mL / min; S3, the temperature in the distillation reactor is kept at 90-95 DEG C, and the distillation is continuously stirred for 2.0 h under normal pressure, and the volatilized osmium and ruthenium tetroxide are collected through a tail gas absorption device during the distillation; the technical scheme provided by the application can effectively improve the recovery efficiency and recovery rate of ruthenium and osmium in the platinum group metal ore.