8 results about "Ruthenium dioxide" patented technology

Methods of fabricating and packaging ohmic microelectromechanical system (MEMS) switch devices can include constructing a switch device on an insulating substrate. The switch device can have contacts composed of a platinum group metal. The methods can also include forming an oxide layer of the platinum group metal on an outer surface of each of the one or more contacts. The methods can also include bonding an insulating cap to the insulating substrate to hermetically seal the switch device. The bonding can occur in an atmosphere having an oxygen proportion in a range of 0.5% to 30%, such that after the switch device has been hermetically sealed within a sealed cavity, the atmosphere within the sealed cavity has an oxygen proportion in a range of 0.5% to 30%. The platinum group metal can be ruthenium, and the oxide layer of the platinum group metal can be ruthenium dioxide.

The present application belongs to the field of catalysis technology, and relates to a short-branched carbon nanotube / alloy / carbon fiber self-supporting catalytic electrode material and a preparation method and application thereof. A cloth-like carbon fiber is used as a three-dimensional skeleton, short-branched carbon nanotubes are connected to the surface of the three-dimensional skeleton through covalent bonds, and double-metal alloy nanoparticles are embedded on the tube body of the short-branched carbon nanotubes, the length of the short-branched carbon nanotubes is 0.1-2.5 microns, and the double-metal alloy nanoparticles are Co3Fe7 nanoparticles, Fe 0.64 Ni 0.36 nanoparticles or CoNi nanoparticles. The catalytic electrode material provided by the present application can work efficiently and stably under strong alkaline conditions, and simultaneously has dual-function activity of ORR and OER. Experiments show that when the catalytic electrode material is used as an anion exchange membrane water electrolysis anode catalyst, it can be stably operated for a long time; when used as a flexible zinc-air battery cathode catalyst, its cycle life is better than that of a commercial platinum-carbon and ruthenium dioxide catalyst.

The application relates to a ruthenium dioxide catalyst and a preparation method and application thereof, relates to the technical field of water electrolysis catalysts, and solves the problems of complicated preparation and poor stability of existing ruthenium-based oxygen evolution catalysts in the prior art. In the application, gelatin and a carbonate are dissolved in water, water bath stirring is carried out, and mixed solution A is obtained; a ruthenium salt is dissolved in water, ultrasonic treatment is carried out, and mixed solution B is obtained; mixed solution B is poured into mixed solution A, and after stirring and mixing, a gel is formed, which is a catalyst precursor; after calcination treatment, the ruthenium dioxide catalyst is obtained. The application has the advantages of low cost and good catalytic stability, and has a wide application prospect as a proton exchange membrane water electrolysis anode catalyst.

The application discloses nano-ruthenium dioxide and a preparation method thereof, and belongs to the technical field of materials. The preparation method is a homogeneous hydrothermal method for preparing the product. By setting parameters of a reaction system, the nano-ruthenium dioxide product with high yield, high purity, high specific surface area and high crystallinity can be prepared in a short time.

The application discloses application of a heteroatom-doped ruthenium dioxide catalyst in a hydrogen evolution reaction, wherein the heteroatom is one of transition metals or rare earth metals, and the transition metals or rare earth metals are doped into a ruthenium dioxide crystal lattice. The catalyst is used in an alkaline water electrolysis hydrogen evolution reaction, and excellent hydrogen evolution performance is exhibited.

This invention relates to a lanthanum-hafnium-tantalum-tungsten multi-component co-doped ruthenium dioxide catalyst, its preparation method, and its application in acidic oxygen evolution reaction (OER). The preparation method involves dissolving ruthenium, lanthanum, hafnium, tantalum, and tungsten sources in a solvent, removing the solvent to obtain a precursor powder. A molten salt is then heated to melt, followed by the addition of the obtained precursor powder, and the reaction is carried out at a constant temperature. The resulting reaction solution is subjected to solid-liquid separation, and the solid phase is collected; the obtained solid phase is the lanthanum-hafnium-tantalum-tungsten multi-component co-doped ruthenium dioxide acidic OER catalyst. The catalyst obtained by this invention exhibits excellent OER catalytic performance in a 0.5 mol / L H₂SO₄ electrolyte at 10 mA / cm⁻¹. 2 The oxygen evolution overpotential is only 158 mV at current density, and it can achieve long-term stable operation for more than 1800 hours.

The embodiment of the application discloses a metal wire manufacturing method and a semiconductor structure, which comprises the following steps: forming a metal layer of a ruthenium material on a substrate; performing first etching on the metal layer to form a groove intermediate structure; depositing a carbon-based protective layer on the inner wall of the groove intermediate structure; performing second etching on the carbon-based protective layer on the bottom of the groove intermediate structure to remove the carbon-based protective layer, and performing oxidation on the exposed surface of the ruthenium material to form a ruthenium dioxide surface layer; performing third etching on the ruthenium dioxide surface layer to remove the ruthenium dioxide surface layer and expose the surface of the underlying ruthenium material, so that the first etching is performed again; the process of the first etching, the deposition of the carbon-based protective layer, the second etching and the third etching is repeatedly performed in sequence until the groove completion structure and the metal wires divided by the groove completion structure are formed; and the groove sidewall is cleaned. The embodiment of the application can improve the sidewall roughness difference problem from the source in the etching process, reduce the risk of short circuit or open circuit, and realize lower resistance and interconnection stability.