The invention discloses a preparation method of a novel
mixed metal oxide coating titanium electrode, and relates to the technical field of
electrode preparation, the method comprises the following specific steps:
titanium substrate pretreatment: a
titanium plate is sequentially subjected to gradient
polishing with 120-800-mesh
abrasive paper, the polished titanium substrate is subjected to
hydrochloric acid solution
etching,
argon plasma surface activation and
drying treatment, and a titanium substrate is obtained; obtaining a clean
substrate surface with proper roughness; through the low-temperature
plasma treatment, pulsed bias magnetron
sputtering and
laser-induced
atomic layer deposition (LA-ALD) combined technology, the
binding force of the
coating and the titanium substrate is remarkably improved, high-energy particles are used for bombarding the surface of the titanium substrate in the low-temperature
plasma treatment, residual impurities are effectively removed, the
surface roughness and active sites are increased, and the surface
hardness of the titanium substrate is improved. In the pulsed bias magnetron
sputtering process, the surface of the substrate is further cleaned through periodic
ion bombardment,
atomic diffusion and mixing between the
coating and the substrate are promoted, a
transition layer structure is formed, and therefore the
binding force is greatly enhanced.