321results about How to "Uniform density distribution" patented technology

A capacitive coupling plasma processing apparatus includes a process chamber configured to have a vacuum atmosphere, and a process gas supply section configured to supply a process gas into the chamber. In the chamber, a first electrode and a second electrode are disposed opposite each other. The second electrode includes a plurality of conductive segments separated from each other and facing the first electrode. An RF power supply is configured to apply an RF power to the first electrode to form an RF electric field within a plasma generation region between the first and second electrodes, so as to turn the process gas into plasma by the RF electric field. A DC power supply is configured to apply a DC voltage to at least one of the segments of the second electrode.

The invention discloses an extrusion foaming thermoplastic polyurethane elastomer bead. The extrusion foaming thermoplastic polyurethane elastomer bead comprises the following components in parts by weight: 100 parts of thermoplastic polyurethane elastomer, 0.01-0.5 parts of a foaming nucleating agent, and 0.01-0.2 parts of an antioxidant, wherein a foaming process adopts supercritical fluid with the addition amount of 1-40 parts. The invention also discloses a preparation method of the extrusion foaming thermoplastic polyurethane elastomer bead. The extrusion foaming thermoplastic polyurethane elastomer bead and the preparation method have the advantages that the foaming process does not cause environmental pollution; the obtained foaming material is stable in quality and high in foaming ratio; and the operation method in production is easy and suitable for continuous industrial production.

A capacitive coupling plasma processing apparatus includes a process chamber configured to have a vacuum atmosphere, and a process gas supply section configured to supply a process gas into the chamber. In the chamber, a first electrode serving as a cathode electrode, and a second electrode grounded to serve as an anode electrode are disposed opposite each other. An RF power supply is disposed to supply an RF power to the first electrode to form an RF electric field within a plasma generation region between the first and second electrodes, so as to turn the process gas into plasma. The target substrate is supported by a support member between the first and second electrodes such that a process target surface thereof faces the second electrode. The second electrode includes a conductive counter surface facing the first electrode and exposed to the plasma generation region.

A system for cold gas dynamic spraying of particulate material has a de Laval nozzle and two or more radial particle inlets located between the throat and the outlet of the nozzle, the two or more particle inlets arranged symmetrically around a linear flow path of the nozzle. Blocking of the inlets is reduced by controlling pressure of particle carrier gas to provide a stable particulate material injection pressure before and during introduction of working gas into the nozzle, and/or by clearing the particle inlets of residual particles after a spraying process. Such a system and associated method combines benefits of both downstream and upstream cold gas spray systems. Further, a nozzle for spraying particulate material having a cross-sectional shape that is narrower in a middle section compared to edge sections provides coatings with superior cross-sectional profiles.

The invention relates to a light-weight, high temperature-resistance and heat-insulation ceramic fiber tile and a making method thereof. The heat insulation tile comprises ceramic fibers and boron oxide, wherein the ceramic fibers comprise quartz fibers, alumina fibers and yttrium oxide stabilized zirconia fibers. The making method of the light-weight, high temperature-resistance and heat-insulation ceramic fiber tile comprises the following steps: preparing a sintering aid suspension, preparing a ceramic fiber slurry, carrying out wet green body molding, drying the obtained wet green body, and carrying out pressurization sintering. The heat insulation tile has good heat insulation effect and mechanical performances, has light weight and resists high temperature; the density is controllable between 0.10g/cm<3> and 0.90g/cm<3>; the lowest apparent heat conduction coefficient at room temperature reaches 0.033W/(m.K); the compressive strength at room temperature is greater than 3.0Mpa; and the long-time use temperature can reach 1350DEG C.

A III-V group nitride system semiconductor self-standing substrate has: a first III-V group nitride system semiconductor crystal layer that has a region with dislocation lines gathered densely, the dislocation lines being gathered substantially perpendicular to a surface of the substrate, and a region with dislocation lines gathered thinly; and a second III-V group nitride system semiconductor crystal layer that is formed up to 10 μm from the surface of the substrate on the first III-V group nitride system semiconductor crystal layer and that has a dislocation density distribution that is substantially uniform.

A plasma processing apparatus includes a processing vessel capable of being vacuum evacuated; a first electrode installed in the processing vessel to be in a state electrically floating via an insulating member or a space; a second electrode disposed in the processing vessel to be in parallel to the first electrode with a specific interval, for supporting a target substrate thereon to face the first electrode; a processing gas supply unit for supplying a processing gas into a processing space between the first electrode, the second electrode and a sidewall of the processing vessel; and a first radio frequency power supply unit for applying a first radio frequency power to the second electrode to generate a plasma of the processing gas in the processing space. A protrusion projected toward the second electrode is formed at a central portion of the first electrode.

An object of the present invention is to suppress damage of an electrostatic chuck, by controlling stress exerted on each part of a table, which includes an electrically conductive material, i.e., an electrode for generating plasma, a dielectric layer for enhancing the in-plane uniformity of a plasma process, and an electrostatic chuck. The table for a plasma processing apparatus includes an electrically conductive member connected with a high frequency power source and adapted for plasma generation, for drawing ions present in the plasma, or for both thereof; a dielectric layer provided on a top face of the electrically conductive member, having a central portion and a peripheral portion that are different in thickness relative to each other, and adapted for providing uniformity of high frequency electric field intensity in a plane over the substrate to be processed; and an electrode film for an electrostatic chuck, provided in the dielectric layer and adapted for electrostatically chucking the substrate onto a top face of the dielectric layer. With such configuration, the stress exerted on the electrostatic chuck due to temperature change can be controlled.

The present invention discloses a diffractive optical element used for a structural light projection module, and the structural light projection module comprises a light source; a plurality of sub-light sources which are arranged into a two dimensional array and are used for emitting the two dimensional patterned light beams consistent with the two dimensional array; the diffractive optical element used for receiving the two dimensional patterned light beams and generating multiple stages of diffractive light beams, wherein the diffractive optical element is configured to project the plurality of two dimensional patterned light beams which are not overlapped with each other, each two dimensional patterned light beam generates a copy pattern correspondingly, and the plurality of copy patterns which are not overlapped with each other form the density distribution uniform spot patterns. The present invention also discloses a method of using the diffractive optical element to prepare the structural light projection module. According to the present invention, by preparing the diffractive optical element for the structural light projection module, the density distribution uniform combined spot patterns can be projected on the condition of satisfying the irrelevance.

The invention relates to a polyurethane composite material for refrigeratory spray coating and a preparation method thereof. The composite material is composed of a component A and a component B in a weight ratio of 1:(1-1.05), wherein the component A is composed of polyether glycol, polyester polyol, crosslinking agent, foam stabilizer, foaming agent, catalyst, flame retardant and other assistants; and the component B is polymethylene polyphenyl polyisocyanate. The preparation method comprises the following steps: sequentially adding the components in the component A into a reaction kettle, and thoroughly mixing for 0.5-1.5 hours at normal temperature; and evenly mixing the component A and the component B in a weight ratio of 1:(1-1.05) with a high-pressure spray coater, atomizing, foaming, and quickly forming and aging the foam to obtain the product. The foam provided by the invention has the advantages of low heat conductivity coefficient, excellent low-temperature dimensional stability, high strength, excellent flame retardancy (the fireproofing grade reaches Grade B1), favorable binding property with the substrate, uniform density distribution and smooth surface, and is especially suitable for refrigeratory spray coating construction.

A silicon sputter target is arranged in a silicon dot forming chamber, and a silicon dot formation target substrate is arranged in the chamber. Plasma is formed from a sputtering gas (typically a hydrogen gas) supplied into the chamber, and chemical sputtering is effected on the target with the plasma thus formed to form silicon dots on the substrate S. Optionally, with the plasma formed from a hydrogen gas and a silane-containing gas at a plasma emission intensity ratio (Si(288 nm)/Hβ) of 10.0 or lower, the silicon dots are formed on the substrate S. The silicon dots are terminally treated with the plasma derived from a terminally treating gas such as an oxygen gas.

The embodiment of the invention provides an optimizing design method of a nanometer technical metal layer map. The method comprises the steps as follows: physically designing a standard unit metal layer map, and then adjusting the arrangement and direction of metal lines of the metal layer map; optimizing the width and spacing of the metal lines at the input end of the metal layer map; optimizing the width and spacing of the metal lines at the output end of the metal layer map; and optimizing the width and spacing of the metal lines at the boundary of the metal layer map, so as to meet the preset width and the preset spacing of the metal lines. With the adoption of the optimizing method provided by the embodiment of the invention, the turning in the metal layer map is reduced, and the metal layer map can be uniform in density distribution; the optics proximity correction and modification area required by the metal layer map can be optimized, the data volume in the optics proximity correction and modification and the modification time can be reduced, the manufacturability of a chip is improved, and the manufacturing cost of the chip is saved.

The invention provides an inductive coupling coil. The coil comprises an even number of coil windings, wherein the coil windings are arranged in pairs; two coil windings in each pair of the coil windings have the same shape and are connected in parallel with each other, the input end of one coil winding is positioned in the center of the inductive coupling coil, while the output end is positionedon the edge of the inductive coupling coil and is connected in series with a reactance module; the input end of the other coil winding is positioned on the edge of the inductive coupling coil, while the output end is positioned in the center of the inductive coupling coil and is connected in series with the reactance module. Furthermore, the invention also provides a plasma processing device adopting the inductive coupling coil. The inductive coupling coil and the plasma processing device can easily realize conjugate match of impedance so as to improve the absorption efficiency of power, and ensure density distribution of generated plasma to be more evenly, so that manufacturing/processing results of a processed workpiece are more evenly.

The invention discloses a method for preparing polyamidoxime/graphene nanobelt composite aerogel and separating and enriching uranium, which is characterized by comprising the following steps of: firstly, axially cutting a multiwalled carbon nanotube by using a potassium permanganate oxidation method to prepare a graphene oxide nanobelt; then adding into a mixed solution of acrylonitrile and ammonium persulfate which are fully mixed, and primarily preparing polyacrylonitrile/graphene nanobelt composite hydrogel by adopting a solvothermal polymerization method; and then converting cyano groupsinto amidoxime groups by virtue of a reaction between the cyano groups and hydroxylamine under an alkaline condition so as to obtain polyamidoxime/graphene nanoribbon composite hydrogel, and finally,carrying out low-temperature freeze drying so as to obtain the polyamidoxime/graphene nanoribbon composite aerogel. The prepared polyamidoxime/graphene nanobelt composite aerogel is high in grafting rate, uniform in density distribution, stable in structural performance and rich in special functional groups of uranium, the uranium can be effectively and selectively removed from different uranium-containing water bodies, the adsorbed aerogel can be rapidly separated and recycled from a solid-liquid system, and no pollution is caused to the environment.

The invention belongs to the field of technologies for manufacturing magnetic materials, and provides a technology and a device for forming dry bag quick isostatic pressing in oriented magnetic fields. The technology and the device have the advantages that an oriented magnetic field technology is ingeniously and organically combined with the technology and the device for forming dry bag isostatic pressing by the aid of a novel design concept, so that dry bag isostatic pressing can be formed in the oriented magnetic fields which have optional directions and optional magnetic field intensities by the aid of the novel technology and the novel device; orientation degrees of products can be obviously upgraded; two necessary working procedures in existing neodymium, iron and boron magnet production can be combined with each other to form one working procedure by the novel technology and the novel device, and the automation and mechanization levels are high; powder is not in contact with pressing blanks and oil in production procedures, and accordingly a latex sheath for binding the corresponding pressing blank can be omitted; the pressing blanks are quite uniform in density distribution and internal stress distribution; the pressing blanks can be machined, and original powder can be recycled; single-hole and multi-hole thin-walled pipes, sleeves and multi-magnetic-pole products which are heavy and are in complicated shapes or have large length-diameter (L/d) ratios can be produced by the aid of the technology and the device, the rare earth mineral resource utilization rate can be greatly increased, and the neodymium, iron and boron magnet industrial production level of China can be upgraded to the world leading level.

A diffusion type porous medium gas fuel combustor comprises a shell, an air duct and a fire-resistant casing pipe, the air duct is connected with the shell, the bottom end of the shell is connected with the top plate of a gas flow dividing tank, the shell is internally provided with the fire-resistant casing pipe, a tray and a gas flow dividing tube from top to bottom, the bottom end of the fire-resistant casing pipe is contacted with the tray, the tray is fixed on the shell or the gas flow dividing tube, the bottom end of the gas flow dividing tube is fixed on the top plate of the gas flow dividing tank, and the gas flow dividing tube and the gas flow dividing tank are communicated internally; the fire-resistant casing pipe is provided with macro porous medium, micro porous medium and lower layer metal fiber from top to bottom, and the lower layer metal fiber is connected with the tray and the gas flow dividing tube simultaneously. The inventive diffusion type porous medium gas fuel combustor can be used for efficiently avoiding tempering when combustion intensity is stronger, thus achieving the effects of protecting micro porous medium and saving energy.

The invention discloses a roller out-of-order roughening processing method based on a fiber laser. The method comprises the following steps: (1) a roller to be processed is driven to rotate around the axis lead of the roller, and the rotational speed omega of the roller is made to change randomly according to a set period t; (2) a laser focusing head is aligned with the surface of the roller to be processed and is made to move horizontally back and forth in the axial direction of the roller to be processed; (3) the horizontal moving speed v of the laser focusing head is under coupling control so that a motion trail of the laser focusing head relative to the roller to be processed can form short-range spiral lines delta with varying pitches and varying dip angles, wherein the short-range spiral lines delta are arranged in a staggered mode; (4) the fiber laser is used for emitting pulse laser beams to the laser focusing head at fixed time, and the pulse laser beams after being focused can be used for processing high-density uniform roughening dot matrixes with small dimples, corresponding to the short-range spiral lines delta, on the surface of the roller to be processed. According to the roller processed through the roller out-of-order roughening processing method, the short-range spiral high-density dot matrixes which are arranged in a staggered mode and distributed uniformly are formed on the surface of the roller, so that the wear resistance of the processed roller is greatly improved, and the service life of the processed roller is prolonged.

The invention relates to ultra-low-density rigid polyurethane foam with pentane and butane as foaming agents. The ultra-low-density rigid polyurethane foam is prepared by well premixing a component Aand a component B, and then well mechanically mixing and foaming the component A and the component B, wherein the component A is prepared from the components in parts by weight: 100 parts of pluronicpolyols, 4-15 parts of the pentane, 1-5 parts of a catalyst, 1-5 parts of an organosilicon surfactant, 1-2.5 parts of water and 0-3 parts of a nucleating agent, the component B is prepared from the components in parts by weight: 2-12 parts of the butane and 120-210 parts of polyisocyanates, and raw materials are based on 100 parts of pluronic polyols. According to the prepared foam, foam holes arefine and uniform, the heat conductivity coefficient is small, the compression strength is high, and the overall performance is excellent. The invention further discloses a preparation method of the rigid polyurethane foam.