The invention discloses a laminated structure of a three-dimensional memory and a preparation method of the laminated structure. The laminated structure comprises a substrate, a plurality of isolation
layers, a plurality of
metal layers, a groove and a storage layer, in the first direction, one
isolation layer is stacked on the first side of the substrate, and the isolation
layers and the
metal layers are alternately stacked; the groove penetrates through the plurality of
metal layers and the plurality of isolation layers along a first direction; the side wall of the groove is provided with an arc-shaped groove located in the metal layer; the concave direction of the arc-shaped groove is perpendicular to the first direction; the storage layer covers the surface of the arc-shaped groove. Therefore, in the laminated structure, the side wall of the groove is provided with the arc-shaped groove located in the metal layer, so that the contact interface of the metal layer and the storage layer can form arc-shaped transition, the distribution of an
electric field on the side wall of the groove is optimized, the phenomenon of
electric field concentration is reduced, and the probability of carrier
lateral drift is reduced, thereby improving the accuracy of charge
trapping and storage; and
crosstalk between adjacent storage units is reduced. When the laminated structure is applied to the three-dimensional memory, the reliability of the three-dimensional memory can be improved.