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Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof

A technology of axis acceleration and tunnel current, which is applied in the direction of acceleration measurement, acceleration measurement, and multi-dimensional acceleration measurement using inertial force. high effect

Inactive Publication Date: 2012-07-25
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the detection method of three-axis acceleration is relatively simple, and the three axial accelerations are mostly detected by the same principle.

Method used

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  • Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof
  • Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof
  • Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof

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Embodiment

[0051] A resonance-force balance tunnel current type three-axis acceleration sensor is produced by using the technical scheme of the invention. Wherein, the tunnel needle point (9) and the control electrode (10) are on the upper cover plate (2), and the bias electrode (7) is made on the middle silicon chip (1). Its production process is as follows:

[0052] 1) A silicon wafer with a (100) plane and a resistivity of 1-10Ω.cm is used as the intermediate silicon wafer (1). (see attached image 3 [1])

[0053] 2) Thermal oxidation to form a silicon dioxide film (11). (see attached image 3 [2])

[0054] 3) Combining photolithography and etching processes to fabricate the doped window (14) of the excitation resistor (12) and the piezoresistor (13). (see attached image 3 [3])

[0055] 4) Ion implantation of boron atoms to fabricate a polysilicon excitation resistor (12) and a piezoresistor (13). Anneal at 950°C for 30 minutes in an oxygen atmosphere to activate doped boron...

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Abstract

The invention discloses a resonance-equilibrium tunnel current type three-axis acceleration transducer and a manufacturing method thereof, which belong to the field of microelectronic mechanical systems. The resonance-equilibrium tunnel current type three-axis acceleration transducer is structurally characterized in that the three-axis transducer comprises an intermediate silicon wafer (1), a top cover plate (2) and a bottom plate (3), and double-end fixing beam resonators (4), a mass block (6) and supporting beams (5) are manufactured on the intermediate silicon wafer (1). Besides, in the aspect of the detection principle, acceleration signals of the X-axis and the Y-axis in the plane of the chip are detected by the double-end fixing beam resonators (4), variation of resonant frequency of the double-end fixing beam resonators (4) reflects acceleration and direction thereof, a tunnel tip (9), a control electrode (10) and a biased electrode (7) form a portion for detecting acceleration signal of the Z-axis, detection is realized according to the tunnel current type sensitive principle, and the transducer works in a closed-loop equilibrium mode. Besides, the normal displacement of the mass block (6) on the chip is small, and the cross interference introduced by the acceleration signals of the Z-axis to detection of X-axis acceleration and Y-axis acceleration is low.

Description

technical field [0001] The invention relates to the working principle, structure and manufacturing method of a three-axis acceleration sensor, in particular to the working mechanism, structure and manufacturing method of a resonance-force balance tunnel current type three-axis acceleration sensor, belonging to Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems) Mechanical Systems, MEMS) field. Background technique [0002] Miniature accelerometers are an important class of mechanical quantity sensors. As early as the end of the 1960s, people began to study one-dimensional micro-silicon acceleration sensors. The large-scale production of one-dimensional miniature acceleration sensors began in the late 1980s. In the 1990s, with the development of science and technology and the needs of the military and commercial markets, research on three-dimensional micro-acceleration sensors began to be used in military, automotive electronics, industrial automation, robot...

Claims

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Application Information

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IPC IPC(8): G01P15/18G01C19/5684G01P15/097
Inventor 韩建强
Owner CHINA JILIANG UNIV
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