Resonance-equilibrium tunnel current type three-axis acceleration transducer and manufacturing method thereof

A technology of axis acceleration and tunnel current, which is applied in the direction of acceleration measurement, acceleration measurement, and multi-dimensional acceleration measurement using inertial force. high effect
CN102608355AInactive Publication Date: 2012-07-25CHINA JILIANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
CHINA JILIANG UNIV
Publication Date
2012-07-25
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a resonance-equilibrium tunnel current type three-axis acceleration transducer and a manufacturing method thereof, which belong to the field of microelectronic mechanical systems. The resonance-equilibrium tunnel current type three-axis acceleration transducer is structurally characterized in that the three-axis transducer comprises an intermediate silicon wafer (1), a top cover plate (2) and a bottom plate (3), and double-end fixing beam resonators (4), a mass block (6) and supporting beams (5) are manufactured on the intermediate silicon wafer (1). Besides, in the aspect of the detection principle, acceleration signals of the X-axis and the Y-axis in the plane of the chip are detected by the double-end fixing beam resonators (4), variation of resonant frequency of the double-end fixing beam resonators (4) reflects acceleration and direction thereof, a tunnel tip (9), a control electrode (10) and a biased electrode (7) form a portion for detecting acceleration signal of the Z-axis, detection is realized according to the tunnel current type sensitive principle, and the transducer works in a closed-loop equilibrium mode. Besides, the normal displacement of the mass block (6) on the chip is small, and the cross interference introduced by the acceleration signals of the Z-axis to detection of X-axis acceleration and Y-axis acceleration is low.
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Description

technical field

[0001] The invention relates to the working principle, structure and manufacturing method of a three-axis acceleration sensor, in particular to the working mechanism, structure and manufacturing method of a resonance-force balance tunnel current type three-axis acceleration sensor, belonging to Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems) Mechanical Systems, MEMS) field. Background technique

[0002] Miniature accelerometers are an important class of mechanical quantity sensors. As early as the end of the 1960s, people began to study one-dimensional micro-silicon acceleration sensors. The large-scale production of one-dimensional miniature acceleration sensors began in the late 1980s. In the 1990s, with the development of science and technology and the needs of the military and commercial markets, research on three-dimensional micro-acceleration sensors began to be used in military, automotive electronics, industrial automation, robot...

Claims

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