The invention provides an SOQ-based flexible lever amplification vibration beam
accelerometer chip, and a
processing technology thereof. The SOQ-based flexible lever amplification vibration beam
accelerometer chip comprises a
quartz structure and a
silicon-based structure, which are bonded together, wherein the
quartz structure is a same plane differential
quartz vibration beam
chip structure composed of a quartz frame, an
inertia force input end, a flexible lever, a
quartz tuning fork, a flexible hinge, a
mass block, a connecting rod and an
etching gap; the
silicon-based structure comprises asilicon-based frame and a release groove; the
processing technology comprises: firstly,
processing the release groove of the
silicon-based structure of a silicon
wafer, bonding the silicon
wafer witha quartz plate, then
thinning and
polishing the quartz plate to fabricate the quartz structure, and finally scribing by using a scribing
machine; an
inertia force generated by the
mass block under the influence of acceleration is transferred onto the lever by the
inertia force input end for amplification, the force is concentrated by the connecting rod and is uniformly distributed to two vibration beams of the
quartz tuning fork, the tension frequency of the
quartz tuning fork on both sides of
central symmetry is increased, the compression frequency of the other side is reduced, and the acceleration is measured by the
frequency difference change; and the chip provided by the invention has the advantages of small volume, high precision, etc.