An SOQ-based
quartz vibration beam
accelerometer chip with a flexible amplifying mechanism comprises a
quartz structure and a
silicon structure which are bonded. The
silicon structure comprises an in-plane differential
quartz vibrating beam
chip structure which is composed of a quartz frame, a
quartz tuning fork, a connecting rod, a lever, a hinge, a
mass block, an input end and an
etching clearance. The
silicon structure comprises a silicon frame which is internally provided with a discharging trough. The quartz frame is totally bonded with the silicon frame. The
quartz tuning fork, the connecting rod, the lever, the hinge, the
mass block and the
etching clearance are totally suspended on the discharging trough. The input end, the hinge, the lever and the connecting rod form a lever amplifying mechanism together. When the
mass block generates an inertial force through an acceleration function, the inertial force is transferred to the lever through the input end; and after amplification by the lever, the inertial force is transferred to the connecting rod; the connecting rod firstly focuses the force and uniformly divides the inertial force to two vibrating beams of the
quartz tuning fork, thereby affecting the frequency of the vibrating beams. The acceleration is measured through a
frequency difference of the vibrating beams at two ends. The SOQ-based quartz vibration beam
accelerometer chip has advantages of high sensitivity, small size, etc.