This disclosure provides a
plasma density measurement
system, relating to the field of
microwave technology, comprising: a low-frequency power divider for dividing a first low-frequency
signal into a low-frequency reference
signal and a low-frequency
local oscillator signal; a
frequency multiplier module for multiplying the second low-frequency signal to generate a high-frequency
microwave signal; a high-frequency power divider for dividing the high-frequency
microwave signal into a high-frequency reference signal and a high-
frequency detection signal, wherein the high-
frequency detection signal is used to penetrate the
plasma under test to generate a detection and reception signal; a
harmonic mixer, including a reference
harmonic mixer and a detection
harmonic mixer, wherein the reference
harmonic mixer is used to mix the low-frequency reference signal and the high-frequency reference signal to generate an intermediate-frequency reference signal; the detection
harmonic mixer is used to mix the low-frequency
local oscillator signal and the detection and reception signal to generate an intermediate-
frequency detection signal; and a
data acquisition card for determining the density of the
plasma under test based on the phase of the intermediate-frequency reference signal and the intermediate-frequency detection signal. This
system can measure the density of various types of plasmas.