The application discloses an antenna-coupled micro-bridge structure for a small-pixel
microbolometer and a preparation method thereof, and belongs to the technical field of photoelectric detection. The
spiral antenna and the
electrode bridge leg are arranged alternately, the proportion of the small-pixel micro-bridge structure
thermal isolation support bridge leg is improved, the bridge leg is lengthened, the
thermal conductivity is reduced, and the temperature rise of the
microbolometer is improved; when the
spiral antenna arm is used for
coupling the thermal sensitive unit to receive
infrared radiation, the absorption of
light energy can be more concentrated on the thermal sensitive unit, the temperature rise of the thermal sensitive unit is further improved under the condition that the total light
absorption rate of the device is similar, the effective absorption area of the micro-bridge structure is equivalent to being increased, compared with the traditional
microbolometer, energy can be better collected, and the detection efficiency is improved; while low
thermal conductivity and
high absorption rate are obtained, the
thermal mass of the micro-bridge structure is reduced; the double-layer micro-bridge structure of the traditional upper
absorption layer and the lower
thermal isolation layer is replaced, the preparation process is simplified, and the device manufacturing cost can be reduced.