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33results about How to "Reduce surface defect density" patented technology

Vanadium-doped ZnO nanorod array photo-anode, and preparation method and application thereof

The invention mainly belongs to the field of photoelectrochemistry water-splitting for hydrogen production and particularly relates to a vanadium-doped ZnO nanorod array photo-anode, a preparation method of the vanadium-doped ZnO nanorod array photo-anode and an application of the vanadium-doped ZnO nanorod array photo-anode in photoelectrochemistry water-splitting for hydrogen production. The method comprises the steps of preparing a ZnO seed crystal solution, a vanadium-doped solution and a growth solution correspondingly; conducting spin-coating on conducting glass with the ZnO seed crystal solution and obtaining the conducting glass with the surface covered with a ZnO seed crystal layer after spin-coating and annealing; pulling the conducting glass with the surface covered with the ZnO seed crystal layer into a mixed solution of the vanadium-doped solution and the growth solution for a hydrothermal reaction, washing the conducting glass with deionized water after completion of the reaction, conducting annealing in a muffle furnace and then obtaining an vanadium-doped ZnO nanorod array. By adopting the vanadium-doped ZnO nanorod array photo-anode provided by the invention, the carrier life is prolonged, combination of electron holes is reduced, and the photoelectrochemistry water-splitting performance is improved.
Owner:UNIV OF SCI & TECH BEIJING

Low-pressure preparation method for silicon carbide thin film epitaxy

The invention relates to a low-pressure preparation method for a silicon carbide thin film epitaxy. The method comprises the steps that a silicon carbide substrate is placed in a reaction chamber of silicon carbide CVD equipment, and the reaction chamber is vacuumized; first hydrogen flow with a first constant flow rate is introduced into the reaction chamber, and under the first hydrogen flow andthe first constant pressure, the reaction chamber is heated to a first constant temperature; at the first constant temperature, the silicon carbide substrate placed in the reaction chamber is subjected to in-situ etching; after the reaction chamber is heated to a second constant temperature, the air pressure of the reaction chamber is adjusted to the second constant pressure, C3H8 and SiH4 are introduced into the reaction chamber, and an epitaxial layer grows on the silicon carbide substrate; under the third constant pressure, the silicon carbide substrate with the epitaxy layer growing on iscooled in second hydrogen flow with a second constant flow rate; under the fourth constant pressure, the silicon carbide substrate with the epitaxy layer growing on is cooled in the second hydrogen flow; at a third constant temperature, the silicon carbide substrate with the epitaxy layer growing on is cooled in argon flow with a third constant flow rate, and a silicon carbide epitaxy wafer is obtained.
Owner:XIDIAN UNIV

A kind of vanadium-doped zno nanorod array photoanode and its preparation method and application

The invention mainly belongs to the field of photoelectrochemistry water-splitting for hydrogen production and particularly relates to a vanadium-doped ZnO nanorod array photo-anode, a preparation method of the vanadium-doped ZnO nanorod array photo-anode and an application of the vanadium-doped ZnO nanorod array photo-anode in photoelectrochemistry water-splitting for hydrogen production. The method comprises the steps of preparing a ZnO seed crystal solution, a vanadium-doped solution and a growth solution correspondingly; conducting spin-coating on conducting glass with the ZnO seed crystal solution and obtaining the conducting glass with the surface covered with a ZnO seed crystal layer after spin-coating and annealing; pulling the conducting glass with the surface covered with the ZnO seed crystal layer into a mixed solution of the vanadium-doped solution and the growth solution for a hydrothermal reaction, washing the conducting glass with deionized water after completion of the reaction, conducting annealing in a muffle furnace and then obtaining an vanadium-doped ZnO nanorod array. By adopting the vanadium-doped ZnO nanorod array photo-anode provided by the invention, the carrier life is prolonged, combination of electron holes is reduced, and the photoelectrochemistry water-splitting performance is improved.
Owner:UNIV OF SCI & TECH BEIJING

Enhanced AlGaN/GaN MOS(Metal Oxide Semiconductor)-HEMT(High Electron Mobility Transistor) device structure

The invention provides an enhanced AlGaN / GaN MOS(Metal Oxide Semiconductor)-HEMT(High Electron Mobility Transistor) device structure. The structure comprises an Al2O3 substrate, a first intrinsic GaNbuffer layer, a second intrinsic GaN buffer layer, a GaN substrate layer, an AlGaN barrier layer and a GaN cap layer, wherein the first intrinsic GaN buffer layer, the second intrinsic GaN buffer layer, the GaN substrate layer, the AlGaN barrier layer and the GaN cap layer are sequentially stacked on the Al2O3 substrate, the GaN cap layer to the GaN substrate layer are etched to form a left sourceregion and a right drain region, metalized ohmic contact protruding out of a surface of the device is formed on surfaces of the left source region and the right drain region, a gate oxide layer is formed in a gate region corresponding to the GaN cap layer and the ohmic contact surface, and gate metal is formed on a surface of the gate oxide layer. The invention also provides a preparation methodof the device structure. The structure is advantaged in that reliability of the device can be improved, surface density and a channel driving current of the 2DEG can be improved, the gate leakage current of the device can be reduced, the preparation method can be compatible with the mainstream compound semiconductor process, the substrate quality is good, process repeatability is high, and large-scale manufacturing is easy.
Owner:中证博芯(重庆)半导体有限公司

Preparation method of low-defect silicon carbide epitaxial material

The invention provides a preparation method of a low-defect silicon carbide epitaxial material, which relates to the technical field of silicon carbide epitaxial materials, and comprises the following steps: introducing argon and mixed gas consisting of hydrogen chloride and hydrogen into a reaction chamber to carry out in-situ etching on a silicon carbide off-axis substrate for 5-20 minutes. The introduction of hydrogen chloride and hydrogen enables a Si component and a C component on the surface of the silicon carbide off-axis substrate to reach similar removal speeds, so that a smoother substrate surface is obtained, the introduction of argon enables a temperature field in the reaction chamber to be more uniform, anisotropy generated when the silicon carbide off-axis substrate is etched by hydrogen chloride and hydrogen in the reaction chamber is reduced, and the yield of the silicon carbide off-axis substrate is improved. The non-uniformity of surface etching and the surface defects of the substrate extending to the epitaxial layer are reduced, and the silicon carbide epitaxial material obtained through the growth of the buffer layer and the growth of the epitaxial layer has the advantages of low surface defect density and high uniformity.
Owner:ZHEJIANG UNIV HANGZHOU GLOBAL SCI & TECH INNOVATION CENT
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