The invention discloses a preparation method for an epitaxial
wafer of a GaN-based
light emitting diode, and belongs to the technical field of a
semiconductor. The preparation method comprises the steps of laminating a buffer layer, a non-doped GaN layer, an N type layer, a stress release layer, a multi-
quantum well layer and a P type layer on a
sapphire substrate in sequence, wherein the stress release layer comprises
multiple stress release sub-
layers, the stress release sub-
layers comprise a first sub-layer, a second sub-layer, a third sub-layer and a fourth sub-layer which are laminated in sequence, the first sub-layer is an AIGaN layer, the third sub-layer is an InGaN layer, the second and fourth sub-
layers are GaN layers, and the growth temperature of the first sub-layer is higher than that of the third sub-layer. According to the method, a periodic structure is employed in the stress release layer, the relatively low growth temperature is employed in the InGaN layer, thereby facilitating good growth of lattices, the stress generated between the
sapphire substrate and the GaN layers due to
lattice mismatch can be released, the growth quality of the multi-
quantum well layer is improved, and the photoelectric property of the LED is improved.