25 results about "Cathodoluminescence" patented technology

This invention discloses a method for identifying the origin of quartz based on multimodal signal fusion using scanning electron microscopy (SEM). It utilizes only one SEM equipped with an energy dispersive spectroscopy (EDS) probe, a cathodoluminescence (CAT) probe, and a backscattered electron diffraction (BSE) probe. By comprehensively employing multiple indicators, including the coefficient of variation of CL band width (a), the Al-Ti influence coefficient (b), the lattice orientation difference influence coefficient (c), and the relative gravity coefficient of inclusion type (d), the method determines whether a quartz sample is of hydrothermal or metamorphic origin. This invention achieves rapid and accurate identification of the origin of quartz.

The invention belongs to the technical field of reliability analysis of devices, and particularly relates to a quantitative analysis method for migration characteristics of an indium component in an epitaxial wafer. Comprising the following steps: providing epitaxial wafers with consistent initial characteristics, and carrying out uniform cleavage; taking one small block as a reference sample, and performing external disturbance treatment on other small blocks; the method comprises the following steps: respectively carrying out non-destructive structure characterization treatment on a reference sample and a sample subjected to external disturbance treatment, including high-resolution X-ray diffraction test, photoluminescence and cathode fluorescence combined test and time-resolved photoluminescence spectrum measurement; comprising high-resolution transmission electron microscope and EDS energy spectrum combined imaging and secondary ion mass spectrum; finally, FP lasers are prepared respectively, and electrical characterization processing is carried out. And quantitatively analyzing the influence of indium component migration on the electrical properties of the FP laser according to the result. The method has the advantages that the migration of indium atoms is analyzed according to a method for changing the microstructure in the quantum well and changing the dynamic behavior of a carrier.

The invention belongs to the technical field of scanning electron microscopes, and particularly relates to a scanning electron microscope sample preparation method applied to a wafer sample with poor conductivity, which comprises the following steps: cleaning the wafer sample; fixing the cleaned wafer sample on a loading disc of a spin coater, dropwise adding a conductive adhesive on the surface of the wafer sample, and uniformly coating the surface of the wafer sample with the conductive adhesive through spin coating of the spin coater to obtain a sample for observation of the scanning electron microscope; wherein the conductive adhesive is a polyaniline solution. By utilizing the method, the charge effect on the surface of the non-conductive wafer can be effectively eliminated, so that the non-conductive wafer has clear surface appearance under a scanning electron microscope, the initial state of the wafer sample can be reduced after the test is finished, and the original components and original properties of the sample are not changed, so that the subsequent process and test links are not influenced. In addition, the method has a smaller shielding effect on the CL light emitting amount of the wafer sample, and has a gain effect in a cathode fluorescence test link of the wafer sample.

The application provides a sample detection method, a detection device and a charged particle optical detection system. The sample detection method comprises the following steps: acquiring a surface topography image and cathodoluminescence data of a to-be-detected sample having a dark spot defect; extracting a region in which the cathodoluminescence intensity is lower than a set intensity threshold in each cathodoluminescence image to obtain a dark spot region; and determining failure information of the to-be-detected sample based on the surface topography image, the dark spot region, the corresponding electrical stress of the dark spot region and the corresponding time of the dark spot region. Through the application, dynamic defect detection of a blue-green laser chip is realized.

This invention provides a method for determining the dislocation density of diamond single crystals using cathodoluminescence spectroscopy, which can be applied to the field of semiconductor material characterization and defect detection. This method draws upon and develops upon colorimetric methods based on ultraviolet light intensity, utilizing the idea of ​​single measurement and quantitative analysis based on different peak ratios. It also incorporates a decoupled architecture of "destructive calibration + non-destructive measurement." First, at least five diamond single crystal calibration samples with gradient dislocation densities are selected. Cathodoluminescence spectra are acquired under low temperature and high vacuum conditions. The integrated intensity I of the A-band emission peak related to dislocations is extracted through multi-peak fitting. A and the integral intensity I of the free exciton emission peak FE Calculate the ratio R=I A / I FE Subsequently, the calibration sample was subjected to hydrogen-oxygen dry etching, and the surface dislocation density N was obtained by statistically analyzing the etching pits. The proportionality coefficient k was obtained by linear fitting with N as the ordinate and R as the abscissa. For the sample to be tested, the spectrum was collected under the same conditions and the ratio R was calculated. Substituting this value into the model N=k·R, the surface dislocation density can be quantitatively obtained.

The invention discloses a gem and jade output and mineralization condition analysis method, and relates to the technical field of mineral exploration and mineral spectroscopy analysis. The method comprises the following steps: grading and sampling primary ore and secondary ore; performing high-pressure closed digestion and element analysis to obtain the content of a target element; calculating chemical mineralization indexes, establishing a spectrum and diffraction spectrum library, and extracting a characteristic peak area ratio as a spectroscopic standard variable; acquiring a cathode luminescence image and a spectrum and determining an intensity ratio; integrating a chemical metallogenic index, a spectroscopic standard variable, a cathode luminescence intensity ratio and a regional geological variable into a target feature vector, and modeling based on a machine learning model and an interpretation algorithm to obtain a metallogenic analysis model; and outputting a mineralization probability index and performing grading judgment according to a threshold value. According to the method, through multi-source geology-geochemistry-spectroscopy information fusion and machine learning modeling, the accuracy and efficiency of gem and jade metallogenic condition recognition and prospective area / target area judgment are improved.

The application provides a high-purity quartz raw material evaluation and purification process prediction method and system. The method collects fluid and mineral inclusion data, uses micron-level physical reference marks to realize cross-scale registration of cathodoluminescence and in-situ micro-area scanning, accurately quantifies lattice impurities and total content, calculates a weighted occurrence state index combined with impurity hazard factors, fuses mineralogical characteristics to construct a purification difficulty index, and finally inputs a process knowledge graph, matches historical data to deduce and generate predicted process parameters. The application breaks through the bottleneck of quantitatively evaluating lattice impurities, accurately quantifies and classifies the purification potential of raw materials, can predict the processing limit, intelligently recommends the optimal roasting and pickling scheme, replaces the traditional trial-and-error mode, significantly reduces the research and development cost and cycle, and improves the scientificity and stability of high-purity quartz production.

The invention belongs to the field of geological mineral exploration, and particularly relates to a method for indicating granite type uranium mineralization by using quartz elements and cathode luminescence characteristics, which comprises the following steps: step 1, collecting and selecting samples; step 2, sample preparation and chemical analysis; step 3, carrying out cathode luminescence CL analysis; and step 4, data processing and model construction. According to the method provided by the invention, through systematic analysis on the quartz sample, especially research on the trace element content and cathode luminescence structure characteristics of the quartz sample, geochemical indexes capable of effectively identifying and predicting the uranium mineralization area are established, and the efficiency and accuracy of granite type uranium deposit exploration can be effectively improved.

The invention belongs to the technical field of single crystal material preparation, and provides a barium-magnesium bimetal boron nitride compound-based solvent (Ba-Mg DMB), which significantly improves the yield of hexagonal boron nitride (h-BN) single crystals under high temperature and high pressure (HPHT) conditions, and further improves the crystal quality. Compared with the yield of about 12% of a barium-based solvent, the yield of the Ba-Mg DMB solvent is increased by 4.8 times, and the stable yield of about 57.3% is achieved. Researches find that under the HPHT condition, the magnesium element in Ba-Mg DMB can effectively remove carbon and oxygen impurities, which plays a key role in promoting the obtaining of h-BN single crystals with excellent quality. The high-quality characteristic is verified through detailed characterization of Raman spectrum, X-ray diffraction, X-ray photoelectron spectroscopy and the like, and is particularly reflected in photoluminescence and cathode luminescence characteristics. Through the high carrier mobility shown in the single-layer graphene, it is directly proved that the h-BN single crystal derived from Ba-Mg DMB can be used as an ideal packaging material of a two-dimensional device.

This invention belongs to the field of scanning electron microscopy and cathodoluminescence analysis technology, specifically relating to a method for determining the maximum uniform imaging range of a cathodoluminescence detector. This method is simple to operate and provides objective results in determining the maximum uniform imaging range of a cathodoluminescence detector. By calculating the standard deviation of image grayscale, this invention transforms the assessment of imaging uniformity from subjective judgment to objective data. The assessment results are accurate and reproducible, providing clear sample selection criteria, test locations, and data processing procedures. It is easy to promote and apply in laboratories. By determining the maximum uniform imaging range, it guides users to conduct large-field observations while ensuring image quality, effectively reducing analytical errors caused by imaging non-uniformity.

The invention provides a cathode fluorescence detection system and method based on a superconducting nanowire single-photon detector, and relates to the technical field of cathode fluorescence detection.The system comprises a cathode fluorescence spectrum processing unit used for receiving a cathode fluorescence CL signal generated by an electron microscope, preprocessing the CL signal and sending the preprocessed CL signal to an electron microscope; transmitting the processed signal to a superconducting nanowire single-photon detector for detection; the superconducting nanowire single-photon detector is used for detecting the processed signal and inputting the generated detection signal into the data acquisition and processing unit for post-processing; and the data acquisition and processing unit is used for post-processing the received detection signal and generating a processing result. According to the cathode fluorescence detection system and method based on the superconducting nanowire single-photon detector, the superconducting nanowire single-photon detector is applied to cathode fluorescence detection, so that the detection sensitivity, waveband coverage and detection time resolution of cathode fluorescence are greatly improved.

The application discloses a sample preparation method of a TEM sample and a method for detecting a single dislocation in a gallium nitride single crystal, and the sample preparation method comprises the following steps: performing SEM-CL scanning on a substrate sample surface containing a gallium nitride single crystal, and obtaining a first SEM image and a corresponding cathodoluminescence image; marking a target single dislocation from the first SEM image based on the cathodoluminescence image; marking a first target region where the target single dislocation is located in the first SEM image; performing SEM scanning on the first target region of the substrate sample surface, and obtaining a second SEM image of carbon deposition around the target single dislocation; performing scanning on the second SEM image by using FIB-SEM, and marking a second target region where the carbon deposition is located; and performing etching on the second target region of the substrate sample surface after the carbon deposition, so that a TEM sample is prepared. The single dislocation can be accurately positioned from the substrate sample containing the gallium nitride single crystal, the TEM sample containing the single dislocation is prepared, and then the dislocation type of the single dislocation is determined.

This application discloses a method for analyzing the occurrence and mineralization conditions of gemstones, relating to the fields of mineral exploration and mineral spectroscopic analysis. The method includes: graded sampling of primary and secondary ore deposits; high-pressure sealed digestion and elemental analysis to obtain the content of target elements; calculation of chemical mineralization indicators and establishment of a spectral and diffraction spectrum library, extracting characteristic peak area ratios as spectroscopic modeling variables; acquisition of cathodoluminescence images and spectra and determination of intensity ratios; integration of chemical mineralization indicators, spectroscopic modeling variables, cathodoluminescence intensity ratios, and regional geological variables into a target feature vector; modeling a mineralization analysis model based on machine learning models and interpretation algorithms; outputting a mineralization probability index and classifying it according to thresholds. This application improves the accuracy and efficiency of gemstone mineralization condition identification and prospective / target area determination by fusing multi-source geological, geochemical, and spectroscopic information and using machine learning modeling.

The invention provides a method for preparing a high-quality hexagonal boron nitride single crystal on the basis of high-temperature and high-pressure conditions, which comprises the following step: heating and pressurizing a strontium-based precursor and hexagonal boron nitride powder to prepare the hexagonal boron nitride single crystal. In the aspect of economic cost, strontium nitride has relatively low cost (30 RMB / g) which is only 1 / 10 of that of a barium nitride system. Therefore, compared with a Ba-BN system, the Sr-hBN system has a huge cost advantage. In the aspect of crystal quality, Raman characterization, X-ray diffraction spectrum, cathode luminescence spectrum and X-ray photoelectron spectroscopy characterization result analysis proves that the hexagonal boron nitride single crystal which is comparable to or even superior to that prepared by a barium nitride system is obtained by the method disclosed by the invention.

The invention provides a cathode fluorescence system based on a micro spectral imaging chip, and belongs to the technical field of optical detection.The system comprises the spectral imaging chip used for detecting cathode fluorescence from a sample; the spectral imaging chip comprises a micro-nano structure spectral modulation layer which comprises a plurality of micro-nano structure sub-arrays, and the micro-nano structure sub-arrays have different preset spectral modulation functions and are used for carrying out spectral modulation on incident cathode fluorescence; the image sensor array layer is arranged on the light emitting side of the micro-nano structure spectrum modulation layer and is used for converting the modulated light signal into an electric signal; and the signal processing circuit is connected with the image sensor array layer and is used for calculating and reconstructing spectral information of cathode fluorescence according to the electric signal and a preset spectral modulation function. According to the invention, the integrated spectral imaging chip is adopted to replace a traditional grating spectrometer, so that the system is compact, miniaturized and low in cost.

The invention belongs to the technical field of ferrous metallurgy, and particularly relates to a cathode luminescence image-based rapid identification method for aluminum deoxidized steel inclusion components. The rapid identification method comprises the following steps: acquiring cathode luminescence images of the inclusions, judging the components of the inclusions according to the color difference of the cathode luminescence images, measuring the fractal dimensions of the inclusions with the same cathode luminescence color according to the contour of the inclusions in the cathode luminescence images, and determining the fractal dimensions of the inclusions according to the fractal dimensions. And color and fractal dimension information are combined to jointly judge the inclusion components. The rapid identification method is applied to aluminum deoxidized steel inclusion control, the steelmaking production condition can be rapidly judged, the harm of the inclusion is reduced, and the steel product quality is stabilized.

The invention discloses a method for jointly judging the iron-copper mineralization potential of medium-acidity invading rock based on zircon and apatite, and belongs to the technical field of mineral exploration. Comprising the following steps: (1) systematically collecting an acidic invasive rock sample, and sorting zircon and apatite; (2) carrying out cathodoluminescence image analysis and main trace element test on zircon and apatite; and (3) according to the structure and component characteristics of the zircon and the apatite, calculating the oxygen fugacity delta FMQ, the water content, the Yb / Gd ratio of the zircon and the 100 * XCl / XOH / XF, 1000 * V / (Mn + 100Ga) ratio of the apatite, and rapidly identifying the mineralization potential of the porphyry-skarn type iron-copper ore bed. The method is easy and convenient to operate, short in testing period, high in discrimination efficiency and suitable for rapid screening and prospecting target area delineation of iron-copper mineralizing rock masses in the early exploration stage, and has remarkable practical value and popularization prospects.

The invention relates to a pegmatite type high-purity quartz raw material quartz purity rapid quantitative evaluation method and system, it is assumed that a sample contains N (non-zero positive integer) types of quartz, and the volume ratio and purity of each type of quartz are respectively Ci and Pi. Different types of quartz can be identified through microscopic lithofacies observation in combination with CL images, Ci is obtained through quantitative statistics of the quartz by means of ImageJ software, and meanwhile the impurity element content Pi of the different types of quartz is obtained through in-situ component analysis. The purification experiment result of the actual sample is highly consistent with the theoretical calculation result of the method, and the effectiveness of the method is verified. According to the novel rapid quantitative evaluation method based on metallology, cathodoluminescence and in-situ component analysis, the purity of quartz in pegmatite can be rapidly and quantitatively evaluated at low cost.

This invention discloses a method for determining the iron-copper mineralization potential of intermediate-acidic intrusive rocks based on the combined use of zircon and apatite, belonging to the field of mineral exploration technology. The method includes the following steps: (1) systematically collecting samples of intermediate-acidic intrusive rocks and separating zircon and apatite; (2) conducting cathodoluminescence image analysis and major and trace element testing of zircon and apatite; (3) calculating the oxygen fugacity ΔFMQ, water content, Yb / Gd ratio of zircon, and 100*X of apatite based on the structural and compositional characteristics of zircon and apatite. Cl / X OH / X F The ratio of 1000*V / (Mn+100Ga) is used to quickly identify the mineralization potential of porphyry-skarn type iron-copper deposits. This method is simple to operate, has a short testing cycle, and high discrimination efficiency. It is suitable for the rapid screening of iron-copper ore-forming rock bodies and the delineation of prospecting target areas in the early stages of exploration, and has significant practical value and prospects for promotion.

This invention relates to a photodetector, belonging to the field of photodetector technology, capable of simultaneously detecting cathodoluminescence and electron signals, and greatly improving the collection efficiency of fluorescence signals. The photodetector includes an electron source, an accelerating electrode, an objective lens, a reflective grating, a CL fluorescence detector, and a BSE detector. The electron source is positioned at the top center to generate an electron beam. The accelerating electrode is positioned below the electron source. The objective lens is positioned below the accelerating electrode. The BSE detector is positioned below the objective lens. The sample to be scanned is positioned at the bottom. The accelerating electrode, the objective lens, and the BSE detector are coaxially arranged, and the electron beam passes through them sequentially before irradiating the surface of the sample. The BSE detector receives backscattered electrons reflected from the sample. The reflective grating and the CL fluorescence detector are both positioned around the BSE detector and reflect photons transmitted from the upper surface of the sample to the CL fluorescence detector.

One objective of the present invention is to produce hexagonal boron nitride powder exhibiting high crystallinity and improving the thermal conductivity properties of the resin. To achieve this objective, hexagonal boron nitride powder according to one aspect of the present invention has a ratio of spectral intensity at a wavelength of 227 nm to spectral intensity at a wavelength of 330 nm of not less than 1.0, as measured by a cathodoluminescence (CL) method.

The invention provides a method for measuring diamond single crystal dislocation density by using cathode fluorescence spectrometry, which can be applied to the technical field of semiconductor material characterization and defect detection. According to the method, a colorimetric method based on ultraviolet light intensity is used for reference and development, the idea of single measurement and quantification of different peak position ratios is utilized, a decoupling framework of lossy calibration and lossless measurement is combined, at least five diamond single crystal calibration samples with gradient distribution of dislocation density are firstly selected, a cathode fluorescence spectrum is collected under low temperature and high vacuum, and a cathode fluorescence spectrum is obtained; extracting an A-band luminescence peak integral intensity IA and a free exciton luminescence peak integral intensity IFE related to dislocation through multi-peak fitting, and calculating a ratio R = IA / IFE; performing oxyhydrogen dry etching on the calibration sample, and counting an etching pit to obtain a surface dislocation density N; and performing linear fitting by taking N as a vertical coordinate and R as a horizontal coordinate to obtain a proportionality coefficient k. Collecting spectrums of a to-be-detected sample under the same condition, calculating a specific value R, and substituting the specific value R into the model N = k.R to quantitatively obtain the surface dislocation density of the to-be-detected sample.

The invention discloses a luminescent material three-dimensional structure reconstruction method based on cathode fluorescence, and belongs to the technical field of luminescent material simulation. An electron penetration track is tracked through a Mott scattering model, and exciton distribution prediction of nanoscale depth resolution is realized in combination with a double-Gaussian wavelength distribution model and an absorption coefficient model in which Urbach trailing correction is introduced; furthermore, a band gap dependent interface refraction / reflection model and a Beer-Lambert absorption model are combined for calculation, and the influence of the interlayer effect on photon transmission is quantified; and a quantum well secondary excitation feedback mechanism based on a Heviside function is innovatively introduced. The method also supports spectral data measured through experiments, material parameters are subjected to iterative inversion and correction by means of a particle swarm optimization algorithm, and the prediction precision and applicability of the model are remarkably improved.

The application discloses a method for judging skarn copper metallogenic potential based on calcite cathodoluminescence characteristics, and belongs to the technical field of mineral exploration, which comprises the following steps: imaging of ore-forming and non-ore-forming calcite samples in skarn, mapping of the color picture of cathodoluminescence from a three-dimensional color space to a one-dimensional brightness space, gathering of pixels with different brightness of the gray-scale picture to the most suitable gray-scale interval, normalization of the gray-scale interval to 0-1, and distinguishing of different gray-scale value groups by different colors; selection of points on the original sample according to the grouped picture, acquisition of trace element data of each gray-scale group, establishment of a gray-scale, element and Cu mutual relationship expression, and finally feedback to the gray-scale value interval to acquire the Cu metallogenic potential of different gray-scale intervals; the application can efficiently, accurately and intuitively reflect the Cu content range in different luminescence intervals and the corresponding luminescence reasons in actual production, and can significantly reduce the judgment cost.

The invention discloses a method for judging mineralization potential of skarn copper based on cathode luminescence characteristics of calcite, which belongs to the technical field of mineral exploration and comprises the following steps of: imaging mineralization and non-mineralization calcite samples in skarn, mapping a cathode luminescence color picture from a three-dimensional color space to a one-dimensional brightness space, and calculating the brightness of the cathode luminescence color picture; pixels with different brightness of the gray scale picture are gathered to the most appropriate gray scale interval, the gray scale intervals are normalized to 0-1, and different gray scale value groups are distinguished through different colors; selecting points on an original sample according to grouped pictures, obtaining trace element data of each gray scale group, establishing a correlation expression of gray scales, elements and Cu, and finally feeding back the correlation expression to gray scale value intervals to obtain Cu mineralization potentials of different gray scale intervals; according to the method, Cu content ranges and corresponding luminescence reasons in different luminescence intervals can be efficiently, accurately and intuitively reflected in actual production, and the judgment cost can be remarkably reduced.