The invention discloses a multi-pixel ultra-small
capacitance X-
ray detection unit and a
detector, the multi-pixel ultra-small
capacitance X-
ray detection unit comprises an n-type
silicon substrate, the top surface of the n-type
silicon substrate is provided with a P +
cathode, and the bottom surface of the n-type
silicon substrate is provided with an n +
anode; a first
silicon dioxide rectangularframe is arranged on the top surface of the n-type silicon substrate; a second
silicon dioxide rectangular frame is arranged in the first
silicon dioxide rectangular frame; a first P + heavily-dopedion implantation region is formed between the first substrate and the second substrate; a second P + heavily doped
ion implantation region is formed in the second silicon dioxide rectangular frame; and a gap for communicating the first P + heavily doped
ion implantation region with the second P + heavily doped
ion implantation region to form a P +
cathode is formed in the second silicon dioxide rectangular frame, the gap is a third P + heavily doped
ion implantation region, and a
cathode aluminum layer is plated on the second P + heavily doped
ion implantation region. The multi-pixel ultra-small
capacitance X-
ray detector is composed of a plurality of multi-pixel ultra-small capacitance X-ray detection units which are distributed in an array mode, and the
electrode area and the capacitancevalue are small.