Preparation method of array substrate, array substrate and organic light-emitting display device

Abstract

The invention discloses a preparation method of an array substrate, an array substrate and an organic light-emitting display device. The preparation method includes: 1) sequentially forming a first metal layer, a first insulating material layer, and a second metal layer covering the thin film transistor region and the capacitor region on a substrate; The tone mask etches the second metal layer, the first insulating material layer and the first metal layer to form separated source and drain electrodes, a gate insulating layer and a bottom gate in the thin-film transistor region, and to form a separated gate in the capacitor region. The second electrode, the first dielectric layer and the first electrode. According to this, the source and drain of the thin film transistor, the gate insulating layer and the bottom gate can be etched and formed only through a half-tone mask, and the second electrode, the first dielectric layer and the first electrode of the capacitor are formed at the same time, The process is simplified. The array substrate of the present invention has a double-gate thin film transistor and a capacitor with two capacitors connected in parallel, which improves the capacitance on the basis of increasing the driving force.

Description

technical field [0001] The invention belongs to the field of organic light-emitting display devices, and in particular relates to a method for preparing an array substrate, an array substrate prepared by the method, and an organic light-emitting display device composed of the array substrate. Background technique [0002] An organic light emitting display device (OLED) displays images by using organic light emitting elements. When the excitons generated by the combination of electrons and holes in the organic emission layer drop from the excited state to the ground state, a certain amount of energy is released to generate light, and an organic light-emitting display device (OLED) displays images by using this light. [0003] Generally speaking, an organic light-emitting display device (OLED) needs to use a plurality of thin film transistors, at least one of which requires high current driving characteristics to ensure a stable supply of current required for light emission of...

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Problems solved by technology

[0006] In the prior art, the formation of each layer of thin film transistors and capacitors needs to undergo an etching process covered by multiple masks, and the process is complicated.

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