Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component

A nonlinear error and heterodyne interference technology, which is applied in the field of precision measurement, can solve problems such as the complexity of the optical system of the electronic system, achieve simple system implementation, reduce measurement nonlinear errors, and avoid complex optical system and circuit system
CN101067546AInactive Publication Date: 2007-11-07HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HARBIN INST OF TECH
Publication Date
2007-11-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a method of reducing the heterodyne interference non-linear error first harmonic component and its equipment, the existing kinds of system and the method are all very complex. The invention includes: the light beams which contains two frequencies, two polarization directions and sends out by the double frequency laser; this light beam divides into two bunches of light after the spectroscope, the reflected light forms the reference signal after the analyzer by the photo detector receive; the transmitted light enters the polarization spectroscope to divide into two bunches of light which includes the reflected light of polarization direction vertical paper surface and parallel paper surface transmitted light, the reflected light reflects to the polarization spectroscope after the reference pyramid prism, the transmitted light after survey pyramid prism installed on the swivel table also reflects the polarization spectroscope; above two bunches of light converge in the polarization spectroscope place, and formed the survey signal by the reflector reflection after the analyzer by the photo detector; swivel table axial revolves the survey pyramid prism along the survey pyramid prism heading, swivel table anti-clockwise or clockwise axial revolves 97 degree. The invention uses to increase the heterodyne interference measuring accuracy.
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Description

technical field

[0001] The invention belongs to the technical field of precision measurement, in particular to a method and a device for reducing the first harmonic component of heterodyne interference nonlinear error. Background technique

[0002] Laser heterodyne interferometer is widely used in ultra-precision detection and nanometer measurement due to its advantages of fast measurement speed, high measurement accuracy, strong anti-interference ability, good repeatability, and strong traceability. With the development of microelectronics, micromachines and ultra-precision machining, the requirements for displacement measurement accuracy have reached the nanometer level. However, due to the existence of nonlinear errors of laser heterodyne interferometers, the further improvement of its measurement accuracy is seriously restricted. Some methods of reducing and compensating the nonlinear error of heterodyne interference require complex electronic systems or optical systems....

Claims

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