6 freedom degree precision positioning station capable of compensating z-direction position

A technology of positioning stage and degree of freedom, which is applied in the direction of workbench, photolithographic process exposure device, manufacturing tool, etc., can solve the problems of small stroke and complex overall structure, and achieve the effect of reducing Abbe error, reducing cost and being easy to implement.

Active Publication Date: 2008-08-13
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD +1
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Problems solved by technology

"A two-degree-of-freedom air bearing precision positioning platform for IC packaging" (public number CN1887686A), published on January 3, 2007, is used for chip packaging or MEMS processing and manufacturing, and can achieve hig...

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  • 6 freedom degree precision positioning station capable of compensating z-direction position
  • 6 freedom degree precision positioning station capable of compensating z-direction position
  • 6 freedom degree precision positioning station capable of compensating z-direction position

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Embodiment Construction

[0022] The six-degree-of-freedom precision positioning table capable of compensating the Z-direction position of the present invention will be further described in detail below.

[0023] Such as figure 1 As shown, the six-degree-of-freedom precision positioning stage capable of compensating Z-direction position of the present invention is mainly divided into a horizontal positioning stage 1 (hereinafter referred to as the XY stage) and an exposure stage 2, wherein the exposure stage 2 is on the upper layer of the XY stage 1.

[0024] The XY stage is a horizontal precision positioning stage, the purpose is to achieve precise positioning in the horizontal direction (X, Y direction) through "a set of horizontal drive + precise and effective transmission mechanism + closed-loop control". The specific structure is as figure 2 and image 3 shown.

[0025] figure 2 Among them, the stators 111 of the two X-direction linear motors are respectively fixed on both sides of the base ...

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Abstract

The invention provides a six-freedom precision positioning stage capable of compensating Z-direction position, comprising a XY stage and an exposure stage structurally. The XY stage is a horizontal precision positioning stage for implementing horizontal (X, Y directions) precision positioning by a set of horizontal driver, an accurate and effective transmission device and closed-loop control; the exposure stage is divided from the top down into three layers which are a rotating stage, a leveling and focusing mechanism and a silicon slice thickness compensating mechanism. A silicon anastomosis mechanism is disposed between the rotating stage and the silicon slice compensating mechanism. The invented six-freedom precision positioning stage capable of compensating Z-direction position can be used in an occasion with a large stroke, a high speed and a high precision in horizontal direction, and can implement submicron precision adjustment in three freedoms in vertical direction.

Description

technical field [0001] The invention relates to a positioning platform, in particular to a six-degree-of-freedom precision positioning platform including a Z-direction position compensation mechanism. Background technique [0002] High-precision positioning platforms are widely used in semiconductor manufacturing, precision processing and other fields. Taking projection lithography equipment as an example, with the development of technology, the requirements for production efficiency are getting higher and higher, and the size of the substrate is getting larger and the thickness changes. Larger, the stroke of the positioning table carrying the substrate is also getting larger and larger. The "two-degree-of-freedom air-floating precision positioning platform for IC packaging" (public number CN1887686A), published on January 3, 2007, is used for chip packaging or MEMS processing and manufacturing, and can achieve high-speed, high-speed positioning within a stroke range of less...

Claims

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Application Information

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IPC IPC(8): G03F7/20B25H1/00
Inventor 李志龙李生强董同社
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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