2 results about "Vertical shift" patented technology

The utility model discloses an etching chamber upper cover lifting device, which belongs to the technical field of semiconductor etching equipment and comprises a rack, a support is arranged at one end of the rack, the support is connected with an upper cover, the support is in sliding connection with the rack along the vertical direction, the support is in sliding connection with the rack along the horizontal direction, and the upper cover is arranged on the support. The rack is provided with a vertical moving mechanism used for driving the support to slide vertically and a transverse moving mechanism used for driving the support to slide horizontally. The upper cover does not need to be opened manually, manpower is greatly saved, and convenience is improved.

The utility model relates to technical field of semi -automatic equipment especially is concerned to a kind of semi -automatic equipment of auxiliary material is pasted to container, including rack, stripping device, pasting device and jig assembly, stripping device is laid to multiple auxiliary material to feed plate;Jig assembly is placed with multiple pasting containers;Wherein the pasting device is equipped with longitudinal shift mechanism, vertical shift mechanism and distance changing mechanism, longitudinal shift mechanism is installed in rack, vertical shift mechanism is installed in the driving end of longitudinal shift mechanism, distance changing mechanism is installed in the driving end of vertical shift mechanism, multiple suction cup assemblies are respectively installed in the distance changing end of distance changing mechanism, to carry out interval adjustment under the driving of distance changing mechanism, so that multiple suction cup assemblies are respectively aligned multiple pasting containers, and the attachment operation of multiple auxiliary material is synchronously carried out.Summarized above, realize multiple suction cup interval automatic regulation by distance changing mechanism, improve efficiency;Independent structure is easy to expand, linkage design reduces cost;Multiple positioning preserves precision, detail optimization stabilizes operation, give consideration to efficient and practical.