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291results about How to "Reduce running" patented technology

Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system

An object of the present invention is to ensure the stable operation of a vacuum pump for discharging an unused source gas and reaction byproduct gases from a low-pressure processing chamber, to recover the reaction byproducts efficiently for the effective utilization of resources and reduction of running costs. A low-pressure CVD system has a processing vessel (10) for carrying out a low-pressure CVD process for forming a copper film, a source gas supply unit (12) for supplying an organic copper compound as a source gas, such as Cu(I)hfacTMVS, into the processing vessel (10), and an evacuating system (14) for evacuating the processing vessel (10). The evacuating system (14) includes a vacuum pump (26), a high-temperature trapping device (28) disposed above the vacuum pump (26) with respect to the flowing direction of a gas, and a low-temperature trapping device (30) disposed below the vacuum pump with respect to the flowing direction of a gas. The high-temperature trapping device (28) decomposes the unused Cu(I)hfacTMVS contained in a gas sucked out of the processing vessel (10) to trap metallic copper. The low-temperature trapping device traps Cu(II)(hfac)2 produced as a reaction byproduct.
Owner:TOKYO ELECTRON LTD

Temperature/humidity controller for use in an air conditioner and a recording medium storing temperature/humidity control programs used therefor

In a main controller for use in an air conditioner for controlling temperature/humidity of an intaken outside air, a controlling line setter (18) sets each of control lines (J1-J5) on a psychrometric chart table (13), in which an aimed temperature/humidity line (Lo) is formed by connecting an upper limit state point (Ps) and a lower limit state point (Pw) of condition air from each of the outside air state points (G1-G5) to the aimed temperature/humidity line (Lo). The controlling line (J1-J5) is formed by connecting necessary lines selected from a main heating line (HL) showing the heating operation of a main heater (H), an adiabatic humidifying line (WL) showing the humidifying operation of an adiabatic humidifying device (W), a cooling line (CL) showing the cooling operation of a cooler (C) and an auxiliary heating line (RHL) showing the heating operation of the auxiliary heater (RH), and the end point temperature for each of the lines is set as the aimed exit temperature for each of the temperature/humidity adjusters (4, 4) and each of the temperature/humidity adjusters (4-4) is individually put to feedback control. Temperature/humidity control can be conducted accurately and at a good response, and energy can be saved and the running cost can be reduced.
Owner:TRINITY IND CORP

Process and equipment for rejuvenation treatment of photoresist development waste

The disclosed process for rejuvenation treatment of a photoresist development waste mainly containing a photoresist and tetraalkylammonium (TAA) ions comprises at least a simple membrane separation step of treating the photoresist development waste or a treated solution derived from the photoresist development waste with a nanofiltration membrane (NF membrane) to obtain a concentrate (NF concentrate) mainly containing impurities such as the photoresist and a higher-purity permeate (NF permeate) mainly containing TAA ions. The NF concentrate and/or the NF permeate, preferably the NF permeate, is desirably subjected to a step of concentration and refining by electrodialysis or electrolysis and/or a step of refining by ion exchange treatment, for example, with an anion exchange resin and/or a cation exchange resin in one of the H form and the TAA form. The NF permeate may advantageously be passed through the concentrating cells of an electrodialysis unit while passing the NF concentrate through the desalting cells of the electrodialysis unit to further recover TAA ions remaining in the NF concentrate, whereby the amount of wastewater discharged as the desalted waste can be decreased. The NF membrane separation step is preferably effected in multiple stages.
Owner:ORGANO CORP
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