Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

38results about How to "Running cost can be reduced" patented technology

Polishing condition control apparatus and polishing condition control method of CMP apparatus

To eliminate the unevenness of the film thickness of the wafers, and increase the polishing efficiency, reduce the running cost and enhance the production yield. A CMP apparatus 1 includes a film thickness measuring means 6 that measures the film thickness of the wafers before polishing, a polishing recipe preparing means 7 that prepares polishing conditions so that the polishing conditions such as polishing speed, polishing pressure, and the like for the wafers become optimal, a polishing time forecasting means that forecasts the polishing time of the wafer on the basis of the optimal polishing condition and the measured value, a polishing time measuring means that measures the actual polishing time of the wafer, and a computer 9 that controls the polishing condition on the basis of the measured value and the like of the polishing time. Further, the computer 9 includes a calculating unit 23 that calculate the difference between the measured value of the polishing time and the forecasted value thereof, and a polishing condition correcting/changing unit 24 that corrects/changes the polishing conditions so that the calculated difference becomes minimal, and thereby, the correction/change of the polishing conditions is carried out in real time.
Owner:TOKYO SEIMITSU

Continuously variable gear transmission

A continuously variable gear transmission has a hemispherical drive gear providing an axially varying pitch diameter and an axially varying effective circular pitch, and a driven gear with a constant pitch diameter having teeth tapering axially in an opposite sense to the axially varying effective circular pitch of the drive gear. A pitch control drum guides teeth of the driven gear relatively around the shaft axis to continuously vary their effective circular pitch to match a circular pitch of the teeth of the drive gear for ensuring meshing engagement throughout the varying axial positions, whereby the velocity ratio of the transmission is varied continuously. The control drum has a guiding surface extending therearound with an axially tapering, conical guiding portion providing an arcuate guiding surface portion of constant transverse and continuously axially varying radius. An interconnected rod assembly links the adjacent movable teeth together for movement as a ring around the guiding surface of the drum so that the effective circular pitch of the teeth engaging the drive gear is determined by the radius of the guiding portion and so that a tooth engaging the drive gear has a constant angular velocity throughout such engagement, The shaft of the driven gear comprises a plurality of coaxial sub-shafts carrying respective individual teeth mounted coaxially with the drum. A mechanism continuously and simultaneously varies both an angle of intersection of the drive and driven gear shafts, bringing different circumferential locations of the drive gear having different pitch diameters into engagement with the driven gear, and a relative axial position of engagement of the gears, changing a circular pitch of the driven gear to match a circular pitch of the drive gear. A differential connects the selected teeth of the driven gear gear to a power output only when the teeth are at the constant angular velocity.
Owner:YUN YOWANG

High pressure-resistant type electrical deionization apparatus, high pressure-resistant type electrical deionization system and method of producing ultrapure water using high pressure-resistant type deionization system

The present invention provides an electrical deionization apparatus suitable for an ultra pure water production system allowing high pressure raw water from an atomic power plant to be reused as the ultra water. The electric deionization stack 10 comprises a plurality of compartments defined by a compartment frame 11 and an ion exchange membrane 12. The compartments at the opposite ends construct an anode compartment 13 and a cathode compartment 14. The compartments, which are located between the anode compartment 13 and the cathode compartment 14, construct at least one concentrating compartment 15 and at least one deionizing compartment 16. Each compartment frame 11a constructing the concentrating compartment 15 has a concentrated water outlet 17. Each compartment frame 11b constructing the deionizing compartment 16 has a treated water outlet 18. In the pressure vessel 20, a concentrated water chamber 24 and a treated water chamber 25 are partitioned by a partition plate 23. Into the concentrated water chamber 24, the concentrated water flows from the concentrated water outlet 17 of the electric deionization stack 10. Into the treated water chamber 25, the treated water flows from the treated water outlet 18.
Owner:EBARA CORP

Gas supply blowout nozzle and method of producing flame-proofed fiber and carbon fiber

The nozzle body of the gas supply blowout nozzle (11) includes an inclined plate (13) guiding a gas flowing straightly from a gas inlet port to a rectification board (12), which is connected with the nozzle body. The rectification board (12) rectifies the flow of the gas guided by the inclined plate (13) so that the gas blows out perpendicular or parallel to a yarn from a gas outlet port. A gas guiding zone formed between the inclined plate (13) and the rectification board (12) includes one or more guide plates (14) which divide the gas supplied from the gas inlet port (11a) of the gas supply blowout nozzle (11) into two or more streams. In each gas passage formed at least one of between the inclined plate (13) and the guide plate (14) or between the guide plates (14), an upstream passage width W1 and any downstream passage width W2 thereof satisfy the relation of W1≧W2. The opening area A of the gas inlet port (12a) and the opening area B of the gas inlet of the rectification board (12) may satisfy the relation of A≦B. By means of said configuration, the wind speed in the heat treatment furnace is made uniform, the non-uniformity in the quality of the product caused by the non-uniformity of the wind speed is eliminated, longtime stable production is enabled, production efficiency is increased, and running costs are decreased.
Owner:MITSUBISHI CHEM CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products