The invention relates to a
confocal microscopic scanning method and discloses an alpha-beta scanning method for a
confocal microscopic
system to solve the problems that a
confocal scanning method in the prior art can not fully utilize an effective
field of view of an optical
system, the measuring efficiency is low, and reliability is hard to improve.A
signal alpha and a
signal beta are constructed through upper
computer software and sent into a streaming detection type
galvanometer system through two channels of a
data collecting card respectively to be taken as control signals of the streaming detection type
galvanometer system; the streaming detection type
galvanometer system conducts scanning according to the
signal alpha and the signal beta, and two-dimensional scanning is finished for a scanning
light spot according to a concentric circle track; scanning
light spot track information is acquired through calculation; the streaming detection type galvanometer system and an axial micropositioner are controlled to achieve three-dimensional scanning measurement of a sample to be detected; the collected data is processed, and by combining the scanning
light spot track, the three-dimensional shape of the sample to be detected is reconstructed.According to the method, the effective
field of view of the optical system can be fully utilized, and the scanning
field of view of the confocal microscopic system is enlarged to the maximum extent.