Confocal laser microscope based on self-mixing interference and scanning method of confocal laser microscope

Abstract

The invention discloses a confocal laser microscope based on self-mixing interference. The confocal laser microscope based on self-mixing interference comprises a helium-neon laser, an expanding collimating lens group composed of a concave lens and a convex lens, a variable neutral-density filter, an objective lens, a bidimensional moving platform, an one dimensional moving platform, a high-precision moving platform controller, a photoelectric detector, an electric current / voltage switching circuit, a filter, an amplifier, an analogue-to-digital conversion circuit and a computer unit. According to the confocal laser microscope based on self-mixing interference, a method of conducting microscanning with laser self-mixing interference and the confocal principle is adopted, the advantages of the laser self-mixing technology that the structure is simple, the collimation is easy and the characteristics of the confocal microscope that the axial resolving power is high and the antijamming capability is strong are combined, the automatic focusing problems and the measuring vision enlarging problem of the confocal laser microscope are solved, the structure of a traditional confocal microscope is simplified, the adjusting difficulty of reflected light path in a confocal measuring system is lowered, the defects of the traditional confocal microscope that the number of the needed optical element is large, the requirement on the optical element is high, the light path is complicated and adjusting is difficult are overcome.

Description

technical field [0001] The invention relates to the field of confocal laser microscopes, in particular to a self-mixing interference-based confocal laser microscope and a scanning method thereof. Background technique [0002] The research on self-mixing interference technology began in the 1960s, which means that the light incident on the outer surface is partially fed back and coupled into the inner laser cavity. The feedback injection of laser light mixes with the light in the laser cavity, which changes the output characteristics of the laser, such as causing changes in the spectrum and light intensity, forming a self-mixing effect. Since the 1980s, the principle of laser self-mixing interference has been applied to the field of measurement. In the late 1990s, domestic scholars began to pay attention to participating in the research of self-mixing theory and application. Compared with traditional interferometry technology, self-mixing interferometry has the same sensitiv...

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Problems solved by technology

However, this confocal system also has the disadvantage of being difficult to adjust the optical path sensitivity

At present, the confocal microscope is widely used in the fields of biomedicine and mechanical measurement, but the confocal microscope itself has certain shortcomings: first, it requires more optical components, and the performance requirements for the focusing lens and the photomultiplier tube used for signal detection Higher; the adjustment of the second system is complicated, especially the adjustment of the reflected light focusing on the pinhole requires special instruments and certain techniques; the third measurement field of view is small, and the measurement field of view of the general confocal laser microscope is within 10mm. If the measurement Large mechanical parts have to move the measurement platform multiple times to increase the measurement time

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