Method and device for detecting atomic force microscopic scanning of tri-scanner atomic

Abstract

The invention discloses a method and a device for detecting atomic force microscopic scanning of a tri-scanner atomic. The detecting method combines a sample scanning manner with a probe scanning manner, so that high-precision micro nano detection of small light samples and large heavy samples can be realized at the same time. The method for detecting atomic force microscopic scanning of the tri-scanner is provided with a atomic force microscopic detecting head of the tri-scanner formed by a probe scanning and photoelectric detecting unit, a sample scanning unit, a two-dimensional stepping scanning unit, and the like, and a scanning and feedback control system formed by a preamplifier, a proportional-integral-derivative (PID) feedback unit, an XYZ control module I, an XYZ control module II, a stepping control module, a computer, an interface, and the like. The method for detecting atomic force microscopic scanning of the tri-scanner has the advantages that three probes and three sample scanning manners are provided, nano scale scanning accuracy is kept, single width image scanning in the range of 1 Mum to 100 Mum and image splicing in the range of 0.1mm to 1mm are realized on samples of different sizes and different weights, limitations of a conventional atomic force microscope (AFM) are overcome, and a new way is provided for the realization of high-precision, large-range and multi-scanning-manner micro nano scanning imaging of micro nano samples of various sizes and weights.

Description

technical field [0001] The invention relates to a three-scanner atomic force microscopic scanning detection method and device. Background technique [0002] Micro-nano technology has increasingly become one of the frontiers of scientific and technological development in the world today, and has played a major role in promoting the development of modern science and technology and social progress. Ultra-high-resolution instruments such as atomic force microscope (AFM) and scanning tunneling microscope (STM) have become indispensable and important tools in the field of micro-nano, especially AFM is widely used in physics, chemistry because it is not limited by the conductivity of samples. , biology, medicine, microelectronics, micromechanics and micro-nano technology and other fields. [0003] At present, most of the conventional AFMs in the world use a single scanner for their probes, either in the form of fixing the microprobe and scanning the sample, or in the form of fixin...

AI Technical Summary

Problems solved by technology

Although these conventional AFMs have the above characteristics, because they only use a single scanner and a single scanning method, there are limitations in performance and technical indicators. For example, the conventional AFM with fixed microprobe and sample scanning cannot realize large Large-scale scanning measurement of large-scale and large-mass samples; while conventional sample-fixed, micro-probe scanning AFMs often need to sacrifice imaging resolution or accuracy while achieving large-scale, large-mass samples. It is impossible to achieve high-resolution scanning imaging at the same time, so it is necessary to continuously develop new AFM technology

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