The invention discloses an ultrahigh vacuum transfer device which comprises a vacuum transfer cavity, a first magnetic rod, a second magnetic rod, a third magnetic rod, a sample table, a sample pressing piece and a sample transfer support, and the first magnetic rod, the second magnetic rod and the third magnetic rod are fixedly connected with the sample table, the sample pressing piece and the sample transfer support respectively. The sample table, the sample pressing sheet and the sample transfer support are arranged in the vacuum transfer cavity, and the first magnetic rod, the second magnetic rod and the third magnetic rod are in sealing fit with the vacuum transfer cavity; the sample table is used for bearing a sample, the sample pressing piece is arranged above the sample table in the first direction, the sample table can be driven by the first magnetic rod to move in the first direction, and / or the sample pressing piece can be driven by the second magnetic rod to move in the first direction, and the sample pressing piece and the sample table are configured to be of a sample fixing structure for fixing or releasing the sample.