Light emission microscope opposite side sample fixer

A light emission microscope, sample fixation technology, applied in microscopes, optics, instruments, etc., can solve the problems of difficulty in analysis, air bubbles on the back of the chip and glass, and pollution on the chip surface, and achieves the effect of easy use, avoidance of waste, and avoidance of pollution.
CN101086553AInactive Publication Date: 2007-12-12SEMICON MFG INT (SHANGHAI) CORP +1
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SEMICON MFG INT (SHANGHAI) CORP
Publication Date
2007-12-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

The light transmitting microscope back sample fixture mainly comprises the sample bearing base plate, sample fixing pole and at least three movable threaded cushion, middle of the sample bearing plate embedded with transparent glass as the location for bearing sample. It does not need thermosol, without pollution, being material saving and convenient in use.
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Description

technical field

[0001] The invention relates to a light emission microanalysis technique, in particular to a design scheme of a sample holder of a light emission microscope. Background technique

[0002] Optical Emission Microscopy (EMMI) is a new defect localization analysis technique with high sensitivity and high resolution developed in the 1990s. With the continuous decline of the line width of semiconductor devices, optical emission microscopy has been widely used in the location of failure points and failure mechanism analysis of leakage, breakdown, hot carriers and other failure points in integrated circuits and discrete devices.

[0003] As a new type of high-resolution microscopic defect localization technology, light emission microscopy can quickly and accurately locate device failure defects in a wide range, so it is widely used in device failure analysis.

[0004] In semiconductor devices with leakage, breakdown, and hot carrier effects, the failure point genera...

Claims

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