Light emission microscope opposite side sample fixer

A light emission microscope, sample fixation technology, applied in microscopes, optics, instruments, etc., can solve the problems of difficulty in analysis, air bubbles on the back of the chip and glass, and pollution on the chip surface, and achieves the effect of easy use, avoidance of waste, and avoidance of pollution.

Inactive Publication Date: 2007-12-12
SEMICON MFG INT (SHANGHAI) CORP +1
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Problems solved by technology

However, there are two main problems in the processing process: one is that there are air bubbles between the back of the chip and the glass due to the glue, which has a great negative impact on the backside capture during EMMI analysis; the other is that after the EMMI analysis is completed, the The process of removing the chip from the glass slide can easily contaminate the surface of the chip, because the hot melt is difficult to clean when the chip is removed,

Method used

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  • Light emission microscope opposite side sample fixer
  • Light emission microscope opposite side sample fixer

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Embodiment 1

[0036] Fig. 1 shows the sectional view of the sample holder on the back of the light emission microscope of the present invention, which has the following structure: a sample carrying substrate 1, a sample fixing rod 2 and at least three movable threaded gaskets 3;

[0037] A light-transmitting glass sheet 11 is inlaid in the center of the sample carrying substrate as a position for carrying the sample chip 4;

[0038] Both ends of the sample fixing rod 2 are respectively connected to both sides of the sample carrying substrate 1 by movable threaded gaskets 3;

[0039] Among the at least three movable threaded gaskets 3, at least two movable threaded gaskets 3 are penetrated on both sides of the sample carrying substrate 1, and are respectively fixed to the two ends of the sample fixing rod 2, at least one of which can be The moving thread gasket 3 is installed in the middle of the sample fixing rod 2 .

[0040] The specific structure of the above-mentioned sample carrier sub...

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Abstract

The light transmitting microscope back sample fixture mainly comprises the sample bearing base plate, sample fixing pole and at least three movable threaded cushion, middle of the sample bearing plate embedded with transparent glass as the location for bearing sample. It does not need thermosol, without pollution, being material saving and convenient in use.

Description

technical field [0001] The invention relates to a light emission microanalysis technique, in particular to a design scheme of a sample holder of a light emission microscope. Background technique [0002] Optical Emission Microscopy (EMMI) is a new defect localization analysis technique with high sensitivity and high resolution developed in the 1990s. With the continuous decline of the line width of semiconductor devices, optical emission microscopy has been widely used in the location of failure points and failure mechanism analysis of leakage, breakdown, hot carriers and other failure points in integrated circuits and discrete devices. [0003] As a new type of high-resolution microscopic defect localization technology, light emission microscopy can quickly and accurately locate device failure defects in a wide range, so it is widely used in device failure analysis. [0004] In semiconductor devices with leakage, breakdown, and hot carrier effects, the failure point genera...

Claims

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Application Information

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IPC IPC(8): G02B21/26G01N21/88
Inventor 梁山安秦天颜金国简维廷
Owner SEMICON MFG INT (SHANGHAI) CORP
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