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Ray based electret polarization device and method

An electret and ray technology, applied in the direction of microstructure devices, manufacturing microstructure devices, and techniques for producing decorative surface effects, etc., can solve problems such as inability to polarize electrets and impermeability of ions, and achieve structural Simple, fast polarizing effect

Active Publication Date: 2015-11-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Claims
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Problems solved by technology

The existing classical electret polarization method is corona polarization, which uses the air high-voltage corona discharge mechanism, but the ions generated cannot penetrate the blocked solid medium, and can only polarize the bare electret , and the polarization time is as long as 10 to 30 minutes, so corona polarization cannot polarize the encapsulated electret

Method used

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  • Ray based electret polarization device and method

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Embodiment Construction

[0027] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0028] Such as figure 1 As shown, the ray-based electret polarization device of the present embodiment includes: a protective box 1, a ray generator, a sample fixing assembly, a support frame 4, a metal film 5, a high-voltage bias power supply 6 and a ray intensity dose pen and Intelligent alarm 7; Wherein, the protective box 1 protective box includes a metal box shell 11 and the plastic insulating material 12 attached to its inner wall; the ray generator includes a ray power supply device 21 arranged outside the protective box and its associated Connected radiation generating device 22 and radiation irradiation device 23 arranged on the top of the protective box; the sample fixing assembly is arranged at the bottom of the protective box and is facing the radiation generation and radiation irradiation device, including the insulating sample stag...

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Abstract

The invention discloses a ray based electret polarization device and method. The electret polarization device comprises a protective box body, a ray generator, a sample fixing component, a support rack, a metal film and a high voltage bias power supply. A space around the metal film, a to-be-polarized electret sample and a sample platform in a ray covered area is filled with high density plasma. A high voltage bias electric field is formed between the metal film connected with the high voltage end and a conductive sample platform connected with the grounded end. Under the action of the high voltage bias electric field, positive charge and negative charge in the plasma are separated and move toward the opposite directions, so that the charge of specific electric property can be adsorbed on the surface of the to-be-polarized electret sample. The device does not need a vacuum environment, has a simple structure, and is rapid and efficient. The polarization time can be shortened to 10 seconds magnitude from 5-20 minutes of the traditional corona polarization time. The electret in a packaging shell can be polarized rapidly.

Description

technical field [0001] The invention relates to electret polarization, in particular to a ray-based electret polarization device and a polarization method thereof. Background technique [0002] Electrets include electret substrates and polarized charges on their surfaces. Polarization technology is the only way to achieve high-density charges for electrets. It plays a decisive role in the performance of electret MEMS and is the primary key technology for research on electret MEMS. Experts and scholars at home and abroad have carried out extensive research on the polarization technology of electrets. The existing classical electret polarization method is corona polarization, which uses the air high-voltage corona discharge mechanism, but the ions generated cannot penetrate the blocked solid medium, and can only polarize the bare electret , and the polarization time is as long as 10 to 30 minutes, so the corona polarization cannot polarize the encapsulated electret. Conten...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B81B7/02
Inventor 冯跃娄文忠
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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