Microscopic scanning platform and working area flatness calibration method
A technology of scanning platform and working area, applied in the field of microscope scanning, can solve the problems of unable to scan the platform to scan quickly, unable to determine and adjust the specific position of the defect, and achieve the effect of convenient adjustment
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Embodiment 1
[0035] Microscopic scanning platform, including the scanning platform, the scanning platform is a workbench, and the surface of the workbench is provided with an XY coordinate system, and the zero point of the X-axis and the Y-axis meets at the corner of the scanning platform, so the area formed by the X-axis and the Y-axis is located at The first quadrant of the coordinate system, and the X-axis and Y-axis coordinate values are both positive.
[0036] A method for calibrating the flatness of a working area of a microscopic scanning platform includes the following steps:
[0037] The first step: the construction of the mobile device, the support is fixed on the side of the micro-scanning platform, and two driving mechanisms are installed inside the support so that it can move along the X-axis and Y-axis; the driving mechanism is The X-axis driving mechanism and the Y-axis driving mechanism, and the driving power part is a driving cylinder, and the supporting member is a sl...
Embodiment 2
[0045] Microscopic scanning platform, including the scanning platform, the scanning platform is a workbench, and the surface of the workbench is provided with an XY coordinate system, and the zero point of the X-axis and the Y-axis meets at the corner of the scanning platform, so the area formed by the X-axis and the Y-axis is located at The first quadrant of the coordinate system, and the X-axis and Y-axis coordinate values are both positive.
[0046] A method for calibrating the flatness of a working area of a microscopic scanning platform includes the following steps:
[0047] The first step: the construction of the mobile device, the support is fixed on the side of the micro-scanning platform, and two driving mechanisms are installed inside the support so that it can move along the X-axis and Y-axis; the driving mechanism is The X-axis driving mechanism and the Y-axis driving mechanism, and the driving power part is a driving cylinder, and the supporting member is a sl...
Embodiment 3
[0055] Microscopic scanning platform, including the scanning platform, the scanning platform is a workbench, and the surface of the workbench is provided with an XY coordinate system, and the zero point of the X-axis and the Y-axis meets at the corner of the scanning platform, so the area formed by the X-axis and the Y-axis is located at The first quadrant of the coordinate system, and the X-axis and Y-axis coordinate values are both positive.
[0056] A method for calibrating the flatness of a working area of a microscopic scanning platform includes the following steps:
[0057] The first step: the construction of the mobile device, the support is fixed on the side of the micro-scanning platform, and two driving mechanisms are installed inside the support so that it can move along the X-axis and Y-axis; the driving mechanism is The X-axis driving mechanism and the Y-axis driving mechanism, and the driving power part is a driving cylinder, and the supporting member is a sl...
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