Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof

Abstract

The invention discloses a microscopic scanning imaging acquisition device for vertical optical element surface damage and a method thereof. The device comprises a two-dimensional scanning motion platform, a one-dimensional focusing shaft, a automatic zoom microscope, a area array color CCD, a coaxial light source, a ring light source, a dispersion confocal displacement sensor, a system controller, an industrial control computer, a seismic isolation platform and a display. The device of the invention can automatically acquire and store images, can automatically complete image splicing, has image analysis capability, and can count quantity and dimension of damage spots in an image. According to the invention, online rapid high-precision microscopic scanning imaging acquisition and damage detection of vertical optical element surface in an optical path can be realized. The device of the invention has a wide application prospect and considerable social and economic benefits.

Description

technical field [0001] The invention relates to the field of surface damage detection of optical components, in particular to a microscopic scanning imaging acquisition device and method for surface damage of vertical optical components. Background technique [0002] In the optical experiment, there is a kind of damage test experiment, which needs to test the damage degree of the laser intensity to the optical element. Because the detection accuracy of the damage size is relatively strict, it must be realized with the help of a high-magnification microscope for magnified imaging and splicing. The disadvantages of existing commercial microscopes are that they can only be used for offline detection, the detection efficiency is too low, the requirements for component placement are extremely high, the splicing accuracy is poor, and the price is expensive. In addition, frequent installation makes it difficult to ensure the repeatability of the position and attitude of optical com...

AI Technical Summary

Problems solved by technology

The disadvantages of existing commercial microscopes are that they can only be used for offline detection, the detection efficiency is too low, the requirements for component placement are extremely high, the splicing accuracy is poor, and the price is expensive

In addition, frequent installation makes it difficult to ensure the repeatability of the position and attitude of optical components in the optical path, which affects the reliability of experimental data to a certain extent

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