The invention discloses a
microwave atomic force
microscope probe based on a
coplanar waveguide structure and a preparation method, and belongs to the field of micro-nano detection and atomic force microscopes. The probe comprises a clamping part and a
cantilever beam, a central conductor is laid on the axes of the upper surfaces of the clamping part and the
cantilever beam, grounding
metal layers are symmetrically arranged on the two sides of the central conductor at certain intervals, the grounding
metal layers and the central conductor are parallel and equal in length, and the central conductor, the grounding
metal layers and gaps between the central conductor and the grounding metal layers form a clamping part
coplanar waveguide structure; and the central conductor and the grounding metal layer of the clamping part are respectively connected with the central conductor and the grounding metal layer of the
cantilever beam to form a
microwave transmission circuit, and the
microwave transmission circuit is converted into a
coaxial transmission line structure at the needle point to transmit a microwave
signal to the needle point, so that emission and receiving of a near-field microwave
signal are realized. According to the invention, the design is flexible, integration is easy, low-loss and low-dispersion transmission of
microwave signals is facilitated, the design complexity and manufacturing cost of the probe are reduced, and effective support is provided for micro-nano detection and an atomic force
microscope technology.