The invention provides a method and device for generating a curve
mask test pattern set, a medium, a program product and a terminal. The method comprises the following steps: acquiring a curve
mask and measurement path data thereof, and adjusting a
line width to generate a first test pattern; positioning an intersection point, constructing a local tangent line, translating the tangent line, and executing a graph removal operation to generate a second
test graph; and extracting boundary points around the intersection point, constructing a reference
graph based on the intersection point and the boundary points, and generating a third
test graph through Boolean operation combination. And finally, combining the three test patterns to form a diversified test pattern set. According to the method, the defects of curve
mask test pattern design and
verification are overcome, the generation efficiency and precision are remarkably improved, the design time is shortened, and the resolution error in the manufacturing process is reduced, so that the quality and reliability of the test pattern are improved, and the method is suitable for the fields of
semiconductor manufacturing,
nanotechnology, high-precision photoetching and the like and has wide application prospects.