Preparation method of abrasion-resistant and oxidation-resisting TiAlSiN nanometer composite superhard coating

Abstract

The invention discloses a preparation method of an abrasion-resistant and oxidation-resisting nanometer composite TiAlSiN superhard coating. The preparation method is characterized in that a basal body is pretreated and placed in electrical arc and magnetron sputtering composite deposition equipment, a pillar arc Ti target is used as a Ti source, and the power supply current of the pillar arc controls the sputtering rate of the pillar arc Ti target; a flat surface Si target and a flat surface Al target are used as sources of corresponding elements, the flat surface Si target and the flat surface Al target are placed on the inner wall of a furnace body in an opposite manner, and the sputtering rates of the targets are controlled by adjusting the power of a medium-frequency pulse power supply; high-purity Ar is adopted as a main ionization gas, and an effective glow discharge process is guaranteed; and high-purity N2 is adopted as a reacting gas, is ionized and combined with the Ti, Si and Al elements so as to deposit on the surface of the basal body to form a TiAlSiN coating. The thickness of the prepared TiAlSiN coating is 3.5 micrometers, and the microhardness of the coating is 40 GPa; and the friction factor is 0.7, the antioxidation temperature of the TiAlSiN coating achieves 1000 DEG C, and the TiAlSiN coating has good antioxidation property and abrasion-resistant property.

Description

technical field [0001] The invention belongs to the field of coating material preparation, and further relates to a method for preparing a wear-resistant and anti-oxidation TiAlSiN nanocomposite superhard coating. The TiAlSiN coating prepared by the method has an anti-oxidation temperature of 1000°C and a hardness of 40GPa. The coefficient of friction is about 0.7, which is especially suitable for applications in the fields of high-speed dry cutting tools and high-temperature forming molds. Background technique [0002] Hard coatings have excellent properties such as high hardness, oxidation resistance, and wear resistance, and have broad application prospects in cutting tools, molds, and mechanical wear-resistant parts. In the past two decades, hard coatings with two or three components represented by nitrides and carbides of transition metals (such as TiN, TiC, CrN, TiAlN, etc.) have been applied to tools and molds. The surface coating treatment significantly improves the...

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Problems solved by technology

However, due to the limitations of the preparation principle itself, the droplets in the arc ion plating coating cannot be completely eliminated, resulting in a loose coating structure and poor surface roughness.

The third is plasma-assisted chemical vapor deposition represented by pulsed direct current PCVD. This method is based on chemical vapor deposition. Therefore, the coating has high bonding strength and good comprehensive performance, but the main disadvantage is that the deposition temperature is relatively low High, the Cl content in the coating cannot be completely eliminated, which affects the corrosion performance and mechanical properties of the coating

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