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5776results about How to "Avoid mixing" patented technology

Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device

Provided is a substrate processing apparatus capable of suppressing accumulation of reaction products or decomposed matters on an inner wall of a nozzle and suppressing scattering of foreign substances in a process chamber. The substrate processing apparatus includes a process chamber, a heating unit, a source gas supply unit, a source gas nozzle, an exhaust unit, and a control unit configured to control at least the heating unit, the source gas supply unit and the exhaust unit. The source gas nozzle is disposed at a region in the process chamber, in which a first process gas is not decomposed even under a temperature in the process chamber higher than a pyrolysis temperature of the first process gas, and the control unit supplies the first process gas into the process chamber two or more times at different flow velocities to prevent the first process gas from being mixed.
Owner:KOKUSA ELECTRIC CO LTD

Film deposition apparatus, substrate processing apparatus, film deposition method, and storage medium

A film deposition apparatus to form a thin film by supplying first and second reaction gases within a vacuum chamber includes a turntable, a protection top plate, first and second reaction gas supply parts extending from a circumferential edge towards a rotation center of the turntable, and a separation gas supply part provided therebetween. First and second spaces respectively include the first and second reaction gas supply parts and have heights H1 and H2. A third space includes the separation gas supply part and has a height H3 lower than H1 and H2. The film deposition apparatus further includes a vacuum chamber protection part which surrounds the turntable and the first, second and third spaces together with the protection top plate to protect the vacuum chamber from corrosion.
Owner:TOKYO ELECTRON LTD

Film deposition apparatus, substrate processing apparatus, film deposition method, and storage medium

A film deposition apparatus to form a thin film by supplying first and second reaction gases within a vacuum chamber includes a turntable, a protection top plate, first and second reaction gas supply parts extending from a circumferential edge towards a rotation center of the turntable, and a separation gas supply part provided therebetween. First and second spaces respectively include the first and second reaction gas supply parts and have heights H1 and H2. A third space includes the separation gas supply part and has a height H3 lower than H1 and H2. The film deposition apparatus further includes a vacuum chamber protection part which surrounds the turntable and the first, second and third spaces together with the protection top plate to protect the vacuum chamber from corrosion.
Owner:TOKYO ELECTRON LTD

Semiconductor device

An object is to prevent an impurity such as moisture and oxygen from being mixed into an oxide semiconductor and suppress variation in semiconductor characteristics of a semiconductor device in which an oxide semiconductor is used. Another object is to provide a semiconductor device with high reliability. A gate insulating film provided over a substrate having an insulating surface, a source and a drain electrode which are provided over the gate insulating film, a first oxide semiconductor layer provided over the source electrode and the drain electrode, and a source and a drain region which are provided between the source electrode and the drain electrode and the first oxide semiconductor layer are provided. A barrier film is provided in contact with the first oxide semiconductor layer.
Owner:SEMICON ENERGY LAB CO LTD

Light emitting device and method of manufacturing the same

To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.
Owner:SEMICON ENERGY LAB CO LTD

System and method for automatically classifying search results

Disclosed is a system and a method for automatically classifying search results. The system includes a search engine server for obtaining and providing search results with regard to a search word entered by the user, grouping the obtained search results according to meanings of the search word, and providing the grouped search results; a related word database for storing related words classified into groups according to meanings of the search word; and a group determination system for receiving search results from the search engine server, comparing the contents of the search results with the related words stored in the related word database to determine which group of the related word database the search results belong to, and storing search results at a predetermined place when the search results are not grouped.
Owner:RES & BUSINESS FOUND SUNGKYUNKWAN UNIV

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

In exposing substrate by projecting an image of a pattern onto substrate via projection optical system and liquid, side surface and underside surface of substrate are applied with liquid-repellent treatment. By such a configuration, an exposure method by which when exposing edge areas of the substrate, the exposure can be performed in a condition that a liquid immersion region is formed well and that flowing out of the liquid to the outside of the substrate stage are prevented is provided.
Owner:NIKON CORP

Osmotic pump drug delivery systems and methods

Implantable osmotic pump devices and systems include multiple osmotic pumps and / or semipermeable membranes to extend the useful life cycle and functionality of the drug delivery system. Use of an implantable system including multiple implantable osmotic pumps allows different drugs to be administered from the same implanted system. One or more of the semipermeable membranes of the system may be initially sealed by an overlying impermeable membrane upon implantation of the system into the patient. When the patient develops a tolerance to a first drug or to a first dose of the first drug, the impermeable membrane may be breached, to expose the underlying semipermeable membrane to the osmotic pressure of the patient at the implant site. This causes the infusion rate to increase, thereby providing the patient with the needed relief and / or other desired therapeutic effect. In the case of a multiple pump system, breaching an impermeable membrane may cause the infusion of a second drug. The second drug may potentiate a therapeutic effect (such as an analgesic effect) of the first drug, as is the case with Sufentanil and Clonidine.
Owner:MICROSOLUTIONS

Toilet with function of urine separation

The invention discloses a toilet with a function of urine separation. The toilet comprises a toilet body and a urinal. A water pipe for flushing the urinal is arranged at the top of the toile body, a delay infrared induction sensor for controlling the water pipe to close is arranged at the top of the urinal, and the bottom of the urinal is provided with a filter screen. The toilet is characterized in that a sewage pipe a corresponding to the filter screen and a urine separation device connected with the sewage pipe are connected to the bottom of the urinal, a water drain pipe is connected to the bottom of the urine separation device, and a sewage hose a is connected to one end of the urine separation device. The toilet with the function of urine separation is simple in structure and convenient to use, complete urine separation can be realized, and accordingly the problem of incompleteness in urine separation is avoided.
Owner:刁淑红 +1

Method of growing a thin film onto a substrate

A method of growing a thin film onto a substrate placed in a reaction chamber according to the ALD method by subjecting the substrate to alternate and successive surface reactions. The method includes providing a first reactant source and providing an inactive gas source. A first reactant is fed from the first reactant source in the form of repeated alternating pulses to a reaction chamber via a first conduit. The first reactant is allowed to react with the surface of the substrate in the reaction chamber. Inactive gas is fed from the inactive gas source into the first conduit via a second conduit that is connected to the first conduit at a first connection point so as to create a gas phase barrier between the repeated alternating pulses of the first reactant entering the reaction chamber. The inactive gas is withdrawn from said first conduit via a third conduit connected to the first conduit at a second connection point.
Owner:ASM IP HLDG BV

Semiconductor device and manufacturing method thereof

A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high. By performing the formation of the pixel electrode, the source region and the drain region by using three photomasks in three photolithography steps, a liquid crystal display device prepared with a pixel TFT portion, having a reverse stagger type n-channel TFT, and a storage capacitor can be realized.
Owner:SEMICON ENERGY LAB CO LTD

Vapor deposition device

InactiveUS20030221620A1Small-sized formation of a vapor deposition deviceEfficient use ofElectroluminescent light sourcesVacuum evaporation coatingGas phaseProduct gas
The present invention provides a vapor deposition device suitable for multiface cutting by using a large area board, having a high efficiency of utilizing an EL material and excellent in uniformity of a film, wherein a board 13 and a vapor deposition mask 14 are mounted above board holding means 12, an interval between a vapor deposition source holder 17 and an object to be deposited (board 13) is narrowed to be equal to or smaller than 30 cm, preferably, equal to or smaller than 20 cm, further preferably, 5 through 15 cm and in vapor deposition, the vapor deposition source holder 17 is moved in the X direction or Y direction in accordance with an insulating member (referred to also as bank, partition wall) 10 and a shutter 15 is opened and closed to thereby form a film.
Owner:SEMICON ENERGY LAB CO LTD

EL display device and a method of manufacturing the same

To provide a high throughput film deposition means for film depositing an organic EL material made of polymer accurately and without any positional shift. A pixel portion is divided into a plurality of pixel rows by a bank, and a head portion of a thin film deposition apparatus is scanned along a pixel row to thereby simultaneously apply a red light emitting layer application liquid, a green light emitting layer application liquid, and a blue light emitting layer application liquid in stripe shapes. Heat treatment is then performed to thereby form light emitting layers luminescing each of the colors red, green, and blue.
Owner:SEMICON ENERGY LAB CO LTD

Interfacial refraction accommodating lens (IRAL)

This invention relates to intraocular lenses. More particularly, this invention relates to intraocular lenses that have the ability to alter the light refractive power in response to changes in the tension of the ciliary muscle or ciliary body of the eye or any other accommodative forces. Lenses of this invention are generally referred to as interfacial, i.e., lens properties being defined as the interface of two liquids having different refractive indices, refractive accommodating lenses (IRAL).
Owner:HOYA CORP

Methods and system for processing a microelectronic topography

Methods and systems are provided which are adapted to process a microelectronic topography, particularly in association with an electroless deposition process. In general, the methods may include loading the topography into a chamber, closing the chamber to form an enclosed area, and supplying fluids to the enclosed area. In some embodiments, the fluids may fill the enclosed area. In addition or alternatively, a second enclosed area may be formed about the topography. As such, the provided system may be adapted to form different enclosed areas about a substrate holder. In some cases, the method may include agitating a solution to minimize the accumulation of bubbles upon a wafer during an electroless deposition process. As such, the system provided herein may include a means for agitating a solution in some embodiments. Such a means for agitation may be distinct from the inlet / s used to supply the solution to the chamber.
Owner:LAM RES CORP

Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases postively and method thereof

The present invention is related to an apparatus and a method for chemical vapor deposition (CVD) using a showerhead through which a reactive gas of at least one kind and a purge gas is injected over a substrate on which a film is growing. A plural number of reactive gas showerhead modules are laid on a purge gas showerhead module. Each reactive gas is injected from a bottom of the showerhead after flowing through the showerhead as separated, thereby preventing the reactive gases from causing homogeneous gas phase reactions and from generating unwanted particles at the inside of the showerhead. And purge gas is injected from the bottom surface of the showerhead by forming a protective curtain, thereby suppressing diffusion of the reactive gas injected backwardly. Each reactive gas is mixed with an injection support gas which is a kind of inert gas in a mixing zone at inside of the showerhead, where the injection velocity of each reactive gas is regulated positively by the amount of the injection support gas mixed. The present invention further includes an apparatus and a method, wherein the showerhead is cooled by a cooling jacket which keeps the temperature of the showerhead at proper levels to prevent both the condensation and the thermal decomposition of the reactive gas used.
Owner:KOREA INST OF IND TECH +1

Catheter assembly with joinable catheters

A multiple lumen catheter assembly having at least two catheters separate and independent from each other along at least a portion of their lengths, and that can be selectively joined together to change the separation distances between the catheters by of a connecting means.
Owner:MEDICALLY ADVANCED DESIGNS +1

Embolic protection and plaque removal system with closed circuit aspiration and filtering

Embolic protection and plaque removal apparatus and methods are provided wherein an aspiration device aspirates, filters and reperfuses blood using a closed fluid circuit having a bi-directional working lumen. The plaque removal device includes a plurality of self-expanding cutting elements that form cage that self-centers within the blood vessel to reduce the risk of trauma to the vessel lining.
Owner:NOVOSTENT CORP

Fabrication system and a fabrication method of light emitting device

An evaporation apparatus with high utilization efficiency for EL materials and excellent film uniformity is provided. The invention is an evaporation apparatus having a movable evaporation source and a substrate rotating unit, in which the space between an evaporation source holder and a workpiece (substrate) is narrowed to 30 cm or below, preferably 20 cm, more preferably 5 to 15 cm, to improve the utilization efficiency for EL materials. In evaporation, the evaporation source holder is moved in the X-direction or the Y-direction, and the workpiece (substrate) is rotated for deposition. Therefore, film uniformity is improved.
Owner:SEMICON ENERGY LAB CO LTD

Interfacial refraction accommodating lens (IRAL)

This invention relates to intraocular lenses. More particularly, this invention relates to intraocular lenses that have the ability to alter the light refractive power in response to changes in the tension of the ciliary muscle or ciliary body of the eye or any other accommodative forces. Lenses of this invention are generally referred to as interfacial, i.e., lens properties being defined as the interface of two liquids having different refractive indices, refractive accommodating lenses (IRAL).
Owner:HOYA CORP

Image forming apparatus

The image forming apparatus comprises: an ejection head which ejects droplets of a radiation curing liquid; an intermediate transfer medium on which an image is formed by the droplets ejected from the ejection head; an evaporation device which evaporates the droplets deposited on the intermediate transfer medium; a preliminary curing device which emits radiation onto the droplets deposited on the intermediate transfer medium in order to semi-cure the droplets so that the droplets do not blend with each other; and a transfer device which presses a recording medium against the intermediate transfer medium so that the image formed on the intermediate transfer medium is transferred onto the recording medium, wherein: the droplets deposited on the intermediate transfer medium are evaporated by the evaporation device; and the evaporated droplets are semi-cured by the radiation emitted from the preliminary curing device, and then the image formed on the intermediate transfer medium is transferred onto the recording medium by the transfer device.
Owner:FUJIFILM CORP

Surface treatment apparatus

PCT No. PCT / JP96 / 00935 Sec. 371 Date Dec. 6, 1996 Sec. 102(e) Date Dec. 6, 1996 PCT Filed Apr. 5, 1996 PCT Pub. No. WO96 / 31997 PCT Pub. Date Oct. 10, 1996In a surface treatment apparatus (30) of the face type, a porous dielectric (37) is supported by the outer periphery portion of the supporting member (45) under the bottom surface of a porous electrode (32). The dielectric can be supported by the supporting member to permit the thermal expansion deformation of the dielectric by forming an upward inclined-face (47) and a downward inclined-face (43) on the supporting member (45) and the dielectric (37), respectively. Further, a discharge gas can be supplied uniformly to a discharge region (51) through the electrode (32) and the dielectric (37), both of which are porous. Many gas exhaust ports (41), by which the flow rate of the gas can be regulated, are provided around the discharge region (51). Thus, the gas is uniformly exhausted around the discharge region (51). Especially, if the gap between the dielectric (37) and a work (39) depends on mounting accuracy or the like and varies with location, the gas can be exhausted uniformly around the discharge region (51).
Owner:SEIKO EPSON CORP

Double-sided pressure-sensitive adhesive sheet and method for sticking and fixing touch panel to display device

A double-sided pressure-sensitive adhesive sheet for fixing a touch panel to a display device wherein one surface of the double-sided pressure-sensitive adhesive sheet is stuck to the surface of the touch panel while the other surface of the double-sided pressure-sensitive adhesive sheet is stuck to a display surface of the display device, the double-sided pressure-sensitive adhesive sheet including: a transparent base; a first transparent pressure-sensitive adhesive layer formed on one surface of the transparent base; and a second transparent pressure-sensitive adhesive layer formed on the other surface of the transparent base; wherein the double-sided pressure-sensitive adhesive sheet is releasable and re-stickable to the display surface while being stuck to the touch panel.
Owner:NITTO DENKO CORP

Method and apparatus for preventing scaling in electrodeionization units

A method and apparatus is provided for inhibiting scaling in an electrodeionization system and, more particularly, for increasing tolerance to hardness in the feed water to an electrodeionization unit by inhibiting precipitation of scale-forming metallic cations contained in the feed water and thereby increasing efficiencies of the electrodeionization system. Water to be purified is passed through an electrodeionization unit in which the flow in the diluting compartment is countercurrent to the flow in the concentrating compartment. This is to impede the migration of scale-forming metallic cations from the diluting compartment, through the cation exchange membrane, into the concentrating compartment and towards the concentrating compartment side of the anion exchange membrane, thereby preventing scale formation on the anion exchange membrane. The electrodeionization unit may be further modified by dividing the concentrating compartments into first and second compartments by a porous diaphragm or ion-conducting membrane. The porous diaphragm or ion-conducting membrane effectively eliminates convective transport of scale-forming metallic cations from the cation exchange membrane side of the concentrating compartment to the anion exchange membrane side of the concentrating compartment, thereby inhibiting scale formation on the anion exchange membrane.
Owner:E CELL

Brush-seal and matrix for regenerative heat exchanger, and method of adjusting same

Disclosed is a regenerative heat exchanger including a brush-seal configuration to prevent mixing of fluid flows. The regenerative heat exchanger includes a regenerator, and at least two conduits, each conduit having a matrix end abutting a face of the regenerator matrix. The at least two conduits carrying at least two fluid flows, the fluid flows which pass through the regenerator matrix. The regenerative heat exchanger includes a plurality of brush-seals, each brush-seal located at a matrix end of each conduit without contacting the matrix, thereby sealing around a periphery of each conduit to prevent mixing of fluid flows. Also disclosed is a method for establishing a minimal gap between a regenerator matrix of a regenerative heat exchanger and a plurality of brush-seals.
Owner:WILSON SOLARPOWER CORP

Dual chamber mixing syringe and method for use

A mixing syringe and method for using the mixing syringe are provided. The mixing syringe comprises a housing having a first compartment for containing a first component, an outer plunger having a second compartment for containing a second component, and an inner plunger. Prior to use, a seal separates the first and second components. To prepare the mixture, the seal is pierced and the two components are mixed. The mixing syringe and its method of use are particularly suited to applications in which at least one of the mixture components is a relatively highly viscous material.
Owner:MDC INVESTMENT HLDG
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