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5725results about How to "Avoid mixing" patented technology

Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases postively and method thereof

The present invention is related to an apparatus and a method for chemical vapor deposition (CVD) using a showerhead through which a reactive gas of at least one kind and a purge gas is injected over a substrate on which a film is growing. A plural number of reactive gas showerhead modules are laid on a purge gas showerhead module. Each reactive gas is injected from a bottom of the showerhead after flowing through the showerhead as separated, thereby preventing the reactive gases from causing homogeneous gas phase reactions and from generating unwanted particles at the inside of the showerhead. And purge gas is injected from the bottom surface of the showerhead by forming a protective curtain, thereby suppressing diffusion of the reactive gas injected backwardly. Each reactive gas is mixed with an injection support gas which is a kind of inert gas in a mixing zone at inside of the showerhead, where the injection velocity of each reactive gas is regulated positively by the amount of the injection support gas mixed. The present invention further includes an apparatus and a method, wherein the showerhead is cooled by a cooling jacket which keeps the temperature of the showerhead at proper levels to prevent both the condensation and the thermal decomposition of the reactive gas used.
Owner:KOREA INST OF IND TECH +1

Method and apparatus for preventing scaling in electrodeionization units

A method and apparatus is provided for inhibiting scaling in an electrodeionization system and, more particularly, for increasing tolerance to hardness in the feed water to an electrodeionization unit by inhibiting precipitation of scale-forming metallic cations contained in the feed water and thereby increasing efficiencies of the electrodeionization system. Water to be purified is passed through an electrodeionization unit in which the flow in the diluting compartment is countercurrent to the flow in the concentrating compartment. This is to impede the migration of scale-forming metallic cations from the diluting compartment, through the cation exchange membrane, into the concentrating compartment and towards the concentrating compartment side of the anion exchange membrane, thereby preventing scale formation on the anion exchange membrane. The electrodeionization unit may be further modified by dividing the concentrating compartments into first and second compartments by a porous diaphragm or ion-conducting membrane. The porous diaphragm or ion-conducting membrane effectively eliminates convective transport of scale-forming metallic cations from the cation exchange membrane side of the concentrating compartment to the anion exchange membrane side of the concentrating compartment, thereby inhibiting scale formation on the anion exchange membrane.
Owner:E CELL
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