The invention provides a large-cavity length micro-electro-mechanical tunable fabry-perot filter. The upper substrate of the filter is composed of bulk
silicon of which the section is W-shaped after double-sided
corrosion and a rich
boron-doped layer on the lower surface of the bulk
silicon; the upper surface of the W-shaped bulk
silicon is provided with a transparent thin film as a supporting film; a reflecting film on the supporting film serves as the front cavity mirror of the fabry-perot filter; the rich
boron-doped layer in different regions of the lower surface of the W-shaped bulk silicon is capable of serving as a
cantilever beam and an upper
electrode, respectively. The lower substrate of the filter is made of
quartz glass; a rear cavity mirror and a lower
electrode are fabricated on the upper surface of the lower substrate in regions corresponding to the front cavity mirror and the upper
electrode; a
diffraction grating is carved in the region, corresponding to the rear cavity mirror, of the lower surface of the lower substrate. The micro-electro-
mechanical filter is capable of obtaining the initial cavity length of more than 200 microns conveniently and capable of realizing single
wavelength filtering in different directions, has the advantages of narrow half-peak overall width and wide
free spectral range, and has wide application prospect in the fields of
optical communication, optical information reading,
laser technology and the like.