Method for preparing vertical cavity laser by transferring perovskite thin film

A technology of thin film transfer and perovskite, which is applied in the field of lasers, can solve the problems of unfavorable optical properties of laser devices, etc., and achieve the effects of easy industrial mass production, high flatness, and large transfer film area

Pending Publication Date: 2022-06-03
PEKING UNIV
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  • Abstract
  • Description
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Problems solved by technology

But PMMA is a non-gain material, its introduction will produce optical loss, which is not conducive to the optical performance of laser devices

Method used

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  • Method for preparing vertical cavity laser by transferring perovskite thin film
  • Method for preparing vertical cavity laser by transferring perovskite thin film
  • Method for preparing vertical cavity laser by transferring perovskite thin film

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preparation example Construction

[0052] In the present invention, the preparation method of the first DBR mirror substrate spin-coated with the first perovskite polycrystalline thin film preferably includes the following steps:

[0053] Prepare a first DBR mirror layer on the surface of the substrate base;

[0054] A first perovskite polycrystalline film is spin-coated on the surface of the first DBR mirror layer, and after annealing treatment, a first DBR mirror substrate spin-coated with the first perovskite polycrystalline film is obtained.

[0055] In the present invention, the substrate base is preferably a quartz substrate, a silicon substrate, a sapphire substrate or a mica substrate. The present invention has no special requirements on the method of preparing the first DBR mirror layer, and the method can be prepared by a method well known to those skilled in the art.

[0056] In the present invention, the spin coating includes low-speed spin-coating and high-speed spin-coating performed in sequence,...

Embodiment 1

[0076] A vertical cavity laser based on a quasi-2D perovskite polycrystalline thin film was fabricated by a large-area perovskite thin film transfer method through the following steps:

[0077] (1) Mix the base and the curing agent in a weight ratio of 10:1, and stir for 5 minutes to make them fully mixed. Then vacuum was applied for 30 min to completely remove air bubbles in the mixed solution. Then use atomically flat silicon as the substrate, pour the mixed solution, and vacuum again for 10 min. It was put into an oven at 80° C. for 1 h to be cured, thereby preparing a large-size PDMS (polydimethylsiloxane) flexible substrate.

[0078] (2) Put the prepared PDMS substrate into an ozone-plasma apparatus, work at a medium power of 15W for 3 minutes, and use the plasma to bombard the surface of the flexible substrate to increase the surface energy of the substrate, which can make the originally hydrophobic PDMS substrate. The surface is hydrophilic.

[0079] (3) Within 30 mi...

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Abstract

The invention provides a method for preparing a vertical cavity laser through perovskite film transfer, and belongs to the technical field of lasers. According to the invention, the hydrophilic flexible substrate is utilized to perform physical and mechanical transfer on the perovskite polycrystalline thin film, the transfer thin film is large in area and high in flatness, and the thickness of the perovskite polycrystalline thin film between DBR reflector substrates can be increased, so that the cavity length of the vertical cavity laser is increased. According to the method, the hydrophilic flexible substrate is adopted to perform physical and mechanical transfer on the perovskite polycrystalline film, so that the surface appearance and the optical property of the perovskite polycrystalline film are not changed, optical loss is not additionally introduced, and the problem that low-solubility perovskite cannot meet the length of an optical resonant cavity due to too small film thickness can be solved; and the application of the device in the laser field is expanded. Meanwhile, the method provided by the invention is simple to operate, low in cost and easy to realize industrial batch production.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a method for preparing a vertical cavity laser by transferring a perovskite film. Background technique [0002] Organic-inorganic hybrid perovskite semiconductor materials have received extensive research attention in recent years. These materials have excellent optoelectronic properties, such as direct bandgap semiconductor properties, large light absorption coefficients, high defect tolerance, and photoluminescence quantum yield. High, continuously tunable band gap, large exciton binding energy, etc., and the cost is lower than that of traditional semiconductors, so it is a kind of laser gain medium material with great commercial research value. [0003] Perovskite lasers are classified into vertical cavity surface emitting lasers (VCSELs), distributed feedback lasers (DFBs), Fabry-Perot resonators (F-P), and whispering gallery mode cavities (WGMs) according to their structures....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/125H01S5/183B05D1/00
CPCH01S5/125H01S5/18361B05D1/00H01S2304/00Y02E10/549
Inventor 储子昊郭桐赵诗琪李艳平徐万劲冉广照
Owner PEKING UNIV
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