Large-cavity length micro-electro-mechanical tunable fabry-perot filter

A Perot filter, micro-electromechanical technology, applied in instruments, optical components, optics, etc., can solve the problems that it is difficult to realize narrow full width at half maximum and wide free spectral range at the same time, and the length of the Bury-Perot filter cavity. , to achieve the effect of simple structure, guaranteed parallelism, and low-voltage drive

Active Publication Date: 2015-02-04
山东佳联电子商务有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is: aiming at the problem that the existing micro-electromechanical Fabry-Perot filter has a short cavity length and

Method used

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  • Large-cavity length micro-electro-mechanical tunable fabry-perot filter
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  • Large-cavity length micro-electro-mechanical tunable fabry-perot filter

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Example Embodiment

[0033] Example 1

[0034] Embodiment 1 of the present invention is a MEMS tunable Fabry-Perot filter with a cavity length of 200 μm, its spectral range is 400nm-800nm, and the full width at half maximum is less than 0.05nm. The cross-sectional diagram of the filter is shown in figure 1 As shown, the upper substrate includes: a "W"-shaped bulk silicon 1-1 after double-sided etching, a dense boron-doped layer 1-2 on the lower surface of the "W"-shaped bulk silicon, a cantilever beam 1-3, and an upper electrode 1- 4. The central hollow area 1-5 of "W" shape silicon, the surrounding hollow area 1-6 of "W" shape silicon, the supporting film of front cavity mirror 2, and the front cavity mirror 3; the lower substrate includes: quartz substrate 4, rear cavity Mirror 5, lower electrode 6 and diffraction grating 7.

[0035]The "W" shape silicon 1-1 and its lower surface concentrated boron-doped layer 1-2 are used as the upper substrate of the MEMS tunable Fabry-Perot filter, with a t...

Example Embodiment

[0038] Example 2

[0039] Embodiment 2 of the present invention is a MEMS tunable Fabry-Perot filter with a cavity length of 500 μm, its spectral range is 1.3 μm-1.7 μm, and the full width at half maximum is less than 0.1 nm. The structure of this filter is similar to Embodiment 1, only the size is different.

[0040] The "W" shape silicon 1-1 and its lower surface densely boron-doped layer 1-2 are used as the upper substrate of the MEMS tunable Fabry-Perot filter. The total thickness is 500 μm, which determines the MEMS tunable method. The initial cavity length of the Bry-Perot filter. Among them, the thickness of the boron-doped layer 1-2 on the lower surface is 15 μm, and its processed area is thinned by 4 μm. The purpose of thinning is to determine the thickness of the cantilever beam 1-3 and the thickness of the upper and lower electrodes (1-4 and 6). spacing. The dimensions of the central hollow area 1-5 of the "W" shape silicon 1-1 are 2 mm x 2 mm in length x width o...

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Abstract

The invention provides a large-cavity length micro-electro-mechanical tunable fabry-perot filter. The upper substrate of the filter is composed of bulk silicon of which the section is W-shaped after double-sided corrosion and a rich boron-doped layer on the lower surface of the bulk silicon; the upper surface of the W-shaped bulk silicon is provided with a transparent thin film as a supporting film; a reflecting film on the supporting film serves as the front cavity mirror of the fabry-perot filter; the rich boron-doped layer in different regions of the lower surface of the W-shaped bulk silicon is capable of serving as a cantilever beam and an upper electrode, respectively. The lower substrate of the filter is made of quartz glass; a rear cavity mirror and a lower electrode are fabricated on the upper surface of the lower substrate in regions corresponding to the front cavity mirror and the upper electrode; a diffraction grating is carved in the region, corresponding to the rear cavity mirror, of the lower surface of the lower substrate. The micro-electro-mechanical filter is capable of obtaining the initial cavity length of more than 200 microns conveniently and capable of realizing single wavelength filtering in different directions, has the advantages of narrow half-peak overall width and wide free spectral range, and has wide application prospect in the fields of optical communication, optical information reading, laser technology and the like.

Description

technical field [0001] The invention belongs to the field of micro-opto-electromechanical systems, in particular to a long-cavity-length micro-electromechanical tunable Fabry-Perot filter. Background technique [0002] Micro-electromechanical tunable Fabry-Perot filters have the advantages of small size, easy integration, narrow bandwidth, and adjustable wavelength. They are widely used in optical sensing, optical communication, optical information reading, and laser technology. However, due to the limitations of the Fabry-Perot filter's own principle, its two important parameters - free spectral range and full width at half maximum - are theoretically limited to each other, and the performance indicators of the two are often not compatible. Generally speaking, the longer the cavity length of the filter, the narrower the full width at half maximum, but the narrower the free spectral range; conversely, the shorter the filter cavity length, the wider the free spectral range, b...

Claims

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Application Information

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IPC IPC(8): G02B26/00
Inventor 方亮石振东汪为民王强邱传凯周崇喜田中群
Owner 山东佳联电子商务有限公司
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