The invention provides a terminal structure of a 
channel power metal oxide semiconductor (MOS) device and a manufacture method of the terminal structure. The terminal structure comprises a grid 
electrode lead-out 
electrode (101), wherein a suspension 
polycrystalline silicon electrode (102) is arranged under the grid electrode lead-out electrode (101) and is positioned inside a thick oxidation layer (103), a grid electrode connecting 
metal (104) is arranged above the grid electrode lead-out electrode (101), a source electrode (105) of a device active region is arranged on the top of a 
cell structure, a drift region (106) adopts N type 
doping, a drain electrode (107) adopts N type heavy 
doping, and a combined structure of the grid electrode lead-out electrode (101), a grid electrode lower part suspension 
polycrystalline silicon electrode (102) and the thick oxidation layer (103) realizes the effect of a device terminal and is formed in the same 
mask and the same process. The ultra-low conducting resistance of the device is ensured, the 
breakdown voltage and the 
parasitic capacitance of the device cannot be influenced, the process manufacture flow process is optimized, and meanwhile, the manufacture cost of the device is reduced.