The invention provides a terminal structure of a
channel power metal oxide semiconductor (MOS) device and a manufacture method of the terminal structure. The terminal structure comprises a grid
electrode lead-out
electrode (101), wherein a suspension
polycrystalline silicon electrode (102) is arranged under the grid electrode lead-out electrode (101) and is positioned inside a thick oxidation layer (103), a grid electrode connecting
metal (104) is arranged above the grid electrode lead-out electrode (101), a source electrode (105) of a device active region is arranged on the top of a
cell structure, a drift region (106) adopts N type
doping, a drain electrode (107) adopts N type heavy
doping, and a combined structure of the grid electrode lead-out electrode (101), a grid electrode lower part suspension
polycrystalline silicon electrode (102) and the thick oxidation layer (103) realizes the effect of a device terminal and is formed in the same
mask and the same process. The ultra-low conducting resistance of the device is ensured, the
breakdown voltage and the
parasitic capacitance of the device cannot be influenced, the process manufacture flow process is optimized, and meanwhile, the manufacture cost of the device is reduced.