68 results about "Process manufacturing" patented technology

The invention discloses a digital driving method for a full-flow manufacturing process of a high-precision shell casting, which comprises a casting stage, a heat treatment stage and a machining stage, and is characterized in that digital data streams are established among three process links of the casting stage, the heat treatment stage and the machining stage; and the output data of the previous process is used as a process adjustment basis of the subsequent process, so that a datamation-driven closed-loop manufacturing system is formed. The invention provides a set of effective systematic solution for high-precision production of thin-wall shell castings.

The invention discloses a process manufacturing method of a cut image, which belongs to the technical field of laser cutting, and comprises the following steps of: acquiring a grid area covered by a cut graph of a material to be processed, dividing the cut graph into a plurality of vector diagrams according to the grid area, and performing slotting compensation processing on each vector diagram to obtain a corresponding cutting track; obtaining attribute information of the multiple primitives, determining a reference point of the vector diagram according to the attribute information of the primitives and the cutting trajectory, determining a light-off position on the primitives according to the reference point, the included angle and the vertex, and performing path optimization on the vector diagram according to the light-off position and the cutting trajectory to obtain a target cutting trajectory, the laser machining parameters of the cutting pattern are set based on the target cutting track and the to-be-machined material, hole blasting or hole punching caused by unstable laser of the cutting starting point can be prevented, it is guaranteed that the cutting effect of the to-be-cut material is optimal, the size precision meets the requirement, and the laser cutting efficiency is also improved.

The invention discloses a multi-model fusion process quality prediction method based on ensemble learning, and relates to the technical field of process industry quality prediction. The method comprises three stages of data preprocessing, model construction and model fusion. In the data preprocessing stage, cleaning, normalization and feature screening are performed on multi-process production data; in the model construction stage, an overall prediction model and a segmented prediction model are constructed respectively, the overall prediction model adopts RF, LightGBM and KNN algorithms, and the segmented prediction model adopts an LSTM-KAN combined neural network; in the model fusion stage, prediction results of the two models are fused through an XGBoost ensemble learning algorithm, and advantage complementation is achieved. According to the method, the quality prediction problem caused by high process coupling degree and remarkable nonlinear relation in complex process manufacturing is effectively solved, the prediction precision and generalization performance are improved, and the method is suitable for a multi-process complex production scene.

The application discloses a method for preparing Ti80 titanium alloy flat ingot based on an electron beam cold bed furnace and high return material melting and casting, uses Ti80 titanium alloy return material as raw material, uses VAR ingot cutting material as VAR compensation material, and optimizes the material distribution structure, so that the EB melting element burning loss is precisely controlled, the Ti80 titanium alloy flat ingot with qualified and controllable components is prepared by using a large proportion of Ti80 titanium alloy return material, the component unevenness problem under the high return material ratio is solved, and core technical support is provided for short process manufacturing of Ti80 plate.

The application discloses a production rhythm dynamic evaluation method and system based on multi-attribute process constraints, relates to the tobacco technical field, and is suitable for the process manufacturing scene of mixed production arrangement of multiple brands. The method solves the problems of distortion of traditional static evaluation standards, broken cross-day production data, and difficulty in quantifying process coordination efficiency, provides dynamic and accurate benchmarks for production rhythm evaluation, and supports lean production landing in a tobacco silk workshop. In the method, step S1 realizes semantic alignment of production data, guarantees production shift analysis integrity; step S2 constructs a multi-attribute process constraint system, adapts to different process production requirements; step S3 generates differentiated theoretical working hour benchmarks, eliminates systematic deviation of the evaluation system; step S4 separates time deviation interference components, improves delay judgment accuracy; step S5 realizes automatic identification of delay events, reduces manual statistical lag; and step S6 locates key links of capacity constraints, and provides quantitative basis for production scheduling optimization.

The invention belongs to the field of PCB (printed circuit board) processing, and particularly relates to a PCB resin hole plugging and resin board grinding technological process manufacturing method. The method comprises the following steps: S1, drilling: drilling a PCB by using a numerical control drilling machine; s2, copper plating: performing PTH copper deposition treatment on the PCB to form a hole wall initial conductive layer, then performing cleaning and drying, performing copper treatment on the dried PCB, and thickening a copper layer of the hole wall to form a stable conductive layer; s3, negative film drying is conducted, the designed circuit pattern is subjected to the PCB resin hole plugging and resin board grinding process in the production process through the process of film pasting, exposure and development, the production process, production control and quality control of the PCB resin hole plugging and resin board grinding process can have a unified operation mode and control method, the production efficiency is improved, and the production cost is reduced. The process quality of the resin plug hole and the resin grinding plate is improved, and the conditions that the copper thickness is insufficient / too thick, the copper thickness is uneven and the plug holes are uneven in the actual production process of the resin plug hole and the resin grinding plate are avoided.

The invention discloses a manufacturing process for ensuring the smoothness of a circuit board, which is characterized in that after a hollow area on a main board is filled with a filling adhesive tape, the surface of the whole product is smoother, the stress is uniform during the subsequent lamination, the bonding force of the laminated product is better, the laminated product is smoother, and the product quality is improved. The filling adhesive tape can cut off the adhesive position of the waste material area during final shape manufacturing and cutting, the non-adhesive filling adhesive tape of the finished product area is taken out, the whole process manufacturing is completed, the method is suitable for all products with hollowed-out areas on the board surfaces for circuit manufacturing, stress can be even during subsequent pressing, it is guaranteed that the bonding force of the pressed products is better, and the product quality is improved. And the pressed product is smoother, and the percent of pass is higher.

The application discloses a kind of key equipment intelligent diagnosis method and system for rotating machinery, it is related to the technical field of fault diagnosis and prediction, including, with physical inspiration as guidance, in feature learning stage, introduce bounded metric encapsulation mechanism, traditional unbounded feature space is mapped into bounded similarity manifold, to suppress high-dimensional space distance concentration effect and improve inter-class separability and intra-class compactness.In bounded metric space, realize multi-fault identification by combining near neighbor or support vector classifier.The application has significant improvement in weak fault (germination period) detection, composite / multiclass fault distinction and robustness under low signal-to-noise ratio condition, has good explainability and engineering deployment value, is suitable for the predictive maintenance and online health monitoring of wind power, rail transit, aerospace and process manufacturing and other scenes.

The application discloses a circuit board manufacturing method of embedding carbon oil resistance, comprising the following steps: taking a double-sided copper-clad plate, manufacturing a circuit pattern including a carbon oil connecting pattern, the carbon oil connecting pattern including a wire end and a connecting end, the width of the connecting end being greater than that of the wire end, pasting dry films to both sides, manufacturing a dry film window pattern in the area corresponding to the carbon oil pattern on the side where the carbon oil connecting pattern is located, performing plasma treatment, then removing the film, manufacturing a carbon oil layer in the carbon oil pattern area, taking a bonding layer prepreg, taking other layer core plates, stacking and pressing the carbon oil plate together, and performing post-process manufacturing to form the circuit board of embedding carbon oil resistance; by designing the connecting end, the carbon oil layer has a larger bonding area, the bonding force of the carbon oil layer is increased, the prepreg is stacked on the surface of the carbon oil layer, the interlayer bonding force of the carbon oil layer is improved, and the problems of falling off, multilayer board delamination and even multilayer board explosion caused by poor bonding of the carbon oil layer are solved.

The utility model provides an edge roller occlusion part tripod welding positioning device which comprises a first welding tool and a second welding tool, the first welding tool and the second welding tool are arranged according to the inner space of an edge roller occlusion part tripod and the size of a weldment, the second welding tool is placed in the first welding tool, and the first welding tool is arranged in the first welding tool. And a weldment to be welded on the tripod of the occlusion component of the edge roller can be supported. When the welding positioning device is used for completing assembling and welding, the procedure manufacturing process is optimized, the scribing procedure and the correcting procedure in the prior art are omitted, the manufacturing time and the labor cost are saved, and the production efficiency is multiplied by adopting concentrated assembly spot welding during batch welding of a tripod serving as an occlusion component of the edge roller; according to the welding positioning device, standard welding means and method are adopted, and uniformity and stability of product characteristics are achieved.

A centering and cleaning stage structure and method for square mask substrates includes: a support and positioning assembly comprising a floating platform consisting of a centering stage, a central tray, a support plate, and a spring plate, for supporting the square mask substrate; a transmission and propulsion assembly including a lifting mechanism with closed-loop control, which pushes the floating platform to precisely deliver the square mask substrate to the loading tray area of ​​the positioning fixture; a cleaning assembly including a front cleaning structure and a back cleaning structure; and an external control unit with built-in propulsion and centering programs, a front cleaning program, and a back cleaning program, which respectively control the support and positioning assembly and the transmission and propulsion assembly to achieve high-precision positioning of the square mask substrate, and control the cleaning assembly to achieve all-round, dead-angle-free cleaning of the front and back of the square mask substrate. This invention optimizes the centering and positioning mechanism, simplifies the process flow, shortens the production cycle, reduces production costs, and improves the substrate yield, achieving micron-level precision positioning and all-round cleaning, meeting the stringent requirements of high-process manufacturing for precise substrate positioning and high cleanliness.

The application relates to a cross-process quality real-time correction method for a multi-process manufacturing process, which comprises collecting process parameter data, quality detection data and process meta-information corresponding to each manufacturing process of a part, constructing a manufacturing process sequence dataset according to the process sequence, constructing a cross-process quality propagation model to extract a whole-process state vector representing the quality state of the whole part manufacturing process and a final quality prediction result, constructing and training a cross-process correction decision model to obtain an optimal compensation vector to correct the process parameters, realizing dynamic control and real-time correction of the part manufacturing equipment, and designing a fine-tuning strategy based on incremental learning and reinforcement learning to dynamically optimize the control and correction process in each control cycle. The application solves the technical bottlenecks in traditional quality control, such as the difficulty in describing the quality transmission relationship between processes, the lag of dynamic correction and the lack of self-adaptive ability of the model, and improves the overall quality stability and consistency in the complex part manufacturing scene.

The application discloses a convex roller shape optimization method, a multi-stage continuous roller pressing electrode dry process manufacturing method, a process parameter optimization method, a multi-stage continuous roller pressing electrode dry process manufacturing system, a process parameter optimization device, a processing equipment, a storage medium and a computer program product, and relates to the technical field of electrode manufacturing. In the application, a first optimization function for optimizing the shape of the convex roller surface and minimizing the stress uniformity evaluation index of the convex roller surface is established, a first number of test shape parameters are extracted, and a first test stress uniformity evaluation index under the test shape parameters is calculated. Through the test shape parameters and the first test stress uniformity evaluation index, a first quantitative function relationship between the shape parameters of the convex roller surface and the stress uniformity evaluation index is fitted; finally, the optimal shape parameters when the stress uniformity evaluation index is the smallest are determined based on the first quantitative function relationship.

The present application relates to the field of aircraft structure design and manufacturing, and relates to a kind of aircraft thin-walled cylinder piece clamping deformation simulation method and system, method includes the following steps: step 1: constructing aircraft thin-walled cylinder piece, aircraft thin-walled cylinder piece is pretreated, and setting and post-processing are solved;Step 2: selecting different auxiliary support positions of aircraft thin-walled cylinder piece, respectively, simulation deformation analysis is carried out;Step 3: the information of different auxiliary support positions and the corresponding simulation maximum deformation value under each auxiliary support position are polynomial fitted to obtain a polynomial model;Step 4: determine the optimal auxiliary support position of aircraft thin-walled cylinder piece;The present application constructs deformation polynomial model using simulation result data, and then obtains the auxiliary support position corresponding to the minimum deformation of cylinder piece through the model, to achieve the purpose of efficiently predicting the optimal clamping support position of cylinder piece, and then improve the level of part process manufacturing.

The invention discloses an electric reactor magnetic shielding plate overturning device and method, and relates to the technical field of transformer process manufacturing, the device comprises a clamping and fixing unit, a supporting and overturning unit and a hoisting unit, the clamping and fixing unit comprises an upper pressing plate, a lower pressing plate and a plurality of fasteners, the upper pressing plate and the lower pressing plate are arranged in parallel, and the upper pressing plate and the lower pressing plate are arranged in parallel; a magnetic shielding plate is clamped between the upper pressing plate and the lower pressing plate. According to the device, the movable supporting pieces for fixing the ends of the magnetic shielding plate are installed, the upper pressing plate is covered, the overturning supporting legs are installed and finally locked through the fasteners, then two cranes of a crane hook connecting device are lifted slowly, so that the whole device contains the magnetic shielding plate, lifting force is provided through movement of a crane trolley, and the magnetic shielding plate is fixed through the rolling characteristic of the overturning supporting legs at the bottom of the device. The whole device is slowly and stably overturned to a required angle around the contact point of the overturning supporting leg and the ground, so that the deformation risk caused by direct hoisting is eliminated, and the safety of equipment and personnel is guaranteed.

A sand mold 3D printing method for complex pump shell parts of a spaceflight liquid rocket engine is characterized in that a proper process scheme is designed and a reasonable positioning mode is determined according to product structure characteristics and sand mold 3D printing process characteristics, and rapid verification of a casting scheme is realized by applying digital analogue simulation software; the problem that a sand mold 3D printing technology is applied to complex pump shell parts is solved, and the purposes of rapid production and rapid verification of products are achieved. The sand mold 3D printing process is mainly used for sand mold 3D printing process manufacturing of high-working-condition and complex-stress pressure-bearing type complex aluminum alloy pump shell parts with the variable cross-section vortex channels, the development period can be greatly shortened, the size precision and the size stability can be improved, the problem that a mold needs to be produced before design and verification in traditional casting is solved, the assembly number is reduced, the casting application range is expanded, and the production cost is reduced. Technical support is provided for the advanced design concept, and meanwhile a solid foundation is laid for high-quality and efficient production of products.

The application provides a layout of active region patterns and a storage module and a preparation method thereof, and the layout corresponds to a layout of conductive plugs, the layout of the conductive plugs comprises a plurality of conductive plug pattern subarrays arranged at intervals along a second direction, each of the conductive plug pattern subarrays comprises two conductive plug patterns. The layout of the active region patterns comprises a plurality of key active region patterns and storage active region patterns arranged at intervals along the second direction, and the first direction and the second direction are perpendicular to each other. Since the plurality of key active region patterns correspond to the conductive plug pattern subarrays, and at least one key active region pattern is in contact or not in contact with the two conductive plug patterns in the corresponding conductive plug pattern subarray, and at least one key active region pattern is only in contact with one conductive plug pattern in the corresponding conductive plug pattern subarray, the actual length of the key active region is randomly uncontrollable in the actual process manufacturing process, and a unique and uncontrollable key is generated.

The invention relates to the technical field of rare earth permanent magnet material manufacturing, and discloses an isostatic pressing-free rare earth permanent magnet of gadolinium yttrium activated recycled powder and a preparation method, the magnet is prepared from sintered neodymium iron boron grinding recycled powder, a gadolinium yttrium intermediate alloy and a quick-setting casting piece, and a recycled material pre-wetting agent and an airflow mill online composite lubricant are further added into raw materials. The preparation method comprises the following steps: carrying out liquid-phase pre-wetting on the recycled material, mixing with a new material, and carrying out hydrogen decrepitation; dynamically injecting a composite lubricant in the grinding process of the jet mill to prepare modified fine powder; after being subjected to magnetic field orientation compression molding, the fine powder is directly packed into a box without being subjected to cold isostatic pressing treatment; and carrying out negative pressure removal, vacuum sintering and aging treatment to obtain a final product. According to the method, high-value utilization of recycled materials is achieved through pre-wetting oxidation blocking and heavy rare earth grain boundary regulation and control; the powder fluidity is improved through jet mill in-situ lubrication modification, isostatic-pressure-free short-process manufacturing is achieved, the manufacturing cost is reduced, and meanwhile the excellent comprehensive magnetic performance and mechanical performance of the magnet are guaranteed.

The application discloses a quenching tool and method for a deep blind inner hole of a workpiece, and belongs to the field of process manufacturing. The quenching tool comprises a plug, a positioning ring and a liquid storage tank. The plug is used for being inserted into the deep blind inner hole of the workpiece, so that the bottom of the plug is located at the bottom of the deep blind inner hole. The plug movably sleeves with the positioning ring. The positioning ring is arranged opposite to the deep blind inner hole. The outer peripheral wall of the positioning ring is provided with a plurality of spaced arms. The inner cavity of the liquid storage tank contains cooling liquid. The bottom and the top of the liquid storage tank are respectively provided with a discharge port and an air inlet. The discharge port is communicated with the top of the plug. A stop valve is arranged on the discharge port. The air inlet is used for being communicated with compressed air. The quenching tool for the deep blind inner hole of the workpiece can not only rapidly discharge the gas existing in the deep blind inner hole, improve the feeding rate of the cooling liquid, but also accelerate the cooling rate in the deep blind inner hole, and further ensure the quenching hardness in the deep blind inner hole.

1. The name of the design product: straw cup (film inside label process manufacturing snow top cover). 2. The use of the design product: for containing liquid straw cup. 3. The design points of the design product: in the combination of shape and pattern. 4. The picture or photo that best indicates the design points: perspective drawing.

The invention relates to a connection hole site iterative optimization method based on multi-dimensional stress characteristic driving. The problems existing in layout optimization of connecting hole sites of plate / shell components at present are solved. Firstly, the center position of a design domain inner hole is parameterized; calculating at least two of equivalent stress, stress gradient, principal stress direction and strain energy density under a predefined load; calculating a comprehensive influence function through a method of normalizing and weighting the multi-dimensional features; carrying out iterative optimization on the position of the guide hole in the first principal stress direction, calculating a multi-dimensional stress feature and a comprehensive influence function in each iteration, and carrying out dynamic updating on a feasible region by considering geometric and process constraints at the same time; after iterative calculation convergence, a calculation result is output, and key index verification is carried out; checking whether geometric constraints and process manufacturing conditions are met or not; and generating a sample piece and carrying out physical test verification. According to the method, optimization of multiple performance targets such as strength, rigidity and fatigue life can be achieved, and the method can also be closely combined with engineering practical application.

The application relates to a preparation method of a low-dark-current silicon drift detector based on a double-sided temporary bonding process, wherein after the front surface process of an SDD wafer is completed, the front surface of the SDD wafer is temporarily bonded by using temporary bonding glue and a temporary bonding glass slide; then the back surface of the SDD wafer after the temporary bonding is thinned and polished, the back surface of the SDD wafer after the thinning and polishing is subjected to a CMP process to remove a damage layer and reduce the dark current of the device; then the back surface of the SDD wafer is subjected to process manufacturing, after the manufacturing is completed, the glass slide is peeled off from the SDD wafer by using a laser debonding process, and the front surface of the wafer is exposed; wherein when the active area of the SDD wafer is manufactured, doping is shielded by using a thin gate oxide layer to be injected, the shielding oxide layer is removed after the injection is completed, and the dark current of the device is reduced by performing furnace tube oxidation and annealing; when the SDD contact hole oxide layer is removed, a manufacturing process combining dry etching and wet etching is used to avoid damage to the silicon substrate and reduce the dark current of the device.

The invention relates to the technical field of heat treatment of welding seams, and discloses an electric-magnetic coupling energy field time-sharing loading type circumferential welding seam strengthening process and device, and the process comprises the following steps: (1) welding seam positioning; (2) tool positioning; (3) high-frequency large-current treatment; (4) coupling treatment of medium and low frequency strong electric pulse-strong alternating magnetic field; (5) low-frequency medium-strong electric pulse-medium-strong alternating magnetic field coupling treatment; and (6) the tool is unloaded. According to the method, a multi-stage multi-directional magnetic field and a wide-frequency-domain controllable pulse current field are actively constructed, the space-time action domain of an electric-magnetic energy field is accurately matched, micro defects and solute atoms are driven to directionally migrate and evolve, precipitated phase size distribution is regulated and controlled in a targeted mode, local obdurability and heat-conducting property of a non-uniform body of a welded workpiece are cooperatively improved, and the welding quality is improved. The method has the characteristics of high flexibility, high efficiency, short process, high space-time integration in the manufacturing process and the like.

The invention discloses a heterogeneous tungsten-rhenium alloy and a preparation method and application thereof, and relates to the technical field of powder metallurgy and high-performance metal composite materials. The invention discloses a heterogeneous tungsten-rhenium alloy which comprises a tungsten-rhenium alloy layer and a pure tungsten layer, and the tungsten-rhenium alloy layer is adjacent to the pure tungsten layer. The tungsten-rhenium alloy layer comprises a mixture A. The mixture A comprises, by mass, 15%-25% of rhenium, 3%-10% of tungsten carbide, 0.2%-2% of metal elements and the balance tungsten. And / or the pure tungsten layer comprises a mixture B, and the mixture B comprises the following components in percentage by mass: 0.2-2% of metal elements and the balance of tungsten. The invention provides three key technologies of a tungsten-rhenium alloy / pure tungsten heterogeneous material bonding system, breakthrough of the interface bonding problem, performance difference of the heterogeneous material and short-process manufacturing, and has important value for promoting application of the tungsten-rhenium material in the fields of ultrahigh-temperature structural parts, wear-resistant parts and the like.

The invention provides a process formula flexible manufacturing control method and control system based on a support vector machine, and the control method comprises the steps: receiving a process formula from an ERP system or an MES system, and also comprises the steps: 1, carrying out the standardization of the received process formula, and forming a standard process formula corresponding to the process formula; 2, performing modular classification on the standard process formula through the trained SVM to obtain a digital quantity and analog quantity parameter module, a PID control module and other control modules, and extracting a key module; 3, judging whether all key modules are matched or not, if yes, executing the step 5, and if not, executing the step 4; 4, receiving the corrected process formula, and re-executing the steps 1-3; and step 5, automatically generating an executable PLC / DCS program. According to the invention, the executable PLC / DCS program can be automatically formed according to the changed process formula, and the method is especially suitable for a multi-variety and small-batch flexible production scene in the process manufacturing industry.

The application discloses a kind of box castings process manufacturing methods for petroleum machinery, belong to casting manufacturing technical field.The box castings are integrally cast top drive box, including box body and integrated suspension body.The method includes: casting process design, adopt three box molding and the position of suspension body main stress part is in upper box;Directly above it is set up clear riser, and the dark riser with exhaust hole is set up on the thick part of the two sides of box top;Cold iron is set below the thickened skirt of box opening, and deformation resisting rib is set at box opening;Adopt ceramic sand and modified sodium silicate sand mold, electric arc furnace and LF furnace double connection smelting, bottom pouring and heat treatment including normalizing, quenching and tempering.The application effectively solves the problem of shrinkage porosity in thick part, deformation of thin wall opening and unqualified internal quality of key position in integrally casting due to large wall thickness difference, so that the casting has high density, small deformation, excellent comprehensive mechanical properties, and the flaw detection of key position meets high standard requirements.

The application relates to the field of rare earth permanent magnet manufacturing technology, and discloses a gadolinium-yttrium activated recycled powder free isostatic pressing rare earth permanent magnet and a preparation method, the magnet is made of sintered neodymium-iron-boron grinding processing recycled powder, gadolinium-yttrium intermediate alloy and rapid solidification ingot, and a recycled material pre-wetting agent and an airflow mill online composite lubricant are further added in the raw material. The preparation method comprises the following steps: after the recycled material is pre-wetted in a liquid phase, the recycled material is mixed with new material and hydrogen is crushed; the composite lubricant is dynamically injected in the airflow mill grinding process to obtain modified fine powder; after the fine powder is oriented and pressed into shape, the fine powder is directly packed into a box without cold isostatic pressing treatment; the final product is obtained through negative pressure discharge, vacuum sintering and aging treatment. Through pre-wetting oxidation prevention and heavy rare earth grain boundary regulation, the application realizes high-value utilization of the recycled material; through in-situ lubrication modification of the airflow mill, the powder fluidity is improved, the free isostatic pressing short process manufacturing is realized, the manufacturing cost is reduced, and the excellent comprehensive magnetic performance and mechanical performance of the magnet are ensured.

The application belongs to the field of micro-nano optical manufacturing, and discloses a lens microstructure manufacturing error real-time compensation closed loop method, system, computer equipment and storage medium. The method comprises the following steps: after a single lens completes a current process and before entering a next process, three-dimensional topographic data of the single lens is acquired online, and an actual phase is calculated; a manufacturing phase error is obtained by comparing the actual phase with a design phase; a cross-process error transmission model is established to describe the transmission evolution characteristics of the error between different physical mechanism processes; a process parameter compensation amount of the next process is generated according to the error and the model, and equipment parameters are adjusted in real time, so that the phase change generated in the next process offsets the predicted error evolution result. The application realizes single lens level real-time closed loop compensation of cross-process manufacturing errors, effectively suppresses error transmission accumulation, and improves manufacturing precision and consistency.

This application relates to a gas detection device for semiconductor process manufacturing, comprising: a sample collector, a pre-concentration unit, a column oven, and a detector. The sample collector includes a gas collection chamber and a sample input channel, a sample output channel, and a gas purging channel connected to the gas collection chamber. Process gas is input into the gas collection chamber through the sample input channel. The pre-concentration unit is connected to the gas collection chamber through the sample output channel and performs adsorption and desorption treatment on the process gas from the gas collection chamber. A gas chromatography column is installed in the column oven, which is connected to the pre-concentration unit through a first gas transmission channel. The gas chromatography column separates the desorbed process gas. The detector is connected to the column oven through a second gas transmission channel and performs gas composition analysis on the separated process gas. This application enables online detection of process gases in the process chamber used in semiconductor process manufacturing, improving detection efficiency and flexibility.

The invention relates to a test decision method and system for an NAND flash memory chip. The method comprises the following steps: acquiring preprocessed manufacturing process data and initial test data of a to-be-tested chip; inputting the manufacturing process data and the initial test data into a function qualification prediction model to perform chip function qualification analysis to obtain a function qualification prediction result; inputting the function eligibility prediction result, the manufacturing process data and the initial test data into a reliability prediction model, and performing chip reliability analysis under the confidence condition of the function eligibility prediction result to obtain a reliability prediction result; and performing joint judgment on the two types of prediction results according to a decision rule, and generating a test decision behavior of the to-be-tested chip. By adopting the method, under the conditions of not depending on complete test data and not executing a high-time-consumption reliability test, the prediction judgment of the chip function and reliability state and the dynamic optimization of the test process can be realized, so that the test time is shortened, and the test cost is reduced.