A method and apparatus for determining
capacitance of wires in an
integrated circuit is described. The
capacitance information derived according to the invention can be used, for example, to calibrate a
parasitic extraction engine or to calibrate an
integrated circuit fabrication process. The
capacitance information can also be used for timing and
noise circuit simulations, particularly for deep sub-Micron
circuit design simulations. Briefly, the invention allows measurement of both total capacitance of a line and cross
coupling capacitance between two lines by applying predetermined
voltage signals to specific circuit elements. The resulting current allows
simple computation of total capacitance and cross
coupling capacitance. Multiple cross
coupling capacitance can be measured with a single device, thus improving the art of
library generation, and the overall method is free of uncertainties related to
transistor capacitance couplings. The capacitance values obtained can then be used to calibrate procedures, processes, devices, etc.