The invention belongs to the field of power
semiconductor devices, and particularly relates to a low-power-consumption high-performance super-junction JBS
diode and a manufacturing method thereof. Thelow-power-consumption high-performance super-junction JBS
diode is manufactured by using a traditional
silicon-based process technology, so that the manufacturing cost is low; a P heavily doped cylindrical region and an N cylindrical drift region which have the characteristics of large area,
high concentration and large
junction depth are adopted, so that the forward conduction resistance is reduced; a super junction is formed, and good reverse blocking characteristics are achieved by optimizing
electric field distribution; by optimizing parameters of the super junction, higher blocking withstand
voltage can be realized, and the on-state and off-state
power consumption of the device is reduced; and optimal two-dimensional
electric field distribution is obtained by optimizing the
doping concentration and width of the P column region and the N column region, unification of high blocking
voltage and low on-resistance and unification of high blocking
voltage and rapid switching are achieved, compromise between forward on-state
voltage drop and reverse blocking characteristics and compromise between
reverse recovery characteristics and reverse blocking voltage are optimized, and the limit of a traditional
silicon material is broken through.