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Zero offset test compensation system of multi-channel capacitor type MEMS (micro-electromechanical system) acceleration sensor

An acceleration sensor and zero offset technology, which is applied in the field of microelectronics, can solve the problems of cumbersome operation and time-consuming measurement of multiple accelerometers, and achieve the effects of simple operation, high degree of automation, and improved yield

Inactive Publication Date: 2012-07-18
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The operation is cumbersome, and it is time-consuming to measure multiple accelerometers

Method used

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  • Zero offset test compensation system of multi-channel capacitor type MEMS (micro-electromechanical system) acceleration sensor
  • Zero offset test compensation system of multi-channel capacitor type MEMS (micro-electromechanical system) acceleration sensor
  • Zero offset test compensation system of multi-channel capacitor type MEMS (micro-electromechanical system) acceleration sensor

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Experimental program
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Embodiment 1

[0017] Example 1: Combining figure 1 , figure 2 , image 3 , the present invention is a multi-channel capacitive MEMS acceleration sensor zero point offset test compensation device, which is composed of a stepping motor mechanical system, a multi-channel capacitive MEMS acceleration sensor, a multi-channel data acquisition circuit, a single-chip microcomputer control circuit and a power management system. Yes, the stepper motor mechanical system is connected to multi-channel capacitive MEMS acceleration sensors, the multi-channel capacitive MEMS acceleration sensors are connected to multiple data acquisition circuits, the multi-channel data acquisition circuits are connected to the single-chip microcomputer control circuit, and the power management circuits are respectively connected to the stepping motor mechanical system , Multi-channel capacitive MEMS acceleration sensor, multi-channel data acquisition circuit and single-chip microcomputer control circuit.

[0018] The p...

Embodiment 2

[0022] Embodiment 2: Generally, a capacitor array that changes by a certain step size can be provided between the driving signal and the detection signal of the interface circuit of the MEMS capacitive acceleration sensor, so as to realize the compensation of the capacitance deviation of the sensitive structure. The capacitor array of the present invention includes 500fF, 250fF, 125fF, 62.5fF, 31.25fF, 15.625fF. In each subunit in the capacitor array, the capacitors in the unit can be connected to fixed electrodes and movable beams through switches. The parallel connection of compensation capacitors with different capacitances and sensor sensitive capacitors can be realized by controlling each switch. With this setting, the capacitance compensation array can adjust the zero offset caused by the production process to a certain extent.

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Abstract

The invention discloses a zero offset test compensation system of a multi-channel capacitor type MEMS (micro-electromechanical system) acceleration sensor. The zero offset test compensation system comprises a step motor mechanical system, the multi-channel capacitor type MEMS acceleration sensor, a multi-channel data acquisition circuit, a single chip control circuit, an upper computer and a power supply management system, wherein the step motor mechanical system is connected with the multi-channel capacitor type MEMS acceleration sensor; the multi-channel capacitor type MEMS acceleration sensor is connected with a multi-channel data acquisition circuit; the multi-channel data acquisition circuit is connected with the single chip control circuit; the step motor mechanical system comprises an aluminum alloy MEMS capacitor type acceleration sensor carrier body, a step motor and a step motor base; and the step motor is arranged on the step motor base. The zero offset test compensation system can automatically calculate the capacitance deviation of the multi-channel acceleration sensor at the same time, and the zero offset test compensation system has the advantages of being is simple in operation, high in automation level and the like.

Description

technical field [0001] The invention relates to microelectronic technology, in particular to a multi-channel capacitive MEMS acceleration sensor zero point offset test compensation device. Background technique [0002] The capacitive MEMS acceleration sensor uses the change of the equivalent capacitance caused by the change of the phase gap between the inertial mass block and the detection electrode under the action of the external acceleration to measure the acceleration. It is mainly composed of an inertial mass, a cantilever beam and two fixed electrodes. It is currently the most researched type of acceleration sensor. It has many advantages: high precision, good noise characteristics, small temperature sensitivity, low power consumption, and relatively simple structure. It has been used in a large number of low-cost automotive acceleration sensors and high-precision inertial navigation systems. Due to the differential capacitance structure used in the microstructure of...

Claims

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Application Information

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IPC IPC(8): G01P21/00
Inventor 张海峰刘晓为邵宪辉陈伟平尹亮陈龙
Owner HARBIN INST OF TECH
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