Capacitive pressure sensor and preparing method thereof

A pressure sensor and capacitive technology, which is applied in the electronic field, can solve the problems of small deformation of the elastic insulating layer and increase the deformation of the elastic insulating layer, and achieve the effects of increased sensitivity, increased pressure range, and simple processing technology

Active Publication Date: 2015-11-18
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The object of the present invention is to provide a capacitive pressure sensor and its preparation method, to solve the problem of small deformation of the elastic insulating layer in the capacitive pressure sensor when it is under pressure, and to increase the deformation of the elastic insulating layer when it is under pressure, thereby Improving the Sensitivity of Capacitive Pressure Sensors

Method used

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preparation example Construction

[0035] The preparation method of capacitive pressure sensor of the present invention comprises the following steps:

[0036] 1) The substrate 1 is ultrasonically cleaned with ethanol solution, acetone solution and deionized water, dried after cleaning, and the surface of the substrate 1 is treated with oxygen plasma or ultraviolet light / ozone.

[0037] 2) Prepare the electrode 2 on the substrate 1 by means of vacuum evaporation, magnetron sputtering, spin coating, spray coating, doctor blade coating or gravure printing.

[0038] 3) Attach two substrates 1 containing electrodes 2 to the upper and lower sides of the porous elastic film as the insulating layer 3 to obtain the required capacitive pressure sensor; wherein the electrodes 2 are in contact with the porous elastic film, and the lining Bottom 1 is the outermost.

[0039] The preparation method of the porous elastic film formed after the heat-cured elastic material is mixed with the foaming material comprises the follow...

Embodiment 1

[0047] In this embodiment, a porous elastic film formed by mixing a thermosetting elastic material and a foaming material and then heating and curing is used. The thermosetting elastic material is polydimethylsiloxane (PDMS), and the foaming material is azobisisobutyronitrile. The mixing ratio of the thermosetting elastic material to the foaming material is 10:1. The preparation method of the porous elastic film is as described above.

[0048] Complete the preparation of the capacitive pressure sensor through the following specific steps:

[0049] (1) Utilize ethanol solution, acetone solution and deionized water to clean the flexible transparent substrate 1 of polyethylene terephthalate (PET), blow dry with dry nitrogen after cleaning, and adopt oxygen plasma or ultraviolet Light / ozone treatment of the substrate surface;

[0050] (2) Prepare silver nanowire electrodes on the substrate 1 by spin coating;

[0051] (3) Attach two PET substrates containing silver nanowire ele...

Embodiment 2

[0053] In this embodiment, a porous elastic film formed by mixing a thermosetting elastic material and a foaming material and then heating and curing is used. The thermosetting elastic material is polyurethane (PU), and the foaming material is toluenesulfonyl hydrazide. The mixing ratio of the thermosetting elastic material to the foaming material is 10:2. The preparation method of the porous elastic film is as described above.

[0054] Complete the preparation of the capacitive pressure sensor through the following specific steps:

[0055] (1) Utilize ethanol solution, acetone solution and deionized water to clean the flexible transparent substrate 1 of polyethylene naphthalate (PEN), blow dry with dry nitrogen after cleaning, and adopt oxygen plasma or ultraviolet light / Ozone treatment of the substrate surface;

[0056] (2) Prepare single-walled carbon nanotube electrodes on the substrate by spin coating;

[0057] (3) Attach two PEN substrates containing single-walled ...

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Abstract

The invention discloses a capacitive pressure sensor and a preparing method thereof. The capacitive pressure sensor is composed of an insulating layer and two pieces of substrates including electrodes. The insulating layer is arranged between the two layers of electrodes. The insulating layer is a porous elastic film. According to the invention, the insulating layer adopts the porous elastic film, so that the sensitivity of the capacitive pressure sensor to pressures is increased, and the high-sensitivity pressure range of the capacitive pressure sensor is simultaneously increased; in addition, the porous elastic film is made of a material low in cost, the processing technology is simple, and the cost of the capacitive pressure sensor is lowered.

Description

technical field [0001] The invention relates to an electronic device, in particular to a capacitive pressure sensor based on a porous elastic film as an insulating layer and a preparation method thereof, belonging to the field of electronic technology. Background technique [0002] The capacitive pressure sensor uses a capacitive sensitive element to convert the measured pressure into a pressure sensor with a certain relationship with the electric output. It is characterized by a simple structure, low power, and fast dynamic response. Its sensitive part is a capacitor with variable parameters, and its most common form is a capacitor composed of two parallel electrodes with an insulating film sandwiched between them. When the film is deformed by pressure, the capacitance formed between the film and the fixed electrode changes, and the electrical signal that has a certain relationship with the voltage can be output through the measuring circuit. The sensitivity of the electric...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14G01L9/12
Inventor 郭小军陈苏杰卓本刚于鹏飞
Owner SHANGHAI JIAO TONG UNIV
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