The present invention relates to nanoscaled electronic devices with a vertical
nanowire as a functional part. Contacts are arranged on the
nanowire at different parts of the
nanowire, for example drain and source contacts. In connection to the nanowire contacts are external electrodes, that connect at different levels, as seen from the substrate, of the device. The external electrodes are elongated, and typically and preferably stripe-like. According to the invention a first external
electrode, or contacts, associated with contact(s) at a first part of the nanowire, and a second external
electrode, associated with contact(s) at a second part of the nanowire are arranged in a cross-bar configuration. The cross-bar configuration minimizes the
overlay of the external electrodes, hence, parasitic capacitances and current leakage can be reduced, and the performance of the device improved.