Differential capacitance type micromechanical accelerometer

Abstract

The invention discloses a differential-capacitive type mems accelerometer, which belongs to the inertia sensor field of a micro electric system (MEMS). The accelerometer comprises a sensitive quality component which is composed of a silicon chip, an insulating layer, and movable electrodes, fixing electrodes, a base piece, and a folding beam. The movable electrodes are distributed in equal distance on the silicon chip, the insulating layer is used to separate each movable electrode in space, the folding beam is arranged on two ends of the sensitive quality component and is fixed on the base plate through a vertical prop, thereby whole surfaces of the movable electrodes are pending and in parallel, the fixing electrodes are distributed in equal distance on the base plate and are arranged crisscross with the movable electrodes to form a group of differential-capacitive capacitances. The invention increases greatly sensitive quality of a quality block, thereby sensitivity and distinguish ability are increased greatly. The invention has simple structure, and uses integrated circuit plane manufacturing technique to process the movable electrodes and the fixing electrodes. The invention has low cost, simple manufacturing technique, high reproducibility, and high rate of finished products, and is easy to be produced in batches.

Description

technical field [0001] The invention belongs to the field of inertial sensors in micro-electromechanical systems (MEMS), in particular to a differential capacitive micro-machine accelerometer, which can be widely used in motion state measurement and control of automotive electronics, aerospace, and weaponry. Background technique [0002] The measurement and control of the motion state of objects has a wide range of applications in the fields of civilian products and defense products. Accelerometers are mainly used to measure the motion parameters of moving objects relative to inertial space. Traditional accelerometers are limited by factors such as volume, weight and cost, and it is difficult to popularize and apply them in the civilian field. Micromachined accelerometers based on integrated circuit (IC) technology and precision machining technology have outstanding advantages such as small size, light weight, low cost, and high reliability. More, so it can be used in a wid...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings of the existing technology that the sensitive mass is too small, and provide a high-sensitivity differential capacitive micro-mechanical accelerometer with simple structure, large mass, and comb-shaped electrodes formed by planar technology, to solve the problem of The sensitivity and resolution of existing micromachined accelerometers are not high enough

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