Differential capacitance type acceleration transducer with frame structure

A technology of acceleration sensor and differential capacitance, which is used in the measurement of acceleration, velocity/acceleration/impact measurement, instruments, etc., can solve the problems of lateral sensitivity interference, etc., and achieve the effect of reducing the frame mass, not easily deformed, and light in weight

Inactive Publication Date: 2006-07-19
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example: the left side is used as the capacitor plate 1, and the active electrode forms the capacitor C 1 , the right side is the capacitor plate 2, and the active electrode forms the capacitor C 2 , when working in this way, if there is a late

Method used

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  • Differential capacitance type acceleration transducer with frame structure
  • Differential capacitance type acceleration transducer with frame structure

Examples

Experimental program
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Effect test

example 1

[0020] Example 1: When there is a forward acceleration acting on the acceleration sensor, under the action of inertial force, the movable electrode 6 connected to the frame mass block will be generated relative to the position of the fixed electrodes 7, 8, 10 connected to the bonding block. backward displacement, at this moment, the capacitance C formed between the movable electrode 6 and the outer fixed electrodes 7, 8 1 will become smaller, and the capacitance C formed between the inner fixed electrode 5 2 will become larger through the interface circuit to C 1 、C 2 The magnitude of the acceleration can be measured by differential detection.

example 2

[0021] Example 2: When there is a leftward acceleration (transverse interference in the non-sensitive direction) acting on the acceleration sensor, under the action of inertial force, the movable electrode 6 connected to the frame mass block will be opposite to the fixed electrode connected to the bonding block 7, 8, 10 produce a rightward displacement, at this time, the capacitance C formed between the movable electrode 6 and the outer left fixed electrode 8 3 will become smaller, and the capacitance C formed between the outer right fixed electrode 7 4 will become larger, and the size of the change is equal, so the total capacitance C formed between the movable electrode 3 and the outer fixed electrodes 7, 8 1 =C 3 +C 4 constant. Similarly, the total capacitance formed between the movable electrode 6 and the inner fixed electrode 10 also remains unchanged. In this way, lateral acceleration will not change the output of the sensor, that is, there will be no lateral sensiti...

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Abstract

The invention provides a frame structure differential capacity type speed-up sensor. It etches bonding needed table on the back of the silicon sheet; the glass base sheet forms a fixed block with the bonding needed table; it etches an elastic beam, a quality block and fixed and active electrode pictures, wherein the bonding block comprises upper, lower, left, right and inner bonding blocks; the upper and lower bonding blocks are connected with the elastic beam; the frame sharp quality block is between the two elastic beams; the inner side of the left and right bonding blocks and the two sides of the middle bonding block have fixed electrode; the frame sharp quality block has an active electrode which is matched with the fixed electrode. The upper and lower bonding blocks and each bonding block connected with the fixed electrode use the electrostatic bonding to fix it on the glass base sheet.

Description

(1) Technical field [0001] The invention relates to a sensor structure, in particular to a differential capacitive frame structure acceleration sensor which increases the effective capacitance area and eliminates the transverse sensitivity interference. (2) Background technology [0002] Micro-mechanical inertial instruments based on micro-electro-mechanical systems (MEMS) have broad application prospects due to their small size, low cost, and integration with interface circuits. [0003] With the continuous development of acceleration sensors, people have gradually realized that the force balance differential capacitive acceleration sensor has the characteristics of large dynamic range and high test accuracy. The sensor made of the traditional rectangular mass is easy to deform in the non-sensitive direction due to its long length. The width and thickness of the mass will be limited during design, so the quality of the mass is relatively large, which is not conducive to dri...

Claims

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Application Information

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IPC IPC(8): G01P15/125
Inventor 刘晓为陈伟平霍明学谭晓昀赵振刚
Owner HARBIN INST OF TECH
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