The invention relates to a preparation method of a
lithium niobate optical
waveguide device, and belongs to the technical field of
optical communication. According to the invention, a new cladding structure is introduced, a micron-order
lithium niobate thin film optical
waveguide device is obtained through the processes of
ion implantation, BCB
spin coating, bonding, annealing and the like, the preparation of a
ridge waveguide is facilitated in process, the
transmission loss of a finally prepared optical waveguide is effectively reduced, and the constraint of light is increased. According to the invention, a BCB is selected as a bonding medium material and used as an
adhesive at normal temperature, so that a
lithium niobate film and a substrate can be effectively combined together, the BCBis cured after annealing and used as a waveguide cladding, the subsequent
mask etching process of a
lithium niobate thin film is simple and convenient, and the
lithium niobate thin film is not damaged; the optical
refractive index of
lithium niobate is 2.2, is greater than the
refractive index 1.5 of the BCB and is greater than the
refractive index 1 of air, and light can be well restrained in the waveguide, so that excellent performance can be realized without
proton exchange.