30 results about "Artificial surface" patented technology

The invention provides an on-chip terahertz band-pass filter based on an artificial surface plasmon high-order mode, and the on-chip terahertz band-pass filter comprises a dielectric substrate, a feed microstrip line, a first transition structure, a short-branch artificial surface plasmon transmission region, a second transition structure, and a long-branch artificial surface plasmon transmission region. Feed microstrip lines are arranged at the two ends of the front face of the dielectric substrate respectively, each feed microstrip line is sequentially connected with a first transition structure, a short-branch artificial surface plasmon transmission area and a second transition structure, and a long-branch artificial surface plasmon transmission area is located in the middle of the front face of the dielectric substrate. Two ends of the long branch artificial surface plasmon transmission region are respectively connected with a second transition structure, and the whole back surface of the dielectric substrate is covered with a metal layer as a metal ground; the wide-stop-band microstrip antenna has the advantages of being wide in stop band, easy to machine, small in transmission loss and small in crosstalk, does not need punching operation, and is convenient to machine.

The invention discloses a band-pass filter based on an artificial surface plasmon polariton structure and a design method thereof, a metal structure of the band-pass filter comprises an polariton structure region, the polariton structure region is provided with a plurality of plasmon polariton grooves, and the plurality of plasmon polariton grooves are arranged at intervals along a first direction; the depth direction of the plasmon polariton grooves is perpendicular to the first direction, the lengths and the widths of the plasmon polariton grooves are the same, and the multiple plasmon polariton grooves are formed in the same side of the polariton structure; the split resonant rings are arranged on the dielectric substrate, and the multiple split resonant rings are arranged close to the metal structure. Due to the fact that the multiple plasmon polariton grooves formed in the polariton structure and arranged at intervals in the first direction can form the artificial surface plasmon polariton structure, the band-pass filter based on the artificial surface plasmon polariton structure has the high inhibition capacity for harmonic waves of the band-pass frequency, and the band-pass filter based on the artificial surface plasmon polariton structure has the good inhibition capacity for the harmonic waves of the band-pass frequency.

This invention provides an artificial surface plasmon full-space beam scanning leaky antenna, comprising a dielectric substrate. The upper and lower surfaces of the dielectric substrate form a top layer and a bottom layer, respectively. The top layer of the dielectric substrate has a balun structure, an artificial surface plasmon strip group, and several metal stubs. Balun structures are symmetrically arranged at both ends of the artificial surface plasmon strip group. Several metal stubs are periodically arranged and symmetrically arranged on the upper and lower sides of the artificial surface plasmon strip group. The artificial surface plasmon strip group includes a pair of slidingly symmetrical artificial surface plasmon strips. This invention enables continuous scanning of the main beam from back-firing to front-firing, possessing full-space beam scanning capability. It has advantages such as small bandwidth occupation, high radiation efficiency, high directivity, high gain, low profile, and relatively small overall size, and can be applied in wireless communication fields such as automotive radar.

The invention provides a leaky-wave antenna unit and an antenna device, and belongs to the technical field of antennae, and the leaky-wave antenna unit comprises a dielectric substrate which comprises a first side and a second side opposite to the first side; the artificial surface plasmon polariton (SSPP) structure comprises a transmission line located on the first side and a metal layer located on the second side, the metal layer is configured to be grounded, and the transmission line is configured to be connected with a feed part; wherein the transmission line is provided with a plurality of holes arranged periodically, the metal layer is provided with at least one defect groove penetrating through the metal layer, and the orthographic projection of the defect groove on the dielectric substrate is overlapped with the orthographic projection of the holes on the dielectric substrate.

The invention provides an on-chip Vivaldi end-on-fire antenna based on artificial surface plasmon, which comprises a dielectric substrate, the top layer of the dielectric substrate is provided with a microstrip line feed structure, a Balun structure, a Balun-radiator transition structure and an antenna radiator, the microstrip line feed structure is connected with the Balun structure, and the antenna radiator is connected with the Balun structure. The Balun structure comprises a long winding transmission line and a short winding transmission line, the long winding transmission line and the short winding transmission line are respectively connected with the symmetrically arranged Balun-radiator transition structures, the Balun-radiator transition structures are respectively connected with the antenna radiator, the antenna radiator comprises a Vivaldi radiator and an artificial surface plasmon structure, and the artificial surface plasmon structure is connected with the antenna radiator. The artificial surface plasmon structure is arranged on the Vivaldi radiator, and the Vivaldi radiator comprises a right trapezoid flaring part and a rectangular guide part; compared with other on-chip antennas, the on-chip Vivaldi end-on-fire antenna based on the artificial surface plasmon has the advantages that the loss is smaller, the radiation efficiency is higher, and the gain is higher.

The utility model discloses an artificial surface plasmon filter, which belongs to the technical field of microwaves and comprises a ground layer, a dielectric plate A, an SSPP unit layer A, a dielectric plate B, an SSPP unit layer B, a dielectric plate C, an SSPP unit layer C and a half-mode substrate integrated waveguide which are sequentially arranged from bottom to top. A cylinder B is arranged between the SSPP unit layer A and the SSPP unit layer B. A cylinder C is arranged between the SSPP unit layer A and the SSPP unit layer C. The length of the SSPP unit layer B is smaller than that of the SSPP unit layer A. The half-mode substrate integrated waveguide comprises a metal sheet and thirteen cylinders A which are equal in height and radius. The upper surface of the dielectric plate C is provided with two microstrip lines, and the microstrip lines are connected with the metal plate. The size of the filter is reduced through the three-dimensional heterogeneous integration technology, the progressive frequency of an SSPP structure is greatly reduced, the field constraint effect is enhanced, and better performance can be achieved under the condition that the size is more compact.

The invention discloses a polarization reconfigurable circularly polarized antenna designed by using an artificial surface plasmon structure, which is etched on an upper metal layer of a single-layer dielectric plate, and comprises four rectangular radiation patches which are distributed in a central symmetry manner and respectively correspond to a first feed port, a second feed port, a third feed port and a fourth feed port; the two artificial surface plasmon structures are in a bent line shape, and the two ends of each artificial surface plasmon structure are electrically connected to the two adjacent rectangular radiation patches respectively, so that a phase delay path is formed between the adjacent feed ports; the one-to-four microstrip feed network comprises a main feed line and four branch feed lines led out from a node of the main feed line; the four radio frequency switches are respectively connected in series with the four branch feed lines and the four corresponding rectangular radiation patches; and by controlling the alternate connection and disconnection of two groups of diagonal switches in the four radio frequency switches, radio frequency signals are fed in through different feed ports and are transmitted through the artificial surface plasmon structure, so that phase delay is realized to output circularly polarized waves.

A modular foundation structure for artificial surface systems may include a plurality foundation sections. Each of the foundation section may comprise a structure base layer, an adhesive layer, and an impact and thermal protective layer. The adhesive layer may cover the structural base layer, and the impact and thermal protective layer may be attached to the structural base layer via the adhesive layer. The foundation sections may be provided as separate foundation sections that may be positionable to be attached to one another to form the modular foundation structure. The foundation sections may be attachable one another with a section adhesive. Embodiments may include a connection edge that may be positioned to surround and abut a perimeter of the modular foundation structure. Embodiments may also include an artificial surface layer that may be positioned to cover an upper surface area of the modular foundation structure.

The invention discloses a leaky-wave antenna based on an artificial surface plasmon supergrating. The leaky-wave antenna comprises a dielectric substrate, a radiator and a grounding plate, the radiator is arranged on one side of the dielectric substrate, the radiator is an ideal electric conductor, and a periodically modulated super grating structure is etched on the surface of the radiator; the grounding plate is arranged on the other side of the dielectric substrate, the grounding plate is an ideal electric conductor, and the periodically modulated super grating structure is etched on the surface of the grounding plate; the periodically modulated super grating structure is used for exciting an artificial surface plasmon mode and generating space harmonics, and controlling a phase constant of the artificial surface plasmon mode through frequency change, so that antenna radiation beams realize continuous scanning from end emission to side emission to back emission. Controllable radiation of SSPP leakage is achieved, meanwhile, the directivity of the antenna is further enhanced through the holographic patches around the radiation surface, side lobes are restrained, and miniaturization of the antenna is achieved.

The application discloses a planar vortex orbit angular momentum antenna based on artificial surface plasmons. The application comprises a resonant antenna and a feeding system; the resonant antenna comprises an artificial surface plasmon metal ring and a first dielectric plate; the feeding system comprises a second dielectric plate, an air dielectric layer, a metal ground, a third dielectric plate and a feeding network; two microstrip stubs are arranged on the third dielectric plate, and a small metal disc is arranged at the end of each microstrip stub; the microstrip stubs are connected with the feeding network through metal vias; the surface impedance of the slotted unit of each artificial surface plasmon unit in the artificial surface plasmon metal ring is the same or different. The application can emit a vortex wave beam carrying a precisely defined orbit angular momentum on a plane, and through synthesizing multiple wave beams at a fixed frequency, the multiple wave beams can be superimposed to form a new wave beam, so that the shape of the wave beam can be controlled. The wave beam scanning can be realized by adjusting the surface impedance distribution of each wave beam.

The invention discloses a phase shifter and an antenna, and relates to the technical field of phase shifters. The phase shifter comprises an artificial surface plasmon circuit structure, wherein the artificial surface plasmon circuit structure comprises an artificial surface plasmon waveguide; the medium disturbance element and the artificial surface plasmon waveguide are opposite to each other and are arranged at an interval; and the MEMS actuator is connected with the medium disturbance element, and the MEMS actuator is configured to drive the medium disturbance element to move relative to the artificial surface plasmon waveguide, so that the medium disturbance element interacts with the local electromagnetic field of the artificial surface plasmon waveguide. Through the characteristics of high-precision driving and low power consumption of the MEMS technology, the provided phase shifter has low insertion loss and a wide phase adjustment range.

The invention provides a terahertz series-fed beam forming network antenna and a design method, and belongs to the technical field of antenna design, and the design method comprises the following steps: determining the size and position of a radiation slot based on a waveguide slot array, and introducing an artificial surface plasmon structure and an open stop band suppression structure; designing a series-fed beam forming network, and calculating the length of a waveguide transmission line to provide a required phase difference; the size parameters of the structures of all parts of the antenna are optimized, aperture field distribution of a target antenna is achieved, a series-fed beam forming network and an artificial surface plasmon structure are adopted, the design of the passive two-dimensional beam scanning antenna in the terahertz frequency band is achieved, and the antenna design method can be applied to beam scanning of any frequency band and has wide application prospects. Beam scanning of any two-dimensional space is designed, the designed antenna can achieve the beam scanning range of-25 degrees to 35 degrees and the beam scanning range of-50 degrees to 50 degrees on the plane of the pitch angle and the plane of the azimuth angle respectively, and the antenna is high in efficiency and compact in structure.

This invention discloses a bandwidth-controllable compact ridge waveguide cavity bandpass filter based on SSPP and its fabrication method. The device includes a cavity containing a ridge waveguide. Several inverted T-shaped grooves are etched at intervals on the ridge waveguide, forming a structure where the middle section is an artificial surface plasmon polariton (SSPP) and the left and right ends are transitional SSPP structures. The transitional SSPP structures at the left and right ends are respectively connected to horizontal coaxial connectors. Dual grating structures are respectively provided on both sides of the ridge waveguide within the cavity. This invention achieves a wideband bandpass structure of 7.6GHz–12.4GHz by integrating the ridge waveguide, SSPP, and dual gratings into a single cavity. It achieves a return loss below -16dB and an insertion loss of 0.23dB within the band. Low loss and small size are achieved within a 44.8% wideband, and the passband bandwidth can be flexibly tuned.

The application discloses a kind of freely tunable artificial surface plasmon transmission line structure and application.The designed transmission line adopts interdigital H-shaped artificial surface plasmon structure, mainly including three parts of coplanar waveguide structure part, transition structure part and SSPP part, wherein coplanar waveguide section is used to connect with plane microwave structure, transition structure and SSPP section are respectively composed of SSPP unit with different parameters, mode conversion and signal transmission are realized.SSPP unit is provided with interdigital structure in recess, not only can further reduce structure size, but also can control dispersion cut-off frequency.Each unit in SSPP section is coupled in series connection through interdigital structure, the size of interdigital structure can control low-frequency cut-off frequency.Therefore, the interdigital structure at different positions can realize the free tuning of high frequency and low frequency of transmission line.The structure of the application has the characteristics of miniaturization, flexible ultra-thin and high flexibility, and has potential application prospect in ultra-small high-speed communication system.

The invention discloses a dynamic adjustable Fano resonance artificial surface plasmon sensor based on a diode. The dynamic adjustable Fano resonance artificial surface plasmon sensor comprises seven layers including a metal floor, a dielectric substrate, a microstrip feeder line, the dielectric substrate, a fishbone structure, the dielectric substrate and an annular structure from bottom to top. Openings are formed in the two sides of the annular resonant structure, diodes are installed on the openings respectively, and dynamic adjustment of the resonant frequency is achieved by adjusting forward bias and reverse bias combination of the diodes. The structure utilizes the design of breaking the symmetry of the ring resonator, and improves the sensitivity to the change of the dielectric constant. When the dielectric constant of the surrounding medium changes, the resonant frequency generates measurable offset, and the device can be used for non-contact liquid detection, chemical analysis, environmental monitoring and the like. Compared with an existing adjustable sensor, the adjustable sensor is larger in tuning range, high in response speed, easy to integrate, simple in structure and low in cost.

The application discloses a true time delay line based on a misaligned symmetric artificial surface plasmon structure and belongs to the field of novel microwave devices, comprising a metal ground, a dielectric substrate arranged above and below the metal ground, a true time delay line structure arranged on the dielectric substrate above the metal ground, the true time delay line structure comprising an artificial surface plasmon waveguide periodically arranged by a plurality of misaligned symmetric artificial surface plasmon unit structures loaded with varactor diodes, a microstrip line for feeding the artificial surface plasmon waveguide, and a varactor diode bias circuit composed of a metal patch and the microstrip line. The true time delay line based on the misaligned symmetric artificial surface plasmon structure has the characteristics of approximately constant time delay value in a wideband range, real-time regulation of the time delay value through the varactor diode, low insertion loss and easy processing, and has a wide application prospect in a wideband phased array system.

Surface layer (200; 300; 600) for artificial surface covering in a sports facility, a leisure facility or a playground, comprising: a fiber retention layer (202; 603); and a fiber layer (201; 601) comprising a plurality of fibers (203; 602), wherein the fibers (203; 602) are connected to the fiber holding layer (202; 603) and extend away from the fiber holding layer (202; 603) by a distance to provide a cover surface (606); wherein the fibers (203; 602) comprise one or more natural fibers.

The application discloses a tunable one-way and two-way microwave wave trap filter and a design method, which has one-way and two-way filtering functions. The device structure mainly comprises an artificial surface plasmonic polariton planar waveguide and a yttrium iron garnet microwave resonator. Circular polarization spin polarized microwave fields with spin-momentum locking characteristics are generated at specific positions in the planar waveguide, and the magnon mode generated in the microwave resonator is spin-selectively coupled with the spin polarized microwave field. Under the critical coupling condition, the microwave input in one direction is completely filtered after the magnon, and the microwave input in the other direction is completely transmitted, so that the one-way filtering function of the microwave at a specific frequency is realized. Further loading of additional microwave resonators and through the extension of the experimental configuration, the two-way filtering function can also be realized. The application provides a more simple and flexible method to realize the multifunctional microwave wave trap filter without complex structure design and strict parameter control.

This invention provides an end-fire Vivaldi filter antenna with independently controllable cutoff frequency based on an equivalent artificial surface plasmon polariton (ESP). It comprises a dielectric substrate, with a top layer and a bottom layer formed on the upper and lower surfaces of the substrate, respectively. The bottom layer has a ground metal layer. An ESP bandpass filter based on a hybrid substrate integrated waveguide structure is embedded in the middle of the substrate. The top layer has a first microstrip line, a second microstrip line, and a first Vivaldi antenna. One end of the first microstrip line serves as the antenna feed port and is connected to the ground metal layer via a microwave high-frequency connector. The other end of the first microstrip line is connected to the first Vivaldi antenna sequentially via the second microstrip line and the ESP bandpass filter based on the hybrid substrate integrated waveguide structure. This invention enables independent control of the passband cutoff frequency and out-of-band cutoff frequency, exhibiting independently controllable bandwidth, stable stopband, and deep out-of-band suppression capabilities.

The application discloses an artificial surface plasmon structure sensor, a multi-modal sensing gripper and application thereof, and relates to the technical field of intelligent laboratory automation. The sensor comprises an artificial surface plasmon substrate, the artificial surface plasmon substrate comprises a periodic groove unit, a gradually changing transition section and a coplanar waveguide transmission end arranged in sequence from near to far at two ends of the periodic groove unit, the coplanar waveguide transmission end is connected with a coaxial cable, the coaxial cables on both sides are connected with a signal input end and a signal output end of an external SDR device respectively, and an excitation signal is input to the sensor and a response signal is collected through the SDR device. The application has the functions of gripping force control and substance identification, can safely complete the gripping and identification of a dangerous liquid centrifuge tube without any human intervention, greatly reduces the need for manual contact with harmful substances, and improves the safety and automation level of the intelligent laboratory in dangerous operation.

The application discloses a kind of harmonic amplitude frequency modulators based on artificial surface plasmon, belong to novel microwave device field, by metal backplate, upper layer metal structure and separate dielectric layer constitute, upper layer metal structure is by the periodic arrangement of artificial surface plasmon unit structure loaded with PIN tube into time domain coding artificial surface plasmon waveguide, transition structure being arranged at the two ends of the time domain coding artificial surface plasmon waveguide, and high-frequency isolation structure of connection control signal composition, by controlling the period and duty cycle of the square wave signal, the frequency and amplitude adjustment of output harmonic signal are carried out, and 0 order harmonic is filtered out, the application has the amplitude frequency of output harmonic signal adjustable, can filter out 0 order harmonic, with the advantages of easy processing, small size and low cost.

The invention discloses a high-gain frequency scanning antenna based on artificial surface plasmon, and relates to the technical field of wireless communication antennas. The artificial surface plasmon transmission line is arranged on the dielectric substrate and is used for constraining and transmitting electromagnetic waves in a working frequency band, and the transmission characteristic of the artificial surface plasmon transmission line can be adjusted through the dispersion characteristic of a periodic structure; the circular opening resonance ring arrays are symmetrically arranged on the two sides of the artificial surface plasmon transmission line and used for radiating transmission wave energy to a free space; the feed structures are arranged at the two ends of the artificial surface plasmon transmission line and used for inputting or outputting radio frequency signals; and the transition structure is arranged between the feed structure and the artificial surface plasmon transmission line, is used for realizing impedance matching and wave number matching between the feed structure and the artificial surface plasmon transmission line, and can realize a wide-angle and high-linearity frequency scanning function on the premise of ensuring low transmission loss and high radiation efficiency.

The application provides a low-loss reconfigurable artificial surface plasmon transmission line, which comprises a dielectric substrate and a metal structure thereon. The metal structure is composed of periodically arranged first metal units; the first metal unit comprises a rectangular metal with a certain width, a zigzag metal and two varactor diodes, the rectangular metal is vertically placed with the zigzag metal, and the varactor diodes are connected in parallel to the two metal parts; the zigzag metal structure is in a corrugated shape, and the protruding part is a triangle. The low-loss reconfigurable artificial surface plasmon transmission line provided by the application can realize obvious loss reduction, realize continuous amplitude modulation of-1 dB to-40 dB in the Ku band, realize continuous phase modulation of more than 160° in the X band, and is expected to be applied to radio frequency microwave circuits.

The application discloses a kind of wideband digital phase shifters based on artificial surface plasmon, including dielectric substrate (1), 50Ω microstrip line (2), impedance and wave vector matching section (3), interdigital capacitive structure (4), phase shifter branch (5), PIN diode channel (6) and feed network (7);50Ω microstrip line (2) is connected with external device SMA joint;Impedance and wave vector matching section (3) converts electromagnetic wave transmission mode from quasi-TEM mode into TM mode, forms the transmission mode of artificial surface plasmon;Interdigital capacitive structure (4) can realize independent control to artificial surface plasmon branch;Phase shifter branch (5) can realize digital phase shift;PIN diode channel (6) and feed network (7) jointly constitute control system.It can realize independent control to artificial surface plasmon branch, and can realize wideband phase shift.

This invention discloses a recurrent neural network physical architecture based on artificial surface plasmon supercells, relating to the interdisciplinary fields of metamaterials, surface plasmons, and brain-like computing. The architecture consists of multiple identical planar network layers stacked sequentially in the vertical direction. Each layer includes a dielectric substrate (1), an SSPP supercell array (2), a bi-line divider (3), and a combiner (4). The SSPP supercell array is connected to inter-layer feedback links via vias. Its output is divided into an output path and a feedback path by a bi-line divider. The feedback path integrates an RF amplifier (5) for gain compensation and transmits the signal across layers to the combiner in the next layer for vector superposition with the new input signal. This architecture integrates temporal feature extraction, nonlinear modulation, and recursive computation, possessing ultra-high-speed parallel processing capabilities, and can effectively realize deep fusion and associative decision-making of multimodal information based on the nonlinear coherence effect of SSPP waves.

The invention discloses a multilayer waveguide device based on artificial surface plasmon, which comprises at least three metal layers which are stacked in sequence, and the metal layers are respectively a top metal layer, at least one middle metal layer and a bottom metal layer; at least one middle metal layer in the multi-layer waveguide device is provided with a long thin hole; plasmon structures are arranged on the peripheries of the long and thin holes in one face of at least one layer of the middle metal layer. In the laminated arrangement of the top metal layer, the middle metal layer and the bottom metal layer, the surface of the metal layer adjacent to the surface, provided with the plasmon structure, of the middle metal layer is a flat surface; and the top metal layer or the bottom metal layer is also provided with a waveguide port communicated with the waveguide transmission channel of the plasmon structure. The high-performance and low-cost plasmon-structure high-performance waveguide transmission structure has the advantages of high performance, low cost and good yield.

The application discloses a kind of broadband omnidirectional antennas based on artificial surface plasmon, belong to omnidirectional antenna technical field.It includes by upper to lower sequentially connected upper layer patch, circular substrate and lower layer patch, and the center of circular substrate is connected with coaxial connector by center patch, and form omnidirectional radiation characteristics;Upper layer patch and lower layer patch structure are same, and constitute dipole with upper and lower correspondence;Upper layer patch includes eight pieces of sector patch that are arranged in clockwise direction, and form hub shape;Sector-shaped guide plate of sector patch is connected with center patch by microstrip transmission line, and artificial surface plasmon transmission line that is composed of 30 artificial surface plasmon units and is equidistantly arranged is arranged in sawtooth shape on microstrip transmission line.The working bandwidth range of the antenna of the application is 4.71~7.29GHz, and total efficiency reaches 78.5%.The overall diameter size of antenna is 0.92λ, and section height is 1mm.The application realizes the requirement of low cost, low profile, low loss, easy to integrate with planar circuit for omnidirectional antenna under C and XC wave band.

The application discloses a compact free electron vortex laser based on a planar topological cavity. The device combines the concept of artificial surface plasmons and the principle of topological photonics, and comprises a planar topological cavity and a linear electron beam source. The planar topological cavity is composed of two kinds of valley photonic crystals, and the cell structure is a pair of unequal-diameter metal cylinders placed on a metal substrate, and supports an echo wall mode with a longitudinal electric field component through a topological boundary state at a domain wall. The electron beam generated by the electron beam source moves along the linear edge of the topological cavity, and interacts with the topological boundary state through the Smith-Purcell radiation effect. The application utilizes the topological protection characteristics to realize efficient in-plane feedback in a compact triangular loop, thereby generating stimulated radiation, and can synchronously adjust the frequency and topological charge number of the output laser by changing the electron velocity, and can be applied to light manipulation, high-resolution imaging and wireless communication and other scenes with high requirements for miniaturization and tunable vortex sources.

The invention relates to a radiation integrated low RCS antenna with high angle stability and a design method thereof, and belongs to the technical field of electromagnetic stealth. The problems that a traditional antenna RCS reduction technology is prone to deteriorate radiation performance, the bandwidth is narrow, and oblique incidence is unstable are solved. According to the technical scheme, a three-layer structure is adopted, an artificial surface plasmon polariton metasurface achieves RCS reduction through wave absorption, a metasurface array achieves RCS reduction through phase cancellation, and a feed network feeds through slot coupling; the design method comprises the steps of RCS reduction frequency band determination, metasurface unit design, feed network matching and the like. The technical effects are that the ultra-wideband RCS is reduced, the angle stability is high, the good radiation performance is maintained, the structure is simple, the work is stable, and the like.

The application discloses a non-contact biochemical sensor of artificial local surface plasmon, which comprises an artificial surface plasmon transmission line, a dielectric substrate, an artificial local surface plasmon resonator array and a micro-flow cavity arranged on the artificial local surface plasmon resonator array and comprising a dielectric shell layer and a cavity pattern layer arranged in the dielectric shell layer, the cavity pattern layer is used for storing a solution to be measured, and the dielectric shell layer is in contact with the artificial local surface plasmon resonator array. The application provides a sensor in which the artificial local surface plasmon resonator array and the artificial surface plasmon transmission line are coupled with each other, the structures simulate optical surface plasmon characteristics in a microwave frequency band through a subwavelength periodic structure, electromagnetic field is strongly localized and slowly propagated, and therefore the interaction efficiency with a sample is enhanced, the characteristics prolong the interaction time of a measured sample and electromagnetic waves, and higher sensitivity and a Q factor are provided.